公开(公告)号：US08481931B2

公开(公告)日：2013-07-09

申请号：US12482577

申请日：2009-06-11

Applicant: Simon Page

Inventor： Simon Page

IPC: G21K5/00 ,  H01J37/26

CPC classification number: H01J37/05 ,  G01N23/2273 ,  H01J37/08 ,  H01J37/295 ,  H01J37/30 ,  H01J2237/05 ,  H01J2237/08 ,  H01J2237/0815

Abstract: The present invention provides an electron spectroscopy apparatus (12) comprising a high energy particle source (12) for irradiating a sample, an electron detector system (16) (e.g. including a delay line detector) for detecting electrons emitted from the sample and an ion gun (8) for delivering a polycyclic aromatic hydrocarbon (PAH) ion beam to the sample, wherein the ion gun comprises a polycyclic aromatic hydrocarbon ion source, for example comprising coronene. In an embodiment, the PAH is located in a heated chamber (22) and vaporised to produce gas phase PAH. The gas phase PAH molecules are then ionised by electron impact, extracted from the ion source via an extraction field and focussed using ion optics. The PAH ion beam can be used for surface cleaning and depth analysis.

Abstract translation: 本发明提供了一种包括用于照射样品的高能粒子源（12），用于检测从样品发射的电子的电子检测器系统（16）（例如包括延迟线检测器）的电子能谱装置（12） 用于将多环芳烃（PAH）离子束输送到样品的枪（8），其中所述离子枪包括多环芳族烃离子源，例如包含芳烃。 在一个实施方案中，PAH位于加热室（22）中并蒸发以产生气相PAH。 气相PAH分子然后通过电子轰击电离，通过提取场从离子源提取，并使用离子光学聚焦。 PAH离子束可用于表面清洁和深度分析。

公开(公告)号：US20090309023A1

公开(公告)日：2009-12-17

申请号：US12482577

申请日：2009-06-11

Applicant: Simon Page

Inventor： Simon Page

IPC: G01N23/00

CPC classification number: H01J37/05 ,  G01N23/2273 ,  H01J37/08 ,  H01J37/295 ,  H01J37/30 ,  H01J2237/05 ,  H01J2237/08 ,  H01J2237/0815

Abstract: The present invention provides an electron spectroscopy apparatus (12) comprising a high energy particle source (12) for irradiating a sample, an electron detector system (16) (e.g. including a delay line detector) for detecting electrons emitted from the sample and an ion gun (8) for delivering a polycyclic aromatic hydrocarbon (PAH) ion beam to the sample, wherein the ion gun comprises a polycyclic aromatic hydrocarbon ion source, for example comprising coronene. In an embodiment, the PAH is located in a heated chamber (22) and vaporised to produce gas phase PAH. The gas phase PAH molecules are then ionised by electron impact, extracted from the ion source via an extraction field and focussed using ion optics. The PAH ion beam can be used for surface cleaning and depth analysis.

Abstract translation: 本发明提供了一种包括用于照射样品的高能粒子源（12），用于检测从样品发射的电子的电子检测器系统（16）（例如包括延迟线检测器）的电子分光装置（12） 用于将多环芳烃（PAH）离子束输送到样品的枪（8），其中所述离子枪包括多环芳族烃离子源，例如包含芳烃。 在一个实施方案中，PAH位于加热室（22）中并蒸发以产生气相PAH。 气相PAH分子然后通过电子轰击电离，通过提取场从离子源提取，并使用离子光学聚焦。 PAH离子束可用于表面清洁和深度分析。

公开(公告)号：US20060060770A1

公开(公告)日：2006-03-23

申请号：US10533570

申请日：2003-11-04

Applicant: Simon Page ,  Colin Park ,  Christopher Hopper

Inventor： Simon Page ,  Colin Park ,  Christopher Hopper

IPC: B01D59/44 ,  G01N23/00

CPC classification number: H01J49/48

Abstract: A charged particle (e.g. photoelectron) spectrometer is operable in a first mode to produce an energy spectrum relating to the composition of a sample being analysed, and in a second mode to produce a charged particle image of the surface of the sample being analysed. A detector is used to detect charged particles produced in both modes of operation. A method of operation of the spectrometer includes the step of selecting which of said first and second modes to use and the detector being operated accordingly.

Abstract translation: 带电粒子（例如光电子）光谱仪可在第一模式下操作以产生与所分析的样品的组成相关的能谱，并且在第二模式中产生被分析的样品的表面的带电粒子图像。 检测器用于检测在两种操作模式下产生的带电粒子。 光谱仪的操作方法包括以下步骤：选择要使用的所述第一和第二模式中的哪一种，并且相应地操作检测器。