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    MEMS optical switch with stop control
    2.
    发明授权
    MEMS optical switch with stop control 有权

    公开(公告)号：US11360270B2

    公开(公告)日：2022-06-14

    申请号：US16919545

    申请日：2020-07-02

    Applicant: Robert Bosch GmbH

    Inventor： Ning Wang ,  Christoph Schelling ,  Alexander Huebel ,  Hartmut Kueppers ,  Stefan Pinter ,  Uma Krishnamoorthy

    IPC: G02B6/35 ,  B81B3/00 ,  G02B6/12

    Abstract: An optical switch includes a bus waveguide supported by a substrate, an actuation electrode supported by the substrate, the actuation electrode having fins that protrude in a direction perpendicular to the substrate and to the bus waveguide, and a reaction electrode having interdigitated fins configured to form a comb drive with the actuation electrode. When a voltage difference between the reaction electrode and the actuation electrode is less than a lower threshold, the reaction electrode is positioned a first distance from the bus waveguide, when the voltage difference between the reaction electrode and the actuation electrode is greater than an upper threshold, the reaction electrode is positioned a second distance from the bus waveguide, and the second distance is less than the first distance.

    In-plane MEMS optical switch
    3.
    发明授权
    In-plane MEMS optical switch 有权

    公开(公告)号：US11340399B2

    公开(公告)日：2022-05-24

    申请号：US16919602

    申请日：2020-07-02

    Applicant: Robert Bosch GmbH

    Inventor： Ning Wang ,  Alexander Huebel ,  Christoph Schelling ,  Jan Niklas Caspers ,  Hartmut Kueppers ,  Stefan Pinter

    IPC: G02B6/12 ,  B81B3/00

    Abstract: An optical switch includes a first bus waveguide supported by a substrate, an optical antenna suspended over the first bus waveguide via a spring, and interdigitated electrodes coupling the substrate with optical antenna and configured to control a position of the optical antenna relative to the first bus waveguide. When a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is at a first position offset from the first bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is at a second position offset from the first bus waveguide, and the offset at the second position is greater than at the first position.

    MEMS optical switch with a cantilever coupler
    4.
    发明授权
    MEMS optical switch with a cantilever coupler 有权

    公开(公告)号：US11300852B2

    公开(公告)日：2022-04-12

    申请号：US16919581

    申请日：2020-07-02

    Applicant: Robert Bosch GmbH

    Inventor： Ning Wang ,  Alexander Huebel ,  Christoph Schelling ,  Jan Niklas Caspers ,  Hartmut Kueppers ,  Stefan Pinter

    IPC: G02F1/313

    Abstract: An optical switch includes a bus waveguide supported by a substrate, a coupling waveguide suspended over the bus waveguide, a reaction electrode coupled with, and adjacent to, the coupling waveguide, an actuation electrode supported by the substrate and configured to control a position of the coupling waveguide relative to the bus waveguide via the reaction electrode, and an optical antenna coupled with the coupling waveguide and disposed at a fixed distance from the bus waveguide. When a voltage difference between the reaction electrode and the actuation electrode is less than a lower threshold, the coupling waveguide is positioned a first distance from the bus waveguide, when the voltage difference between the reaction electrode and the actuation electrode is greater than an upper threshold, the coupling waveguide is positioned a second distance from the bus waveguide, and the second distance is less than the first distance.

    Interferometer and Method for Producing an Interferometer
    5.
    发明申请
    Interferometer and Method for Producing an Interferometer 有权

    公开(公告)号：US20210262858A1

    公开(公告)日：2021-08-26

    申请号：US17047278

    申请日：2019-04-10

    Applicant: Robert Bosch GmbH

    Inventor： Ralf Noltemeyer ,  Christian Huber ,  Reinhold Roedel ,  Benedikt Stein ,  Christoph Schelling ,  Christoph Daniel Kraemmer

    IPC: G01J3/26 ,  G01J3/02 ,  G02B26/00

    Abstract: An interferometer includes a holding element having an actuation recess, a first mirror element arranged on the holding element opposite the actuation recess, and a second mirror element arranged opposite the first mirror element at a mirror distance, to form an optical slit. The first mirror element is arranged between the second mirror element and the holding element and the optical slit is spatially separated from the actuation recess by the first mirror element. The interferometer further includes an electrode pair including a first actuation electrode in one of the mirror elements and a second actuation electrode on a side of the actuation recess opposite the first actuation electrode. The mirror distance can be varied by applying an electrical voltage to the electrode pair.

    Micromechanical sensor that includes a stress decoupling structure
    6.
    发明授权
    Micromechanical sensor that includes a stress decoupling structure 有权

    公开(公告)号：US10954120B2

    公开(公告)日：2021-03-23

    申请号：US16340770

    申请日：2017-09-25

    Applicant: Robert Bosch GmbH

    Inventor： Christoph Schelling ,  Jochen Beintner

    IPC: B81B3/00 ,  B81C1/00

    Abstract: A micromechanical sensor is described that includes: a substrate; a first functional layer that is situated on the substrate; a second functional layer that is situated on the first functional layer and that includes movable micromechanical structures; a cavity in the substrate that is situated below the movable mechanical structures; and a vertical trench structure that surrounds the movable micromechanical structures of the second functional layer and extends into the substrate down to the cavity.

    Micro heating plate device and sensor having a micro heating plate device
    7.
    发明授权
    Micro heating plate device and sensor having a micro heating plate device 有权

    公开(公告)号：US10383177B2

    公开(公告)日：2019-08-13

    申请号：US14917708

    申请日：2014-07-21

    Applicant: Robert Bosch GmbH

    Inventor： Christoph Schelling ,  Richard Fix

    IPC: H05B3/26 ,  G01N27/12 ,  H05B3/66

    Abstract: A micro-hotplate apparatus including a diaphragm carrier device; a diaphragm that at least in part spans at least one cavity embodied in the diaphragm carrier device; and at least one heating conductor disposed on and/or in the diaphragm, the micro-hotplate apparatus additionally encompassing at least one reflector element that is disposed on an inner side, directed toward the cavity, of the diaphragm, in such a way that by way of the at least one reflector element a thermal radiation emitted from the at least one heating conductor and/or from the diaphragm is reflectable at least in part back onto and/or into the diaphragm. A sensor having a micro-hotplate apparatus is also described.

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