Optical multiplexing circuit and light source

    公开(公告)号:US11886002B2

    公开(公告)日:2024-01-30

    申请号:US17438848

    申请日:2019-04-16

    CPC classification number: G02B6/12007 G02B6/125 H01S5/0264

    Abstract: An optical multiplexing circuit capable of accurately monitoring light of a plurality of wavelengths is provided. An optical multiplexing circuit includes a plurality of branching units configured to each divide light output from a corresponding one of a plurality of input waveguides, a multiplexing unit configured to multiplex a plurality of first beams of the light, each obtained by dividing the light by a corresponding one of the plurality of branching units, an output waveguide configured to output the light multiplexed by the multiplexing unit, a plurality of monitoring multiplexing units that are optical circuits identical to the multiplexing unit, a plurality of first monitoring waveguides configured to output a plurality of second beams of the light, each obtained by dividing the light by a corresponding one of the plurality of branching units, to corresponding ones of the plurality of monitoring multiplexing units, and a plurality of second monitoring waveguides configured to each output an output of a corresponding one of the plurality of monitoring multiplexing units.

    FLUID ANALYZER AND METHOD OF MANUFACTURING FLUID ANALYZER

    公开(公告)号:US20170115213A1

    公开(公告)日:2017-04-27

    申请号:US15294882

    申请日:2016-10-17

    Abstract: A fluid analyzer includes a substrate, a quantum cascade laser formed on a surface of the substrate and including a first light-emitting surface and a second light-emitting surface facing each other, a first quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a first light incident surface facing the first light-emitting surface, a second quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a second light incident surface facing the second light-emitting surface, and a resin member covering at least the second light-emitting surface and the second light incident surface and having optical transparency and an electrical insulation property. A first space in which a fluid to be analyzed is disposed is provided in a first area between the first light-emitting surface and the first light incident surface.

    Method for Producing an Integrated Micromechanical Fluid Sensor Component, Integrated Micromechanical Fluid Sensor Component and Method for Detecting a Fluid by Means of an Integrated Micromechanical Fluid Sensor Component
    9.
    发明申请
    Method for Producing an Integrated Micromechanical Fluid Sensor Component, Integrated Micromechanical Fluid Sensor Component and Method for Detecting a Fluid by Means of an Integrated Micromechanical Fluid Sensor Component 有权
    集成微机电流体传感器部件的集成微机械流体传感器部件的方法和通过集成微机械流体传感器部件检测流体的方法

    公开(公告)号:US20160334329A1

    公开(公告)日:2016-11-17

    申请号:US15112163

    申请日:2014-11-21

    Abstract: A method for producing an integrated micromechanical fluid sensor component includes forming a first wafer with a first Bragg reflector and with a light-emitting device on a first substrate. The light-emitting device is configured to emit light rays in an emission direction from a surface of the light-emitting device facing away from the first Bragg reflector. The method further includes forming a second wafer with a second Bragg reflector and with a photodiode on a second substrate. The photodiode is arranged on a surface of the second Bragg reflector facing towards the second substrate. The method also includes bonding or gluing the first wafer to the second wafer such that there is formed a cavity into which a fluid is introduced and through which the light rays can pass. The method further includes separating the fluid sensor component from the first and the second wafer.

    Abstract translation: 一种用于制造集成的微机械流体传感器部件的方法包括:在第一基板上形成具有第一布拉格反射器的第一晶片和发光器件。 发光装置被配置为从发光装置的远离第一布拉格反射器的表面沿发射方向发射光线。 该方法还包括用第二布拉格反射器和在第二衬底上的光电二极管形成第二晶片。 光电二极管布置在第二布拉格反射器面向第二基板的表面上。 该方法还包括将第一晶片接合或胶合到第二晶片,使得形成空腔,流体被引入到其中,光线可以通过该空腔通过。 该方法还包括从第一和第二晶片分离流体传感器部件。

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