Invention Application

  • Patent Title: MICROMECHANICAL COMPONENT
  • Application No.: US16063574
    Application Date: 2017-01-11
  • Publication No.: US20190002277A1
    Publication Date: 2019-01-03
  • Inventor: Christoph Schelling
  • Applicant: Robert Bosch GmbH
  • Priority: DE102016200489.1 20160115
  • International Application: PCT/EP2017/050451 WO 20170111
  • Main IPC: B81C1/00
  • IPC: B81C1/00 B81B7/00 B81B7/02
MICROMECHANICAL COMPONENT
Abstract:
A micromechanical component, having a carrier wafer having at least one micromechanical structure that is situated in a cavern; a thin-layer cap situated on the carrier wafer, by which the cavern is hermetically sealed; and a cap wafer situated on the thin-layer cap in the region of the cavern having the micromechanical structure, the cap wafer hermetically sealing a region of the thin-layer cap above the cavern.
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