公开(公告)号：US20220009031A1

公开(公告)日：2022-01-13

申请号：US17487348

申请日：2021-09-28

Applicant: Gigaphoton Inc.

Inventor： Satoshi TANAKA ,  Akiyoshi SUZUKI ,  Hideo HOSHINO

IPC: B23K26/082 ,  B23K26/0622

Abstract: Provided is a laser annealing apparatus causing laser light to be radiated to processing receiving areas arranged, out of a first direction and a second direction perpendicular to the first direction, along at least the second direction and move a batch radiation area and a workpiece in the first direction, and the laser annealing apparatus includes an energy density measuring apparatus measuring the energy density at, out of first and second ends of the batch radiation area in the second direction, at least the second end, an energy density adjusting apparatus adjusting the energy density at the first end, and a controller controlling the energy density adjusting apparatus. The energy density at the first end when (N+1)-th scanning is performed is so adjusted that the energy density at the first end in an (N+1)-th scan area approaches the energy density at the second end in the N-th scan area.

公开(公告)号：US20190157120A1

公开(公告)日：2019-05-23

申请号：US16261338

申请日：2019-01-29

Applicant: Gigaphoton Inc.

Inventor： Satoshi TANAKA ,  Osamu WAKABAYASHI

IPC: H01L21/67 ,  B23K26/352 ,  B23K26/0622

Abstract: A laser device for laser annealing includes: (1) a laser oscillator configured to output pulse laser light; and (2) an optical pulse stretcher (OPS) device disposed on an optical path of the pulse laser light output from the laser oscillator and including at least one OPS configured to stretch a pulse time width of the pulse laser light incident on the OPS. A delay optical path length L(1) of a first OPS having the minimum delay optical path length L among OPSs is in a range of the following expression (A), ΔT75%×c≤L(1)≤ΔT25%×c   (A), where ΔTa % is a time full-width of a position at which light intensity represents a value of a % with respect to a peak value in an input waveform of the pulse laser light that is output from the laser oscillator and incident on the OPS device, and c is light speed.