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公开(公告)号:CN102569263B
公开(公告)日:2016-01-20
申请号:CN201110370054.3
申请日:2011-11-18
Applicant: 日东电工株式会社
IPC: H01L23/552
CPC classification number: H01L25/0657 , C09J7/28 , C09J2203/326 , H01L21/6836 , H01L23/552 , H01L24/16 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/81 , H01L24/83 , H01L2221/68327 , H01L2224/16225 , H01L2224/27436 , H01L2224/29 , H01L2224/29101 , H01L2224/2919 , H01L2224/2929 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/32145 , H01L2224/32225 , H01L2224/32245 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/73265 , H01L2224/83191 , H01L2224/83862 , H01L2224/92247 , H01L2225/0651 , H01L2225/06537 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01024 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01037 , H01L2924/01038 , H01L2924/0104 , H01L2924/01041 , H01L2924/01042 , H01L2924/01044 , H01L2924/01045 , H01L2924/01047 , H01L2924/0105 , H01L2924/01051 , H01L2924/01055 , H01L2924/01056 , H01L2924/01057 , H01L2924/01058 , H01L2924/01059 , H01L2924/01063 , H01L2924/01072 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01076 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01088 , H01L2924/0132 , H01L2924/0133 , H01L2924/014 , H01L2924/0665 , H01L2924/15747 , H01L2924/181 , H01L2924/3011 , H01L2924/3025 , Y10T428/28 , H01L2924/00014 , H01L2924/00 , H01L2924/01014 , H01L2924/01026 , H01L2924/01028 , H01L2924/3512 , H01L2924/00012 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299
Abstract: 本发明涉及半导体装置用胶粘薄膜以及半导体装置。本发明的课题在于减少从一个半导体芯片释放的电磁波对同一封装内的另一个半导体芯片、安装的衬底、相邻的器件、封装等产生的影响。一种半导体装置用胶粘薄膜,具有胶粘剂层和电磁波屏蔽层,其特征在于,透过所述半导体装置用胶粘薄膜的电磁波的衰减量,对于50MHz~20GHz范围的频域的至少一部分而言,为3dB以上。
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公开(公告)号:CN102399505B
公开(公告)日:2015-11-25
申请号:CN201110276306.6
申请日:2011-09-13
Applicant: 日东电工株式会社
CPC classification number: H01L21/78 , C08K7/00 , C09J7/35 , C09J9/02 , C09J2201/622 , C09J2203/326 , C09J2205/102 , H01L21/67132 , H01L21/6836 , H01L23/3121 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/85 , H01L24/92 , H01L25/0657 , H01L2221/68327 , H01L2221/68336 , H01L2221/6834 , H01L2221/68377 , H01L2224/2919 , H01L2224/2929 , H01L2224/293 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/2939 , H01L2224/294 , H01L2224/32145 , H01L2224/32225 , H01L2224/32245 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48145 , H01L2224/48227 , H01L2224/48247 , H01L2224/73265 , H01L2224/85205 , H01L2224/92247 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01047 , H01L2924/01051 , H01L2924/01057 , H01L2924/01074 , H01L2924/01077 , H01L2924/01079 , H01L2924/01082 , H01L2924/0665 , H01L2924/10253 , H01L2924/12042 , H01L2924/15747 , H01L2924/15788 , H01L2924/181 , H01L2924/3025 , Y10T428/25 , Y10T428/28 , Y10T428/2817 , H01L2924/00014 , H01L2924/00 , H01L2924/3512 , H01L2924/00012 , H01L2924/00011
Abstract: 本发明的目的在于提供一种切割/芯片接合薄膜,其具有不易引起剥离带电并且胶粘性、作业性良好的芯片接合薄膜。一种在切割薄膜上设置有热固型芯片接合薄膜的切割/芯片接合薄膜,其中,热固型芯片接合薄膜含有导电性粒子,热固型芯片接合薄膜的体积电阻率为1×10-6Ω·cm以上且1×10-3Ω·cm以下,并且,热固型芯片接合薄膜热固化前在-20℃下的拉伸储能弹性模量为0.1GPa~10GPa。
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公开(公告)号:CN103996672A
公开(公告)日:2014-08-20
申请号:CN201410168418.3
申请日:2011-11-18
Applicant: 日东电工株式会社
IPC: H01L23/552
