公开(公告)号：US20180261973A1

公开(公告)日：2018-09-13

申请号：US15973846

申请日：2018-05-08

Applicant: Gigaphoton Inc.

Inventor： Yousuke FUJIMAKI ,  Hiroaki TSUSHIMA ,  Hiroyuki IKEDA ,  Osamu WAKABAYASHI

IPC: H01S3/134 ,  H01S3/038 ,  H01S3/225 ,  H01S3/097 ,  H01S3/036 ,  H01S3/13 ,  H01S3/11

Abstract: An excimer laser apparatus may include an optical resonator, a chamber including a pair of discharge electrodes, the chamber being provided in the optical resonator and configured to store laser gas, an electric power source configured to receive a trigger signal and apply a pulsed voltage to the pair of discharge electrodes based on the trigger signal, an energy monitor configured to measure pulse energy of a pulse laser beam outputted from the optical resonator, a unit for adjusting partial pressure of halogen gas configured to perform exhausting a part of the laser gas stored in the chamber and supplying laser gas to the chamber, and a controller configured to acquire measurement results of the pulse energy measured by the energy monitor, detect energy depression based on the measurement results of the pulse energy, and control the unit for adjusting partial pressure of halogen gas based on results of detecting the energy depression to adjust the partial pressure of halogen gas in the chamber.

公开(公告)号：US20160308324A1

公开(公告)日：2016-10-20

申请号：US15198433

申请日：2016-06-30

Applicant: Gigaphoton Inc.

Inventor： Hiroyuki IKEDA ,  Kouji KAKIZAKI ,  Hiroaki TSUSHIMA ,  Hisakazu KATSUUMI

IPC: H01S3/038 ,  H01S3/097 ,  H01S3/225 ,  H01S3/036

CPC classification number: H01S3/038 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/09702 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2258

Abstract: A laser chamber for a discharge excited gas laser apparatus may include: a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; a fan configured to flow laser gas between the first discharge electrode and the second discharge electrode; a first insulating member disposed upstream and downstream of a laser gas flow from the first discharge electrode; a metallic damper member disposed upstream of the laser gas flow from the second discharge electrode; and a second insulating member disposed downstream of the laser gas flow from the second discharge electrode.

Abstract translation: 用于放电激发气体激光装置的激光室可以包括：设置在激光室中的第一放电电极; 第二放电电极，设置成与激光室中的第一放电电极相对; 风扇，被配置为在所述第一放电电极和所述第二放电电极之间流动激光气体; 设置在来自所述第一放电电极的激光气流的上游和下游的第一绝缘构件; 设置在来自所述第二放电电极的激光气流的上游的金属阻尼构件; 以及设置在来自第二放电电极的激光气流的下游的第二绝缘构件。

公开(公告)号：US20160365696A1

公开(公告)日：2016-12-15

申请号：US15245245

申请日：2016-08-24

Applicant: Gigaphoton Inc.

Inventor： Hiroaki TSUSHIMA ,  Kouji KAKIZAKI ,  Takashi MATSUNAGA ,  Takeshi ASAYAMA ,  Hisakazu KATSUUMI ,  Hiroshi UMEDA ,  Hiroyuki IKEDA

IPC: H01S3/036 ,  H01S3/225 ,  H01S3/038 ,  H01S3/041 ,  H01S3/04

CPC classification number: H01S3/036 ,  H01S3/038 ,  H01S3/0384 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/134 ,  H01S3/225

Abstract: A laser chamber including a first space and a second space in communication with the first space may include: a first discharge electrode disposed in the first space; a second discharge electrode disposed in the first space to face the first discharge electrode; a fan disposed in the first space and configured to flow laser gas between the first discharge electrode and the second discharge electrode; a peaking condenser disposed in the second space; and an electrical insulating member configured to partition the first space and the second space from one another, and disposed to allow the laser gas to pass through between the first space and the second space.

Abstract translation: 包括与第一空间连通的第一空间和第二空间的激光室可以包括：设置在第一空间中的第一放电电极; 设置在所述第一空间中以面对所述第一放电电极的第二放电电极; 风扇，设置在所述第一空间中并且被配置为使所述第一放电电极和所述第二放电电极之间的激光气体流动; 设置在所述第二空间中的峰化冷凝器; 以及电绝缘构件，其被配置为将所述第一空间和所述第二空间彼此分隔开，并且被设置成允许所述激光气体在所述第一空间和所述第二空间之间通过。