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公开(公告)号:US20240379770A1
公开(公告)日:2024-11-14
申请号:US18316862
申请日:2023-05-12
Applicant: QUALCOMM Incorporated
Inventor: Xia LI , Junjing BAO , John Jianhong ZHU
IPC: H01L29/40 , H01L21/311 , H01L27/088 , H01L29/417
Abstract: A self-aligned contact (SAC) and method for making the same is disclosed. In an aspect a field effect transistor (FET) structure comprises a channel connecting a first source or drain (S/D) region to a second S/D region, a gate structure, comprising a multi-layer metal gate between gate spacers, disposed above a gate region that at least partially surrounds the channel, a self-alignment structure, also referred to as a “hat”, disposed above the gate structure and covering at least the multi-layer metal gate and the gate spacers, and a first S/D contact that is self-aligned to the hat and connected to the first S/D region. During fabrication, a self-assembly monolayer (SAM) is used to precisely align the hat over the multi-layer metal gate. The S/D contacts are then self-aligned to the hat, even if the etch mask has an overlay error. The hat also shields the gate structure during an etch.
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公开(公告)号:US20210279036A1
公开(公告)日:2021-09-09
申请号:US16807562
申请日:2020-03-03
Applicant: QUALCOMM Incorporated
Inventor: Xia LI , Zhongze WANG , Periannan CHIDAMBARAM
Abstract: Certain aspects provide methods and apparatus for binary computation. An example circuit for such computation generally includes a memory cell having at least one of a bit-line or a complementary bit-line; a computation circuit coupled to a computation input node of the circuit and the bit-line or the complementary bit-line; and an adder coupled to the computation circuit, wherein the computation circuit comprises a first n-type metal-oxide-semiconductor (NMOS) transistor coupled to the memory cell, and a first p-type metal-oxide-semiconductor (PMOS) transistor coupled to the memory cell, drains of the first NMOS and PMOS transistors being coupled to the adder, wherein a source of the first PMOS transistor is coupled to a reference potential node, and wherein a source of the first NMOS transistor is coupled to the computation input node.
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公开(公告)号:US20210233959A1
公开(公告)日:2021-07-29
申请号:US16752288
申请日:2020-01-24
Applicant: QUALCOMM Incorporated
Inventor: Bin YANG , Xia LI , Gengming TAO
Abstract: Certain aspects of the present disclosure generally relate to a vertically stacked multilayer resistive random access memory (RRAM) and methods for fabricating such an RRAM. The vertically stacked multilayer RRAM generally includes a planar substrate layer and a plurality of metal-insulator-metal (MIM) stacks, each MIM stack structure of the plurality of MIM stacks comprising a plurality of MIM structures extending orthogonally above the planar substrate.
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公开(公告)号:US20200052078A1
公开(公告)日:2020-02-13
申请号:US16660006
申请日:2019-10-22
Applicant: QUALCOMM Incorporated
Inventor: Gengming TAO , Bin YANG , Xia LI
IPC: H01L29/417 , H01L29/08 , H01L21/308 , H01L21/306 , H01L29/66 , H01L29/45 , H01L21/285 , H01L29/10 , H01L29/205 , H01L29/737
Abstract: In certain aspects, a heterojunction bipolar transistor (HBT) comprises a collector mesa, a base mesa on the collector mesa, and an emitter mesa on the base mesa. The base mesa has a tapered sidewall tapering from a wide bottom to a narrow top. The HBT further comprises a collector contact on a portion of the collector mesa and extending to a portion of the tapered sidewall of the base mesa.
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公开(公告)号:US20190229933A1
公开(公告)日:2019-07-25
申请号:US15877630
申请日:2018-01-23
Applicant: QUALCOMM Incorporated
Inventor: Xia LI , Seung Hyuk KANG , Bin YANG , Gengming TAO
Abstract: In certain aspects, an apparatus comprises a plurality of PUF cells. Each PUF cell comprises a first transistor in series with a first loading resistive component and coupled to a common cross-coupled node and cross-coupled to a complementary common cross-coupled node, a second transistor in series with a second loading resistive component and coupled to the complementary common cross-coupled node and cross-coupled to the common cross-coupled node, a first pass-gate and a second pass-gate coupled to a bit line and the complementary bit line, respectively. The apparatus further comprises an auxiliary peripheral circuit coupled to the bit line, the complementary bit line, the common cross-coupled node, and the complementary common cross-coupled node. During activation, the selected PUF cell, together with the auxiliary peripheral circuit, forms a cross-coupled inverter pair and outputs a physical unclonable function value.