CPC classification number: H01L25/0657 , C09J7/28 , C09J2203/326 , H01L21/6836 , H01L23/552 , H01L24/16 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/81 , H01L24/83 , H01L2221/68327 , H01L2224/16225 , H01L2224/27436 , H01L2224/29 , H01L2224/29101 , H01L2224/2919 , H01L2224/2929 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/32145 , H01L2224/32225 , H01L2224/32245 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/73265 , H01L2224/83191 , H01L2224/83862 , H01L2224/92247 , H01L2225/0651 , H01L2225/06537 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01024 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01037 , H01L2924/01038 , H01L2924/0104 , H01L2924/01041 , H01L2924/01042 , H01L2924/01044 , H01L2924/01045 , H01L2924/01047 , H01L2924/0105 , H01L2924/01051 , H01L2924/01055 , H01L2924/01056 , H01L2924/01057 , H01L2924/01058 , H01L2924/01059 , H01L2924/01063 , H01L2924/01072 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01076 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01088 , H01L2924/0132 , H01L2924/0133 , H01L2924/014 , H01L2924/0665 , H01L2924/15747 , H01L2924/181 , H01L2924/3011 , H01L2924/3025 , Y10T428/28 , H01L2924/00014 , H01L2924/00 , H01L2924/01014 , H01L2924/01026 , H01L2924/01028 , H01L2924/3512 , H01L2924/00012 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299
Abstract: 本发明涉及半导体装置用胶粘薄膜以及半导体装置。本发明的课题在于减少从一个半导体芯片释放的电磁波对同一封装内的另一个半导体芯片、安装的衬底、相邻的器件、封装等产生的影响。一种半导体装置用胶粘薄膜,具有胶粘剂层和电磁波屏蔽层,其特征在于,透过所述半导体装置用胶粘薄膜的电磁波的衰减量,对于50MHz~20GHz范围的频域的至少一部分而言,为3dB以上。
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公开(公告)号:CN102683244A
公开(公告)日:2012-09-19
申请号:CN201210061805.8
申请日:2012-03-09
Applicant: 日东电工株式会社
IPC: H01L21/67
CPC classification number: H01L21/56 , C09J2203/326 , H01L21/67132 , H01L21/6836 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/85 , H01L24/92 , H01L2221/68327 , H01L2221/68377 , H01L2221/68381 , H01L2224/2919 , H01L2224/32225 , H01L2224/32245 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/73265 , H01L2224/83191 , H01L2224/83862 , H01L2224/83906 , H01L2224/85205 , H01L2224/9205 , H01L2224/92247 , H01L2924/00013 , H01L2924/01012 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/15747 , H01L2924/15788 , H01L2924/181 , H01L2924/3025 , H01L2924/00014 , H01L2924/00 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599 , H01L2924/3512 , H01L2924/00012
Abstract: 本发明提供芯片接合薄膜位于切割薄膜的中心的半导体装置用薄膜的制造方法。一种半导体装置用薄膜的制造方法,所述半导体装置用薄膜通过切割薄膜、芯片接合薄膜和保护薄膜以该顺序层叠而得到,其包括:照射波长400~800nm的光线,基于所得到的光线透射率检测芯片接合薄膜的位置的工序,和基于检测到的芯片接合薄膜的位置,对所述切割薄膜进行冲裁的工序;设切割薄膜和保护薄膜的层叠部分的光线透射率为T1、设切割薄膜与芯片接合薄膜和保护薄膜的层叠部分的光线透射率为T2时,T2/T1为0.04以上。
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公开(公告)号:CN105505244A
公开(公告)日:2016-04-20
申请号:CN201510901642.3
申请日:2012-08-03
Applicant: 日东电工株式会社
IPC: C09J7/02 , C09J133/08 , C09J11/08 , C09J11/04 , H01L21/683 , H01L23/29
CPC classification number: H01L24/29 , H01L24/27 , H01L2224/83191 , H01L2924/15747 , H01L2924/15788 , H01L2924/181 , H01L2924/00 , H01L2924/00012 , C09J133/08 , C08K3/36 , C09J11/04 , C09J11/08 , C09J2203/326 , C09J2433/006 , H01L21/6836 , H01L23/296 , C08L61/06
Abstract: 本发明涉及芯片接合薄膜、切割/芯片接合薄膜及半导体装置。本发明提供即使在高温下长时间暴露也可以减少芯片接合薄膜与被粘物的边界处空隙的产生的芯片接合薄膜。一种芯片接合薄膜,其特征在于,含有含腈基热固性丙烯酸类共聚物和固化剂,使用差示量热计,以10℃/分钟的升温速度从25℃到300℃进行测定时的放热量为10mJ/mg以下。
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公开(公告)号:CN103305146A
公开(公告)日:2013-09-18
申请号:CN201310078333.1
申请日:2013-03-12
Applicant: 日东电工株式会社
IPC: C09J7/02 , H01L21/683
Abstract: 本发明提供一种高度差追随性优异的粘合片。本发明的粘合片具备粘合剂层和基材层,其中,该粘合剂层在70℃下的弹性模量E’与厚度之积为0.7N/mm以下,且该基材层在70℃下的弹性模量E’为1.0MPa以下。通过制成具备这样的基材层和粘合剂层的粘合片,可以提供贴附时与被粘物的密合性提高、高度差追随性优异的粘合片。
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公开(公告)号:CN102676093A
公开(公告)日:2012-09-19
申请号:CN201210063005.X
申请日:2012-03-12
Applicant: 日东电工株式会社
IPC: C09J133/00 , C09J161/06 , C09J163/00 , C09J7/02 , H01L21/58 , H01L21/68
