Invention Grant
- Patent Title: MEMS optical switch with a cantilever coupler
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Application No.: US16919581Application Date: 2020-07-02
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Publication No.: US11300852B2Publication Date: 2022-04-12
- Inventor: Ning Wang , Alexander Huebel , Christoph Schelling , Jan Niklas Caspers , Hartmut Kueppers , Stefan Pinter
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Dickinson Wright PLLC
- Main IPC: G02F1/313
- IPC: G02F1/313

Abstract:
An optical switch includes a bus waveguide supported by a substrate, a coupling waveguide suspended over the bus waveguide, a reaction electrode coupled with, and adjacent to, the coupling waveguide, an actuation electrode supported by the substrate and configured to control a position of the coupling waveguide relative to the bus waveguide via the reaction electrode, and an optical antenna coupled with the coupling waveguide and disposed at a fixed distance from the bus waveguide. When a voltage difference between the reaction electrode and the actuation electrode is less than a lower threshold, the coupling waveguide is positioned a first distance from the bus waveguide, when the voltage difference between the reaction electrode and the actuation electrode is greater than an upper threshold, the coupling waveguide is positioned a second distance from the bus waveguide, and the second distance is less than the first distance.
Public/Granted literature
- US20220004078A1 MEMS Optical Switch With a Cantilever Coupler Public/Granted day:2022-01-06
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