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1.发明授权Component in the form of a wafer level package and method for manufacturing same 有权晶片级封装形式的元件及其制造方法公开(公告)号：US09406747B2
公开(公告)日：2016-08-02
申请号：US14307055
申请日：2014-06-17
Applicant: Robert Bosch GmbH
Inventor： Heribert Weber , Hartmut Kueppers , Jens Frey , Neil Davies , Jochen Reinmuth
CPC classification number: H01L29/0657 , B81C1/00238 , B81C2203/0118 , B81C2203/0792 , H01L23/3114 , H01L25/0657 , H01L25/50 , H01L2224/48091 , H01L2224/48471 , H01L2225/06506 , H01L2225/06568 , H01L2924/00014
Abstract: A vertically integrated hybrid component is implemented in the form of a wafer level package including: at least two element substrates assembled one above the other; a molded upper sealing layer made of an electrically insulating casting; and an external electrical contacting of the component being implemented on the top side via at least one contact stamp which is embedded in the sealing layer so that (i) its lower end is connected to a wiring level of an element substrate and (ii) its upper end is exposed in the surface of the sealing layer.
Abstract translation: 垂直集成的混合部件以晶片级封装的形式实现，包括：至少两个元件基板，一个彼此组装; 由电绝缘铸件制成的模制上密封层; 并且所述部件的外部电接触通过嵌入在所述密封层中的至少一个接触印模在顶侧上实现，使得（i）其下端连接到元件基板的布线层，以及（ii）其 上端暴露在密封层的表面。
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公开(公告)号：US20220004078A1
公开(公告)日：2022-01-06
申请号：US16919581
申请日：2020-07-02
Applicant: Robert Bosch GmbH
Inventor： Ning Wang , Alexander Huebel , Christoph Schelling , John Niklas Caspers , Hartmut Kueppers , Stefan Pinter
IPC: G02F1/313
Abstract: An optical switch includes a bus waveguide supported by a substrate, a coupling waveguide suspended over the bus waveguide, a reaction electrode coupled with, and adjacent to, the coupling waveguide, an actuation electrode supported by the substrate and configured to control a position of the coupling waveguide relative to the bus waveguide via the reaction electrode, and an optical antenna coupled with the coupling waveguide and disposed at a fixed distance from the bus waveguide. When a voltage difference between the reaction electrode and the actuation electrode is less than a lower threshold, the coupling waveguide is positioned a first distance from the bus waveguide, when the voltage difference between the reaction electrode and the actuation electrode is greater than an upper threshold, the coupling waveguide is positioned a second distance from the bus waveguide, and the second distance is less than the first distance.
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公开(公告)号：US10059583B2
公开(公告)日：2018-08-28
申请号：US15673118
申请日：2017-08-09
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Christof Schwenk , Hartmut Kueppers , Nicole Schittenhelm , Volker Schmitz
CPC classification number: B81B7/0038 , B81B7/0041 , B81B7/02 , B81C1/00285 , G01C19/5783 , G01P3/00 , G01P15/00 , G01P15/0802
Abstract: A micromechanical component having a main extension plane is provided; the micromechanical component encloses a first cavern and a second cavern, and a first pressure prevails in the first cavern while a second pressure prevails in the second cavern, and a first layer of the micromechanical component, which extends essentially parallel to the main extension plane, projects into a second layer of the micromechanical component, which extends essentially parallel to the main extension plane, between the first cavern and the second cavern, essentially in a perpendicular direction to the main extension plane.
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公开(公告)号：US20220003842A1
公开(公告)日：2022-01-06
申请号：US16919531
申请日：2020-07-02
Applicant: Robert Bosch GmbH
Inventor： Ning Wang , Hartmut Kueppers , Stefan Pinter , Alexander Huebel , Christoph Schelling , Jan Niklas Caspers
IPC: G01S7/481
Abstract: A single chip LIDAR module includes a laser, a photo diode, a photonic integrated circuit (PIC), a lens, and a housing. The laser is configured to output light at a predetermined wavelength. The photo diode is configured to detect light energy at the predetermined wavelength. The PIC is coupled with the laser and photo diode, and is integrated with a MEMS switch array that includes an optical antenna configured to diffract light at the predetermined wavelength. The lens is arranged over the PIC. The housing is configured to encompass the laser, the photo diode, and the PIC, and having a window configured to pass light associated with the PIC.
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公开(公告)号：US20220003936A1
公开(公告)日：2022-01-06
申请号：US16919545
申请日：2020-07-02
Applicant: Robert Bosch GmbH
Inventor： Ning Wang , Christoph Schelling , Alexander Huebel , Hartmut Kueppers , Stefan Pinter , Uma Krishnamoorthy
Abstract: An optical switch includes a bus waveguide supported by a substrate, an actuation electrode supported by the substrate, the actuation electrode having fins that protrude in a direction perpendicular to the substrate and to the bus waveguide, and a reaction electrode having interdigitated fins configured to form a comb drive with the actuation electrode. When a voltage difference between the reaction electrode and the actuation electrode is less than a lower threshold, the reaction electrode is positioned a first distance from the bus waveguide, when the voltage difference between the reaction electrode and the actuation electrode is greater than an upper threshold, the reaction electrode is positioned a second distance from the bus waveguide, and the second distance is less than the first distance.