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公开(公告)号:US20190189787A1
公开(公告)日:2019-06-20
申请号:US15985423
申请日:2018-05-21
Applicant: QUALCOMM Incorporated
Inventor: Gengming TAO , Xia LI , Bin YANG
IPC: H01L29/737 , H01L29/08 , H01L29/423 , H01L29/417 , H01L23/528 , H01L23/532 , H01L21/768
CPC classification number: H01L29/7371 , H01L21/31058 , H01L21/31138 , H01L21/76885 , H01L23/528 , H01L23/53295 , H01L29/0817 , H01L29/0821 , H01L29/41708 , H01L29/42304
Abstract: A heterojunction bipolar transistor (HBT) may include a base contact and emitter mesas on a collector mesa. The HBT may include emitter contacts on the emitter mesas. The HBT may include a first dielectric layer on the collector mesa, sidewalls of the emitter mesas, and the base contact. The HBT may further include a second dielectric layer on the first dielectric layer and on sidewalls of the emitter contacts. The HBT may further include a secondary conductive layer on the first dielectric layer, the second dielectric layer, and the emitter contacts.
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7.
公开(公告)号:US20190035945A1
公开(公告)日:2019-01-31
申请号:US15659718
申请日:2017-07-26
Applicant: QUALCOMM Incorporated
Inventor: Xia LI , Bin YANG , Gengming TAO
Abstract: Certain aspects of the present disclosure generally relate to a semiconductor variable capacitor offering at least two types of capacitance tuning, as well as techniques for fabricating the same. For example, a CMOS-compatible silicon on insulator (SOI) process with a buried oxide (BOX) layer may provide a transcap with a front gate (above the BOX layer) and a back gate (beneath the BOX layer). The front gate may offer lower voltage, coarse capacitance tuning, whereas the back gate may offer higher voltage, fine capacitance tuning. By offering both types of capacitance tuning, such transcaps may provide greater capacitance resolution. Several variations of transcaps with front gate and back gate tuning are illustrated and described herein.
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公开(公告)号:US20180337242A1
公开(公告)日:2018-11-22
申请号:US15685877
申请日:2017-08-24
Applicant: QUALCOMM Incorporated
Inventor: Bin YANG , Xia LI , Gengming TAO , Periannan CHIDAMBARAM
IPC: H01L29/423 , H01L29/66
CPC classification number: H01L29/4238 , H01L29/2003 , H01L29/41775 , H01L29/42316 , H01L29/42376 , H01L29/66446 , H01L29/66462 , H01L29/7786
Abstract: A compound semiconductor field effect transistor (FET) may include gallium nitride (GaN) and alloy material layers. The compound semiconductor FET may also include a pair of L-shaped contacts on the GaN and alloy material layers. The compound semiconductor FET may also include a pair of gate spacers between the L-shaped contacts and on the GaN and alloy material layers, each of the pair of gate spacers contacting one of the L-shaped contacts. The compound semiconductor FET may further include a base gate between the pair of gate spacers and on the GaN and alloy material layers, in which the pair of L-shaped contacts are self-aligned with the base gate.
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公开(公告)号:US20180277671A1
公开(公告)日:2018-09-27
申请号:US15643815
申请日:2017-07-07
Applicant: QUALCOMM Incorporated
Inventor: Bin YANG , Gengming TAO , Xia LI , Periannan CHIDAMBARAM
IPC: H01L29/778 , H01L29/423 , H01L29/66
Abstract: A compound semiconductor transistor may include a channel layer. The compound semiconductor transistor may also include a dielectric layer on the channel layer. The compound semiconductor transistor may further include a gate. The gate may include a vertical base portion through the dielectric layer and electrically contacting the channel layer. The gate may also include a head portion on the dielectric layer and electrically coupled to the vertical base portion of the gate.
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公开(公告)号:US20160308062A1
公开(公告)日:2016-10-20
申请号:US15194125
申请日:2016-06-27
Applicant: QUALCOMM INCORPORATED
Inventor: Xia LI , Bin YANG , Seung Hyuk KANG
IPC: H01L29/788 , H01L29/66 , H01L29/78
CPC classification number: H01L29/7883 , H01L21/845 , H01L27/0886 , H01L27/11517 , H01L27/11551 , H01L27/1211 , H01L29/66795 , H01L29/66825 , H01L29/785 , H01L29/788 , H01L29/7881
Abstract: A method for fabricating a multiple time programmable (MTP) device includes forming fins of a first conducting type on a substrate of a second conducting type. The method further includes forming a floating gate dielectric to partially surround the fins. The method also includes forming a floating gate on the floating gate dielectric. The method also includes forming a coupling film on the floating gate and forming a coupling gate on the coupling film.
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