公开(公告)号：US10690612B2

公开(公告)日：2020-06-23

申请号：US15535496

申请日：2015-10-26

Applicant: Robert Bosch GmbH

Inventor： Markus Widenmeyer ,  Richard Fix ,  Martin Schreivogel

IPC: G01N27/22 ,  G01N27/00 ,  G01N33/00

Abstract: A sensor is configured to measure the carbon dioxide concentration in a gas mixture. The sensor has a dielectric layer arranged between a layer-like first electrode and a layer-like second electrode. The second electrode is a composite electrode that has at least one carbonate and/or one phosphate as first material and at least one metal as second material. This sensor can be manufactured by a method comprising applying a layer-like first electrode to a substrate, applying a dielectric layer to the first electrode, and applying a layer-like second electrode to the dielectric layer. The second electrode is applied as a composite electrode that has at least one carbonate and/or one phosphate as first material and has at least one second material that has an electrical conductivity of more than 10-2 S/m.

公开(公告)号：US10670482B2

公开(公告)日：2020-06-02

申请号：US15775253

申请日：2016-10-14

Applicant: Robert Bosch GmbH

Inventor： Stefan Zehringer ,  Zoltan Lestyan ,  Richard Fix ,  Jochen Franz ,  Michaela Mitschke ,  Tobias Sebastian Frey

IPC: G01L9/08 ,  G01L9/00 ,  G01L19/00

Abstract: A sensor element for a pressure sensor, includes a sensor membrane on which a defined number of piezoresistors are situated, the piezoresistors being configured in a circuit in such a way that, when there is a change in pressure an electrical change in voltage can be generated; at least two temperature measuring elements configured in relation to the sensor membrane in such a way that temperatures of the sensor membrane at positions of the piezoresistors can be measured using the temperature measuring elements, an electrical voltage present at the circuit of the piezoresistors due to a temperature gradient being capable of being compensated computationally using the measured temperatures.

公开(公告)号：US09513250B2

公开(公告)日：2016-12-06

申请号：US14217550

申请日：2014-03-18

Applicant: Robert Bosch GmbH

Inventor： Richard Fix ,  Andreas Krauss ,  Kathy Sahner ,  Denis Kunz ,  Philipp Nolte

IPC: G01N27/406 ,  G01N27/409 ,  G01N27/12

CPC classification number: G01N27/4067 ,  G01N27/123 ,  G01N27/128 ,  G01N27/409

Abstract: A microelectrochemical sensor includes a carrier material composed of a semiconductor substrate, and includes a chemosensitive sensor element. The chemosensitive sensor element is positioned in a first partial region of the carrier material. A heating element is positioned in a region of the chemosensitive sensor element and is configured to regulate a temperature of the chemosensitive sensor element. A microelectronic unit is positioned in a second partial region of the carrier material, and is connected to the chemosensitive sensor element and the heating element via conductor tracks integrated into the carrier material. The microelectronic unit is configured to operate the heating element and the sensor element.

Abstract translation: 微电化学传感器包括由半导体衬底构成的载体材料，并且包括化学感应传感器元件。 化学感应传感器元件位于载体材料的第一部分区域中。 加热元件位于化学感应传感器元件的区域中，并且被配置为调节化学感应传感器元件的温度。 微电子单元定位在载体材料的第二部分区域中，并且通过集成到载体材料中的导体轨迹连接到化学感应传感器元件和加热元件。 微电子单元被配置为操作加热元件和传感器元件。

公开(公告)号：US20130192989A1

公开(公告)日：2013-08-01

申请号：US13746345

申请日：2013-01-22

Applicant: Robert Bosch GmbH

Inventor： Richard Fix ,  Andreas Krauss

IPC: G01N27/407 ,  G01N27/414

CPC classification number: G01N27/4071 ,  G01N27/4141

Abstract: A micromechanical solid-electrolyte sensor device includes a micromechanical carrier substrate having a front side and a back side. The micromechanical solid-electrolyte sensor device also includes a first porous electrode and a second porous electrode. The micromechanical solid-electrolyte sensor device also includes a solid-electrolyte embedded between the first porous electrode and the second porous electrode.

