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公开(公告)号:US20210010866A1
公开(公告)日:2021-01-14
申请号:US16924278
申请日:2020-07-09
Applicant: Robert Bosch GmbH
Inventor: Christoph Daniel Kraemmer , Maximilian Busch , Michael Kutschbach , Reinhold Roedel
Abstract: An interferometer device includes an interferometer unit with at least two mirrors disposed in parallel, wherein at least one of the mirrors is actuatable parallel to the other mirror and a first distance between the two mirrors is alterable. The interferometer device further includes at least one deflection mirror disposed downstream of the interferometer unit in a light transmission direction of light from the interferometer unit and a detector device, onto which the light is able to be aligned by the deflection mirror. The detector device includes at least two differently sensitive detection regions for transmitted wavelengths or wavelength ranges of the light, which detection regions are spatially separated from one another and able to be irradiated separately by the deflection mirror.
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公开(公告)号:US11709354B2
公开(公告)日:2023-07-25
申请号:US16966425
申请日:2019-01-24
Applicant: Robert Bosch GmbH
Inventor: Christian Huber , Marc Schmid , Reinhold Roedel , Christoph Schelling , Christoph Daniel Kraemmer
CPC classification number: G02B26/0833 , G02B26/001
Abstract: A micromechanical mirror device, a mirror system, and a method for producing a micromechanical mirror device are disclosed. The mirror device comprises a first mirror element, which is flat, and a second mirror element, which is flat. The first and second mirror elements are arranged substantially plane-parallel. An intermediate space between the first and second mirror elements has a lower index of refraction than one or both of the first mirror element and second mirror element. The first and second mirror elements are locally spaced apart from each other by at least one support structure. The support structure overlaps with the first and second mirror elements in an axial direction, which is perpendicular to the first and second mirror elements. The support structure includes a material that is different from a material from which one or both of the first and second mirror elements are formed.
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公开(公告)号:US20210033847A1
公开(公告)日:2021-02-04
申请号:US16966425
申请日:2019-01-24
Applicant: Robert Bosch GmbH
Inventor: Christian Huber , Marc Schmid , Reinhold Roedel , Christoph Schelling , Christoph Daniel Kraemmer
Abstract: A micromechanical mirror device, a mirror system, and a method for producing a micromechanical mirror device are disclosed. The mirror device comprises a first mirror element, which is flat, and a second mirror element, which is flat. The first and second mirror elements are arranged substantially plane-parallel. An intermediate space between the first and second mirror elements has a lower index of refraction than one or both of the first mirror element and second mirror element. The first and second mirror elements are locally spaced apart from each other by at least one support structure. The support structure overlaps with the first and second mirror elements in an axial direction, which is perpendicular to the first and second mirror elements. The support structure includes a material that is different from a material from which one or both of the first and second mirror elements are formed.
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公开(公告)号:US11959802B2
公开(公告)日:2024-04-16
申请号:US17413198
申请日:2019-12-06
Applicant: Robert Bosch GmbH
Inventor: Ralf Noltemeyer , Martin Husnik , Eugen Baumgart , Marc Schmid , Reinhold Roedel , Benedikt Stein , Christoph Schelling , Christoph Daniel Kraemmer
CPC classification number: G01J3/26 , G01J3/0202 , G01J3/0208 , G01J3/0256 , G01J3/2803 , G01J2003/1226 , G01J2003/2813
Abstract: A spectrometer device includes an optical interference filter which is designed to filter specific wavelength ranges of an incident light beam on passage through the optical interference filter. The spectrometer device also includes a detector device which is designed to detect the filtered light beam. Further, the spectrometer device includes a focusing device with a reflective surface. The focusing device is designed to focus the filtered light beam onto the detector device by reflection on the surface.
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公开(公告)号:US20220221709A1
公开(公告)日:2022-07-14
申请号:US17609578
申请日:2020-04-29
Applicant: Robert Bosch GmbH
Inventor: Christoph Schelling , Christoph Daniel Kraemmer , Reinhold Roedel
Abstract: The disclosure relates to a mirror device for an interferometer device including a first mirror layer and a second mirror layer, which are arranged in parallel on top of one another and spaced apart from one another by a mirror layer spacing. The mirror layer spacing forms an intermediate space between the first and the second mirror layer. The intermediate space includes a gas or a vacuum, and at least one spacing structure which extends at least partially between the first and the second mirror layer. The spacing structure has a material that is the same as or different from the first and/or second mirror layer.
