知搜-全球专利检索

  1. Login
  2. Sign Up

Search Results

211 records (took 0.033 seconds)

    LASER DEVICE AND LASER ANNEAL DEVICE
    122.
    发明申请
    LASER DEVICE AND LASER ANNEAL DEVICE 审中-公开

    公开(公告)号：US20190157120A1

    公开(公告)日：2019-05-23

    申请号：US16261338

    申请日：2019-01-29

    Applicant: Gigaphoton Inc.

    Inventor： Satoshi TANAKA ,  Osamu WAKABAYASHI

    IPC: H01L21/67 ,  B23K26/352 ,  B23K26/0622

    Abstract: A laser device for laser annealing includes: (1) a laser oscillator configured to output pulse laser light; and (2) an optical pulse stretcher (OPS) device disposed on an optical path of the pulse laser light output from the laser oscillator and including at least one OPS configured to stretch a pulse time width of the pulse laser light incident on the OPS. A delay optical path length L(1) of a first OPS having the minimum delay optical path length L among OPSs is in a range of the following expression (A), ΔT75%×c≤L(1)≤ΔT25%×c   (A), where ΔTa % is a time full-width of a position at which light intensity represents a value of a % with respect to a peak value in an input waveform of the pulse laser light that is output from the laser oscillator and incident on the OPS device, and c is light speed.

    GAS LASER DEVICE
    123.
    发明申请
    GAS LASER DEVICE 审中-公开

    公开(公告)号：US20190148905A1

    公开(公告)日：2019-05-16

    申请号：US16232637

    申请日：2018-12-26

    Applicant: GIGAPHOTON INC.

    Inventor： Hiroshi UMEDA ,  Osamu WAKABAYASHI

    IPC: H01S3/097 ,  H01S3/0975 ,  H01S3/104

    Abstract: A discharge excitation gas laser device includes: first and second discharge electrodes disposed to face each other; a plurality of peaking capacitors connected to the first discharge electrode; a charger; a plurality of pulse power modules, each one of the pulse power modules including a charging capacitor to which a charged voltage is applied from the charger, a pulse compression circuit that pulse-compresses and outputs electrical energy stored in the charging capacitor as an output pulse to a corresponding peaking capacitor, and a switch disposed between the charging capacitor and the pulse compression circuit; a plurality of output pulse sensors, each one of the output pulse sensors detecting an output pulse output by a corresponding pulse power module; and a control unit configured to control, based on a detection result of each of the output pulse sensor, a tinting of a switch signal to be input to a corresponding switch.

    GAS LASER APPARATUS
    125.
    发明申请
    GAS LASER APPARATUS 审中-公开

    公开(公告)号：US20190081450A1

    公开(公告)日：2019-03-14

    申请号：US16178363

    申请日：2018-11-01

    Applicant: Gigaphoton Inc.

    Inventor： Natsushi SUZUKI ,  Osamu WAKABAYASHI ,  Hiroaki TSUSHIMA ,  Masanori YASHIRO

    IPC: H01S3/036 ,  B01D53/04 ,  H01S3/104 ,  H01S3/225 ,  B01D53/34 ,  B01D53/82 ,  B01D53/86 ,  B01D53/68

    Abstract: A gas laser apparatus may include: a laser chamber connected through a first control valve to a first laser gas supply source that supplies a first laser gas containing a halogen gas and connected through a second control valve to a second laser gas supply source that supplies a second laser gas having a lower halogen gas concentration than the first laser gas; a purification column that removes at least a part of the halogen gas and a halogen compound from at least a part of a gas exhausted from the laser chamber; a booster pump, connected through a third control valve to the laser chamber, which raises a pressure of a gas having passed through the purification column to a gas pressure that is higher than an operating gas pressure of the laser chamber; and a controller that calculates, on a basis of a first amount of a gas supplied from the booster pump through the third control valve to the laser chamber, a second amount of the first laser gas that is to be supplied to the laser chamber and controls the first control valve on a basis of a result of the calculation of the second amount.

