Invention Grant
- Patent Title: MEMS component
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Application No.: US15506068Application Date: 2015-06-23
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Publication No.: US10000374B2Publication Date: 2018-06-19
- Inventor: Christoph Schelling , Benedikt Stein , Michael Stumber
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102014217152 20140828
- International Application: PCT/EP2015/064042 WO 20150623
- International Announcement: WO2016/030040 WO 20160303
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B3/00
Abstract:
A layer material which is particularly suitable for the realization of self-supporting structural elements having an electrode in the layer structure of a MEMS component. The self-supporting structural element is at least partially made up of a silicon carbonitride (Si1-x-yCxNy)-based layer.
Public/Granted literature
- US20170247246A1 MEMS COMPONENT Public/Granted day:2017-08-31
Information query
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