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公开(公告)号:US20220003534A1
公开(公告)日:2022-01-06
申请号:US17294950
申请日:2019-11-12
Applicant: Robert Bosch GmbH
Inventor: Benedikt Stein , Martin Husnik , Christoph Schelling , Thomas Buck , Christoph Daniel Kraemmer , Reinhold Roedel
Abstract: The disclosure relates to an interferometer including a substrate, and an intermediate layer region applied on the substrate. A first mirror device and a second mirror device are aligned plane-parallel with one another and are separated from one another by a first distance and are framed in or on the intermediate layer region, the intermediate layer region removed in at least one of an inner region below the first mirror device and below the second mirror device. A laterally structured electrode including a first subregion and a second laterally separated subregion which are configured to be connected to different electrical potentials. The electrode arranged at a second distance from the first or the second mirror device, the first subregion extending in the inner region and arranged on the intermediate layer region and the second subregion extending in an outer region of the intermediate layer region.
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公开(公告)号:US20210356321A1
公开(公告)日:2021-11-18
申请号:US17277642
申请日:2019-10-22
Applicant: Robert Bosch GmbH
Inventor: Ralf Noltemeyer , Benedikt Stein , Christian Huber , Christoph Schelling , Christoph Daniel Kraemmer , Reinhold Roedel
Abstract: The disclosure relates to an interferometer element for use in a spectrometer which includes a micromechanical Fabry-Perot filter element, which has at least a first mirror element, a second mirror element, and a third mirror element. Each of the first mirror element, the second mirror element, and the third mirror element are arranged in series in an optical path of the interferometer element, and at least one of a first distance between the first and second mirror elements, and a second distance between the second and third mirror elements is modifiable.
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公开(公告)号:US11946805B2
公开(公告)日:2024-04-02
申请号:US17296050
申请日:2019-11-11
Applicant: Robert Bosch GmbH
Inventor: Thomas Buck , Martin Husnik , Christian Huber , Marc Schmid , Benedikt Stein , Christoph Daniel Kraemmer
CPC classification number: G01J3/10 , G01J3/0272 , G01J3/0297 , G01J3/26 , G01N21/255 , G01J2003/1213
Abstract: A spectrometer apparatus is disclosed that includes at least one light source for irradiating a sample with light, an optical detection device for detecting light scattered by the sample, at least one optical filter device, which is arranged in front of and/or behind the sample, a contact sensor device for determining a contact between the sample and the spectrometer apparatus and for outputting a corresponding output signal, a control device for controlling the light source and the detection device in response to the output signal. The control device is designed such that the control device modifies at least one operating parameter of the light source and the detection device, when the output signal indicates the contact between the sample and the spectrometer apparatus. A method for operating a spectrometer apparatus is disclosed as well.
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公开(公告)号:US20220003601A1
公开(公告)日:2022-01-06
申请号:US17296050
申请日:2019-11-11
Applicant: Robert Bosch GmbH
Inventor: Thomas Buck , Martin Husnik , Christian Huber , Marc Schmid , Benedikt Stein , Christoph Daniel Kraemmer
Abstract: A spectrometer apparatus is disclosed that includes at least one light source for irradiating a sample with light, an optical detection device for detecting light scattered by the sample, at least one optical filter device, which is arranged in front of and/or behind the sample, a contact sensor device for determining a contact between the sample and the spectrometer apparatus and for outputting a corresponding output signal, a control device for controlling the light source and the detection device in response to the output signal. The control device is designed such that the control device modifies at least one operating parameter of the light source and the detection device, when the output signal indicates the contact between the sample and the spectrometer apparatus. A method for operating a spectrometer apparatus is disclosed as well.
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公开(公告)号:US20210262858A1
公开(公告)日:2021-08-26
申请号:US17047278
申请日:2019-04-10
Applicant: Robert Bosch GmbH
Inventor: Ralf Noltemeyer , Christian Huber , Reinhold Roedel , Benedikt Stein , Christoph Schelling , Christoph Daniel Kraemmer
Abstract: An interferometer includes a holding element having an actuation recess, a first mirror element arranged on the holding element opposite the actuation recess, and a second mirror element arranged opposite the first mirror element at a mirror distance, to form an optical slit. The first mirror element is arranged between the second mirror element and the holding element and the optical slit is spatially separated from the actuation recess by the first mirror element. The interferometer further includes an electrode pair including a first actuation electrode in one of the mirror elements and a second actuation electrode on a side of the actuation recess opposite the first actuation electrode. The mirror distance can be varied by applying an electrical voltage to the electrode pair.
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