    GAS LASER APPARATUS
    126.
    发明申请
    GAS LASER APPARATUS 审中-公开

    公开(公告)号：US20190081449A1

    公开(公告)日：2019-03-14

    申请号：US16178351

    申请日：2018-11-01

    Applicant: Gigaphoton Inc.

    Inventor： Natsushi SUZUKI ,  Osamu WAKABAYASHI ,  Hiroaki TSUSHIMA ,  Masanori YASHIRO

    IPC: H01S3/036 ,  B01D53/04 ,  H01S3/104 ,  H01S3/225 ,  B01D53/34 ,  B01D53/82 ,  B01D53/86 ,  B01D53/68

    Abstract: A gas laser apparatus may include: a laser chamber connected through a first control valve to a first laser gas supply source that supplies a first laser gas containing a halogen gas and connected through a second control valve to a second laser gas supply source that supplies a second laser gas having a lower halogen gas concentration than the first laser gas; a purification column that removes at least a part of the halogen gas and a halogen compound from at least a part of a gas exhausted from the laser chamber; a booster pump, connected through a third control valve to the laser chamber, which raises a pressure of a gas having passed through the purification column to a gas pressure that is higher than an operating gas pressure of the laser chamber; and a controller that calculates, on a basis of a first amount of a gas supplied from the booster pump through the third control valve to the laser chamber, a second amount of the first laser gas that is to be supplied to the laser chamber and controls the first control valve on a basis of a result of the calculation of the second amount.

    BEAM TRANSMISSION SYSTEM, EXPOSURE DEVICE, AND ILLUMINATION OPTICAL SYSTEM OF THE EXPOSURE DEVICE
    128.
    发明申请
    BEAM TRANSMISSION SYSTEM, EXPOSURE DEVICE, AND ILLUMINATION OPTICAL SYSTEM OF THE EXPOSURE DEVICE 审中-公开

    公开(公告)号：US20180314156A1

    公开(公告)日：2018-11-01

    申请号：US16028240

    申请日：2018-07-05

    Applicant: Gigaphoton Inc.

    Inventor： Akiyoshi SUZUKI ,  Osamu WAKABAYASHI

    IPC: G03F7/20 ,  H05H13/04 ,  H01S3/09

    Abstract: The present invention allows more freely setting of the polarization direction of illumination light on an illumination surface of an exposure device. A beam transmission system (121) that transmits, to an exposure device (130), a linearly polarized optical beam (L) output from a free electron laser device (10) includes: an optical beam splitting unit (50) configured to split the optical beam (L) into a first optical beam (L1) and a second optical beam (L2); and a first polarization direction rotating unit (51) configured to rotate the linear polarization direction of the first optical beam (L1).

    EXCIMER LASER APPARATUS
    129.
    发明申请
    EXCIMER LASER APPARATUS 审中-公开

    公开(公告)号：US20180261973A1

    公开(公告)日：2018-09-13

    申请号：US15973846

    申请日：2018-05-08

    Applicant: Gigaphoton Inc.

    Inventor： Yousuke FUJIMAKI ,  Hiroaki TSUSHIMA ,  Hiroyuki IKEDA ,  Osamu WAKABAYASHI

    IPC: H01S3/134 ,  H01S3/038 ,  H01S3/225 ,  H01S3/097 ,  H01S3/036 ,  H01S3/13 ,  H01S3/11

    Abstract: An excimer laser apparatus may include an optical resonator, a chamber including a pair of discharge electrodes, the chamber being provided in the optical resonator and configured to store laser gas, an electric power source configured to receive a trigger signal and apply a pulsed voltage to the pair of discharge electrodes based on the trigger signal, an energy monitor configured to measure pulse energy of a pulse laser beam outputted from the optical resonator, a unit for adjusting partial pressure of halogen gas configured to perform exhausting a part of the laser gas stored in the chamber and supplying laser gas to the chamber, and a controller configured to acquire measurement results of the pulse energy measured by the energy monitor, detect energy depression based on the measurement results of the pulse energy, and control the unit for adjusting partial pressure of halogen gas based on results of detecting the energy depression to adjust the partial pressure of halogen gas in the chamber.

Patent Agency Ranking