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Patent Agency Ranking
公开(公告)号：US20220003925A1
公开(公告)日：2022-01-06
申请号：US16919602
申请日：2020-07-02
Applicant: Robert Bosch GmbH
Inventor： Ning Wang , Alexander Huebel , Christoph Schelling , Jan Niklas Caspers , Hartmut Kueppers , Stefan Pinter
Abstract: An optical switch includes a first bus waveguide supported by a substrate, an optical antenna suspended over the first bus waveguide via a spring, and interdigitated electrodes coupling the substrate with optical antenna and configured to control a position of the optical antenna relative to the first bus waveguide. When a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is at a first position offset from the first bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is at a second position offset from the first bus waveguide, and the offset at the second position is greater than at the first position.
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公开(公告)号：US11360270B2
公开(公告)日：2022-06-14
申请号：US16919545
申请日：2020-07-02
Applicant: Robert Bosch GmbH
Inventor： Ning Wang , Christoph Schelling , Alexander Huebel , Hartmut Kueppers , Stefan Pinter , Uma Krishnamoorthy
Abstract: An optical switch includes a bus waveguide supported by a substrate, an actuation electrode supported by the substrate, the actuation electrode having fins that protrude in a direction perpendicular to the substrate and to the bus waveguide, and a reaction electrode having interdigitated fins configured to form a comb drive with the actuation electrode. When a voltage difference between the reaction electrode and the actuation electrode is less than a lower threshold, the reaction electrode is positioned a first distance from the bus waveguide, when the voltage difference between the reaction electrode and the actuation electrode is greater than an upper threshold, the reaction electrode is positioned a second distance from the bus waveguide, and the second distance is less than the first distance.
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公开(公告)号：US11340399B2
公开(公告)日：2022-05-24
申请号：US16919602
申请日：2020-07-02
Applicant: Robert Bosch GmbH
Inventor： Ning Wang , Alexander Huebel , Christoph Schelling , Jan Niklas Caspers , Hartmut Kueppers , Stefan Pinter
Abstract: An optical switch includes a first bus waveguide supported by a substrate, an optical antenna suspended over the first bus waveguide via a spring, and interdigitated electrodes coupling the substrate with optical antenna and configured to control a position of the optical antenna relative to the first bus waveguide. When a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is at a first position offset from the first bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is at a second position offset from the first bus waveguide, and the offset at the second position is greater than at the first position.
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公开(公告)号：US11300852B2
公开(公告)日：2022-04-12
申请号：US16919581
申请日：2020-07-02
Applicant: Robert Bosch GmbH
Inventor： Ning Wang , Alexander Huebel , Christoph Schelling , Jan Niklas Caspers , Hartmut Kueppers , Stefan Pinter
IPC: G02F1/313
Abstract: An optical switch includes a bus waveguide supported by a substrate, a coupling waveguide suspended over the bus waveguide, a reaction electrode coupled with, and adjacent to, the coupling waveguide, an actuation electrode supported by the substrate and configured to control a position of the coupling waveguide relative to the bus waveguide via the reaction electrode, and an optical antenna coupled with the coupling waveguide and disposed at a fixed distance from the bus waveguide. When a voltage difference between the reaction electrode and the actuation electrode is less than a lower threshold, the coupling waveguide is positioned a first distance from the bus waveguide, when the voltage difference between the reaction electrode and the actuation electrode is greater than an upper threshold, the coupling waveguide is positioned a second distance from the bus waveguide, and the second distance is less than the first distance.
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公开(公告)号：US20180044171A1
公开(公告)日：2018-02-15
申请号：US15673118
申请日：2017-08-09
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Christof Schwenk , Hartmut Kueppers , Nicole Schittenhelm , Volker Schmitz
IPC: B81B7/00
CPC classification number: B81B7/0038 , B81B7/0041 , B81B7/02 , B81C1/00285 , G01C19/56 , G01P3/00 , G01P15/00 , G01P15/0802
Abstract: A micromechanical component having a main extension plane is provided; the micromechanical component encloses a first cavern and a second cavern, and a first pressure prevails in the first cavern while a second pressure prevails in the second cavern, and a first layer of the micromechanical component, which extends essentially parallel to the main extension plane, projects into a second layer of the micromechanical component, which extends essentially parallel to the main extension plane, between the first cavern and the second cavern, essentially in a perpendicular direction to the main extension plane.
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