Abstract translation: 微机械固体电解质传感器装置包括具有前侧和后侧的微机械载体基板。 微机电固体电解质传感器装置还包括第一多孔电极和第二多孔电极。 微机电固体电解质传感器装置还包括嵌入在第一多孔电极和第二多孔电极之间的固体电解质。

公开(公告)号：US20240288393A1

公开(公告)日：2024-08-29

申请号：US18583436

申请日：2024-02-21

Applicant: Robert Bosch GmbH

Inventor： Christoph Schelling ,  Richard Fix ,  Susanne Eicker

IPC: G01N27/12 ,  G01N27/14

CPC classification number: G01N27/124 ,  G01N27/14 ,  G01N27/125

Abstract: A method for operating a semiconductor gas sensor. The semiconductor gas sensor has a sensor element with a sensor material having a semiconductor, a plurality of measuring electrodes electrically connected to the sensor material for exciting and reading the sensor material, and a control and evaluation device for generating excitation signals and evaluating read measurement signals. A surface of the sensor material is exposed to a gaseous medium. In the method, a first excitation signal and a second excitation signal are applied to the sensor material. The excitation signals have different excitation frequencies. A first measurement signal is read based on the first excitation signal, and a second measurement signal is read based on the second excitation signal. A sensor signal is ascertained based on the excitation signals and the measurement signals.

公开(公告)号：US20180328804A1

公开(公告)日：2018-11-15

申请号：US15775253

申请日：2016-10-14

Applicant: Robert Bosch GmbH

Inventor： Stefan Zehringer ,  Zoltan Lestyan ,  Richard Fix ,  Jochen Franz ,  Michaela Mitschke ,  Tobias Sebastian Frey

IPC: G01L9/08 ,  G01L9/00

CPC classification number: G01L9/085 ,  G01L9/0052 ,  G01L19/0092

Abstract: A sensor element for a pressure sensor, includes a sensor membrane on which a defined number of piezoresistors are situated, the piezoresistors being configured in a circuit in such a way that, when there is a change in pressure an electrical change in voltage can be generated; at least two temperature measuring elements configured in relation to the sensor membrane in such a way that temperatures of the sensor membrane at positions of the piezoresistors can be measured using the temperature measuring elements, an electrical voltage present at the circuit of the piezoresistors due to a temperature gradient being capable of being compensated computationally using the measured temperatures.

公开(公告)号：US09816920B2

公开(公告)日：2017-11-14

申请号：US15112163

申请日：2014-11-21

Applicant: Robert Bosch GmbH

Inventor： Richard Fix ,  Rene Hartke ,  Jochen Beintner

IPC: G01N1/10 ,  G01N21/3504 ,  G01N21/359 ,  G01N21/39 ,  H01S5/00 ,  H01S5/026 ,  H01S5/06 ,  H01S5/183

CPC classification number: G01N21/3504 ,  G01N21/359 ,  G01N21/39 ,  G01N2201/0612 ,  H01S5/0028 ,  H01S5/0264 ,  H01S5/0607 ,  H01S5/18361 ,  H01S5/18363

Abstract: A method for producing an integrated micromechanical fluid sensor component includes forming a first wafer with a first Bragg reflector and with a light-emitting device on a first substrate. The light-emitting device is configured to emit light rays in an emission direction from a surface of the light-emitting device facing away from the first Bragg reflector. The method further includes forming a second wafer with a second Bragg reflector and with a photodiode on a second substrate. The photodiode is arranged on a surface of the second Bragg reflector facing towards the second substrate. The method also includes bonding or gluing the first wafer to the second wafer such that there is formed a cavity into which a fluid is introduced and through which the light rays can pass. The method further includes separating the fluid sensor component from the first and the second wafer.

