Interferometer Device and Mehod for Operating an Interferometer Device

    公开(公告)号:US20210010866A1

    公开(公告)日:2021-01-14

    申请号:US16924278

    申请日:2020-07-09

    Abstract: An interferometer device includes an interferometer unit with at least two mirrors disposed in parallel, wherein at least one of the mirrors is actuatable parallel to the other mirror and a first distance between the two mirrors is alterable. The interferometer device further includes at least one deflection mirror disposed downstream of the interferometer unit in a light transmission direction of light from the interferometer unit and a detector device, onto which the light is able to be aligned by the deflection mirror. The detector device includes at least two differently sensitive detection regions for transmitted wavelengths or wavelength ranges of the light, which detection regions are spatially separated from one another and able to be irradiated separately by the deflection mirror.

    Micromechanical mirror device, mirror system, and method for producing a micromechanical mirror device

    公开(公告)号:US11709354B2

    公开(公告)日:2023-07-25

    申请号:US16966425

    申请日:2019-01-24

    CPC classification number: G02B26/0833 G02B26/001

    Abstract: A micromechanical mirror device, a mirror system, and a method for producing a micromechanical mirror device are disclosed. The mirror device comprises a first mirror element, which is flat, and a second mirror element, which is flat. The first and second mirror elements are arranged substantially plane-parallel. An intermediate space between the first and second mirror elements has a lower index of refraction than one or both of the first mirror element and second mirror element. The first and second mirror elements are locally spaced apart from each other by at least one support structure. The support structure overlaps with the first and second mirror elements in an axial direction, which is perpendicular to the first and second mirror elements. The support structure includes a material that is different from a material from which one or both of the first and second mirror elements are formed.

    Micromechanical Mirror Device, Mirror System, and Method for Producing a Micromechanical Mirror Device

    公开(公告)号:US20210033847A1

    公开(公告)日:2021-02-04

    申请号:US16966425

    申请日:2019-01-24

    Abstract: A micromechanical mirror device, a mirror system, and a method for producing a micromechanical mirror device are disclosed. The mirror device comprises a first mirror element, which is flat, and a second mirror element, which is flat. The first and second mirror elements are arranged substantially plane-parallel. An intermediate space between the first and second mirror elements has a lower index of refraction than one or both of the first mirror element and second mirror element. The first and second mirror elements are locally spaced apart from each other by at least one support structure. The support structure overlaps with the first and second mirror elements in an axial direction, which is perpendicular to the first and second mirror elements. The support structure includes a material that is different from a material from which one or both of the first and second mirror elements are formed.

    Interferometer Device and Method for Producing an Interferometer Device

    公开(公告)号:US20220003534A1

    公开(公告)日:2022-01-06

    申请号:US17294950

    申请日:2019-11-12

    Abstract: The disclosure relates to an interferometer including a substrate, and an intermediate layer region applied on the substrate. A first mirror device and a second mirror device are aligned plane-parallel with one another and are separated from one another by a first distance and are framed in or on the intermediate layer region, the intermediate layer region removed in at least one of an inner region below the first mirror device and below the second mirror device. A laterally structured electrode including a first subregion and a second laterally separated subregion which are configured to be connected to different electrical potentials. The electrode arranged at a second distance from the first or the second mirror device, the first subregion extending in the inner region and arranged on the intermediate layer region and the second subregion extending in an outer region of the intermediate layer region.

    Spectrometer Apparatus and a Corresponding Method for Operating a Spectrometer Apparatus

    公开(公告)号:US20220003601A1

    公开(公告)日:2022-01-06

    申请号:US17296050

    申请日:2019-11-11

    Abstract: A spectrometer apparatus is disclosed that includes at least one light source for irradiating a sample with light, an optical detection device for detecting light scattered by the sample, at least one optical filter device, which is arranged in front of and/or behind the sample, a contact sensor device for determining a contact between the sample and the spectrometer apparatus and for outputting a corresponding output signal, a control device for controlling the light source and the detection device in response to the output signal. The control device is designed such that the control device modifies at least one operating parameter of the light source and the detection device, when the output signal indicates the contact between the sample and the spectrometer apparatus. A method for operating a spectrometer apparatus is disclosed as well.

    Interferometer and Method for Producing an Interferometer

    公开(公告)号:US20210262858A1

    公开(公告)日:2021-08-26

    申请号:US17047278

    申请日:2019-04-10

    Abstract: An interferometer includes a holding element having an actuation recess, a first mirror element arranged on the holding element opposite the actuation recess, and a second mirror element arranged opposite the first mirror element at a mirror distance, to form an optical slit. The first mirror element is arranged between the second mirror element and the holding element and the optical slit is spatially separated from the actuation recess by the first mirror element. The interferometer further includes an electrode pair including a first actuation electrode in one of the mirror elements and a second actuation electrode on a side of the actuation recess opposite the first actuation electrode. The mirror distance can be varied by applying an electrical voltage to the electrode pair.

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