- Patent Title: Micromechanical sensor that includes a stress decoupling structure
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Application No.: US16340770Application Date: 2017-09-25
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Publication No.: US10954120B2Publication Date: 2021-03-23
- Inventor: Christoph Schelling , Jochen Beintner
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE10201621807.6 20161012
- International Application: PCT/EP2017/074181 WO 20170925
- International Announcement: WO2018/069028 WO 20180419
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00

Abstract:
A micromechanical sensor is described that includes: a substrate; a first functional layer that is situated on the substrate; a second functional layer that is situated on the first functional layer and that includes movable micromechanical structures; a cavity in the substrate that is situated below the movable mechanical structures; and a vertical trench structure that surrounds the movable micromechanical structures of the second functional layer and extends into the substrate down to the cavity.
Public/Granted literature
- US20200048072A1 MICROMECHANICAL SENSOR THAT INCLUDES A STRESS DECOUPLING STRUCTURE Public/Granted day:2020-02-13
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