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    Interferometer and Method for Producing an Interferometer
    1.
    发明申请
    Interferometer and Method for Producing an Interferometer 有权

    公开(公告)号：US20210262858A1

    公开(公告)日：2021-08-26

    申请号：US17047278

    申请日：2019-04-10

    Applicant: Robert Bosch GmbH

    Inventor： Ralf Noltemeyer ,  Christian Huber ,  Reinhold Roedel ,  Benedikt Stein ,  Christoph Schelling ,  Christoph Daniel Kraemmer

    IPC: G01J3/26 ,  G01J3/02 ,  G02B26/00

    Abstract: An interferometer includes a holding element having an actuation recess, a first mirror element arranged on the holding element opposite the actuation recess, and a second mirror element arranged opposite the first mirror element at a mirror distance, to form an optical slit. The first mirror element is arranged between the second mirror element and the holding element and the optical slit is spatially separated from the actuation recess by the first mirror element. The interferometer further includes an electrode pair including a first actuation electrode in one of the mirror elements and a second actuation electrode on a side of the actuation recess opposite the first actuation electrode. The mirror distance can be varied by applying an electrical voltage to the electrode pair.

    Microelectromechanical Apparatus with Heating Element
    2.
    发明公开
    Microelectromechanical Apparatus with Heating Element 审中-公开

    公开(公告)号：US20240085661A1

    公开(公告)日：2024-03-14

    申请号：US18460748

    申请日：2023-09-05

    Applicant: Robert Bosch GmbH ,  Carl Zeiss SMT GmbH

    Inventor： Ralf Noltemeyer ,  Arnd Kaelberer

    IPC: G02B7/18 ,  G02B26/08 ,  G03F7/00

    CPC classification number: G02B7/1815 ,  G02B26/0833 ,  G03F7/702 ,  G03F7/70891

    Abstract: The invention relates to a microelectromechanical apparatus (100, 200) comprising one or more microelectromechanical devices (130) each having a mirror element (134), an actuator (132) for moving the respective mirror element (134), and a heating element (138, 240) for heating the respective mirror element (134), wherein the microelectromechanical apparatus (100) comprises one or more temperature sensors (135, 145, 210, 212) and an electronic system (125, 225), wherein the control electronic system (125, 225) is configured to determine a temperature value of the respective mirror element (134) using the one or more temperature sensors (135) for each mirror element (134), and the electronic system (125, 225) is further configured to adjust a heating power for each of the heating elements (138, 240). The invention further relates to an illumination optical unit (172), to an illumination system (174) and to a projection exposure apparatus (170), each having a microelectromechanical apparatus (100, 200) according to the invention, and to a method for controlling temperatures of a microelectromechanical apparatus (100, 200) in a closed-loop.

    PIVOT APPARATUS FOR A MICROMIRROR, AND ILLUMINATION APPARATUS HAVING A PIVOT APPARATUS FOR A MICROMIRROR
    5.
    发明申请
    PIVOT APPARATUS FOR A MICROMIRROR, AND ILLUMINATION APPARATUS HAVING A PIVOT APPARATUS FOR A MICROMIRROR 审中-公开
    用于微型计算机的装置，以及具有用于微型计算机的装置的照明装置

    公开(公告)号：US20170059852A1

    公开(公告)日：2017-03-02

    申请号：US15241490

    申请日：2016-08-19

    Applicant: Robert Bosch GmbH

    Inventor： Johannes Classen ,  Ralf Noltemeyer ,  Arnd Kaelberer ,  Peter Sudy ,  Hans Artmann

    IPC: G02B26/08 ,  G02B26/10

    Abstract: A pivot apparatus, in particular a pivot apparatus for a micromirror, a fixed base frame being connected, directly or indirectly via an intermediate frame, to a pivotable carrier element. Spring elements having flexural springs are respectively disposed between the base frame and carrier element, base frame and intermediate frame, and intermediate frame and carrier element. The use of flexural springs enables good thermal coupling between the individual components, and an increase in robustness. The pivot apparatus can be embodied in particular as a microelectromechanical system.

    Abstract translation: 枢转装置，特别是用于微反射镜的枢轴装置，固定基座框架通过中间框架直接或间接地连接到可枢转的载体元件。 具有弯曲弹簧的弹簧元件分别设置在基架和承载元件，基架和中间框架之间以及中间框架和载体元件之间。 使用弯曲弹簧能够实现各个部件之间良好的热耦合，并提高鲁棒性。 枢转装置可以特别地体现为微机电系统。

    Method for Operating an Optical Component, and Optical Component
    6.
    发明公开
    Method for Operating an Optical Component, and Optical Component 审中-公开

    公开(公告)号：US20240085799A1

    公开(公告)日：2024-03-14

    申请号：US18460770

    申请日：2023-09-05

    Applicant: Robert Bosch GmbH ,  Carl Zeiss SMT GmbH

    Inventor： Ralf Noltemeyer

    IPC: G03F7/00 ,  G02B26/08

    CPC classification number: G03F7/702 ,  G02B26/0841

    Abstract: The invention relates to a method for operating an optical component (100) having a mirror element (20), a substrate (30) for carrying the mirror element (20), an actuator device (40) for tilting the mirror element (20) about one or two tilt axes (28), which actuator device has a first actuator electrode structure (42) and a second actuator electrode structure (44), and a sensor device (50) for detecting a tilt angle (θ) of the mirror element (20). The first actuator electrode structure (42) in this case comprises a plurality of first active actuator electrodes (421) and at least one first passive actuator electrode (422). The second actuator electrode structure (44) in this case comprises a plurality of second active actuator electrodes (441) and at least one second passive actuator electrode (442). At least one of the first active actuator electrodes (421) is subjected to a first voltage (U1) and at least one of the second active actuator electrodes (442) is subjected to a second voltage (U2). In order to tilt the mirror element (20), the first and the second voltage (U1, U2) are changed with different rates of change.

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