公开(公告)号：US20150267595A1

公开(公告)日：2015-09-24

申请号：US14217569

申请日：2014-03-18

Applicant: Robert Bosch GmbH

Inventor： Richard Fix ,  Andreas Krauss ,  Markus Widenmeyer

IPC: F01N13/08 ,  F01N11/00

CPC classification number: F01N13/08 ,  F01N11/00 ,  F01N13/008 ,  F01N2560/02 ,  G01N27/4141

Abstract: An exhaust gas guide element for conducting at least a portion of an exhaust gas to a sensor for a vehicle. The exhaust gas guide element has a greater extent in a direction of a longitudinal axis than in a direction of a transverse axis, and is gas-permeable along the direction of the longitudinal axis. One end of the gas guide element along the direction of the longitudinal axis is configured as a receiving region, and the opposite end is configured as a measuring region. A sensor can be positioned in the measuring region, and a gas receiving element is positioned in the receiving region.

Abstract translation: 一种用于将至少一部分排气导入车辆传感器的废气引导元件。 废气引导元件在纵轴方向上比在横轴方向上具有更大的程度，并且沿着纵向轴线的方向是气体可渗透的。 气体引导元件沿着纵轴方向的一端被构造为接收区域，并且相对端被配置为测量区域。 传感器可以位于测量区域中，并且气体接收元件位于接收区域中。

公开(公告)号：US20140283632A1

公开(公告)日：2014-09-25

申请号：US14217591

申请日：2014-03-18

Applicant: Robert Bosch GmbH

Inventor： Richard Fix ,  Andreas Krauss

IPC: G01D11/30 ,  G01N27/00

CPC classification number: G01D11/30 ,  G01N27/00 ,  G01N27/414

Abstract: A sensor device includes a sensor element configured to detect a measurement value based at least in part upon a physical variable, and a support element configured to support the sensor element. The support element has at least one connection region which is located in a section of the support element, and which is configured to connect the section of the support element to a section of the sensor element such that the sensor element is mounted so as to be movable with respect to the support element.

Abstract translation: 传感器装置包括被配置为至少部分地基于物理变量检测测量值的传感器元件和被配置为支撑传感器元件的支撑元件。 支撑元件具有位于支撑元件的一部分中的至少一个连接区域，并且其被构造成将支撑元件的部分连接到传感器元件的一部分，使得传感器元件被安装成 可相对于支撑元件移动。

公开(公告)号：US20140262838A1

公开(公告)日：2014-09-18

申请号：US14196142

申请日：2014-03-04

Applicant: Robert Bosch GmbH

Inventor： Richard Fix ,  Denis Kunz ,  Andreas Krauss ,  Kathy Sahner ,  Philipp Nolte

IPC: B81B7/02 ,  G01N27/49

CPC classification number: G01N27/4072 ,  G01N27/4067

Abstract: A microelectrochemical sensor having a diaphragm, a web, a first and a second electrode. The diaphragm is permeable to ions of a chemical species, is arranged transversely with respect to a cutout in a base body, and closes off the cutout in a fluid-tight fashion. The web is arranged on a first side of the diaphragm between a first partial surface and a second partial surface, and is designed to adjust a temperature of the diaphragm to an operating temperature using electrical energy. The first electrode has a first partial electrode and a second partial electrode, is permeable to fluid, and is arranged on the first side of the diaphragm. The web prevents electrical contact between the first electrode and the diaphragm. The second electrode has a third partial electrode and a fourth partial electrode, is also permeable to fluid, and is arranged on a second side of the diaphragm.

Abstract translation: 一种具有隔膜，腹板，第一和第二电极的微电化学传感器。 隔膜对化学物质的离子是可渗透的，相对于基体中的切口横向布置，并以流体密封的方式封闭切口。 网状物布置在第一部分表面和第二部分表面之间的隔膜的第一侧上，并且被设计成使用电能将隔膜的温度调节到工作温度。 第一电极具有第一部分电极和第二部分电极，其可渗透流体并且布置在隔膜的第一侧上。 网防止第一电极和隔膜之间的电接触。 第二电极具有第三部分电极和第四部分电极，其也可渗透流体，并且布置在隔膜的第二侧上。