CPC classification number: C08G59/3209 , C08G59/621 , C08L61/04 , C09J7/29 , C09J133/068 , C09J163/00 , C09J2203/326 , C09J2433/00 , C09J2461/00 , H01L21/56 , H01L21/561 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/85 , H01L24/92 , H01L25/0657 , H01L2224/29023 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/32245 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/73215 , H01L2224/73265 , H01L2224/83097 , H01L2224/83191 , H01L2224/83855 , H01L2224/85097 , H01L2224/85205 , H01L2224/85986 , H01L2224/9205 , H01L2224/92165 , H01L2224/92247 , H01L2224/94 , H01L2225/0651 , H01L2225/06568 , H01L2225/06575 , H01L2225/06582 , H01L2924/00013 , H01L2924/01012 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01029 , H01L2924/01047 , H01L2924/0132 , H01L2924/10253 , H01L2924/15747 , H01L2924/15788 , H01L2924/181 , H01L2924/3025 , Y02P20/582 , Y10T428/2874 , H01L2924/00014 , H01L2924/00 , H01L2924/01026 , H01L2924/01028 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599 , H01L2924/3512 , H01L2924/00012
Abstract: 本发明涉及芯片接合薄膜及其用途。本发明的目的在于提供在固化前后可以得到充分的胶粘力和高温下的弹性模量,作业性良好,并且在芯片接合薄膜与被粘物的边界处不积存气泡(空隙),也可以耐受耐湿回流焊接试验的可靠性高的芯片接合薄膜、以及具有该芯片接合薄膜的切割/芯片接合薄膜、以及半导体装置的制造方法。本发明的芯片接合薄膜,其含有重均分子量50万以上的含有缩水甘油基的丙烯酸类共聚物(a)和酚醛树脂(b),所述含有缩水甘油基的丙烯酸类共聚物(a)的含量x相对于酚醛树脂(b)的含量y的重量比(x/y)为5以上且30以下,并且实质上不含有重均分子量5000以下的环氧树脂。
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公开(公告)号:CN102468185A
公开(公告)日:2012-05-23
申请号:CN201110366976.7
申请日:2011-11-18
Applicant: 日东电工株式会社
IPC: H01L21/48 , H01L23/552 , H01L21/77
CPC classification number: H01L24/27 , C09J7/28 , C09J2203/326 , H01L21/6836 , H01L23/3121 , H01L23/552 , H01L24/29 , H01L24/32 , H01L24/33 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/85 , H01L25/0657 , H01L2221/68327 , H01L2221/68377 , H01L2221/68386 , H01L2224/27003 , H01L2224/271 , H01L2224/29 , H01L2224/29083 , H01L2224/291 , H01L2224/2919 , H01L2224/2929 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/29386 , H01L2224/29393 , H01L2224/32145 , H01L2224/32225 , H01L2224/32245 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48225 , H01L2224/48227 , H01L2224/48245 , H01L2224/48247 , H01L2224/73265 , H01L2224/83091 , H01L2224/83191 , H01L2224/8385 , H01L2224/83862 , H01L2224/85097 , H01L2224/85205 , H01L2225/0651 , H01L2225/06537 , H01L2225/06568 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01037 , H01L2924/01038 , H01L2924/0104 , H01L2924/01041 , H01L2924/01042 , H01L2924/01044 , H01L2924/01045 , H01L2924/01047 , H01L2924/0105 , H01L2924/01051 , H01L2924/01055 , H01L2924/01056 , H01L2924/01057 , H01L2924/01058 , H01L2924/01059 , H01L2924/01063 , H01L2924/01072 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01076 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01088 , H01L2924/0665 , H01L2924/15747 , H01L2924/181 , H01L2924/3011 , H01L2924/3025 , Y10T156/10 , Y10T428/2804 , H01L2924/00 , H01L2924/3512 , H01L2924/00012 , H01L2924/00014 , H01L2924/0532 , H01L2924/05432 , H01L2924/05032 , H01L2924/0503 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299
Abstract: 本发明涉及芯片接合薄膜、切割/芯片接合薄膜、芯片接合薄膜的制造方法以及具有芯片接合薄膜的半导体装置。本发明的课题在于提供可以在不降低生产率的情况下制造具有电磁波屏蔽层的半导体装置。一种芯片接合薄膜,其具有胶粘剂层和由金属箔构成的电磁波屏蔽层,或者一种芯片接合薄膜,其具有胶粘剂层和通过蒸镀形成的电磁波屏蔽层。
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公开(公告)号:CN102559085B
公开(公告)日:2016-03-16
申请号:CN201110367402.1
申请日:2011-11-18
Applicant: 日东电工株式会社
IPC: C09J7/02 , H01L23/552 , H01L23/29 , H01L21/56
CPC classification number: H01L23/552 , H01L21/563 , H01L21/6836 , H01L23/544 , H01L2221/68327 , H01L2221/68377 , H01L2221/68386 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/13118 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/16225 , H01L2224/16245 , H01L2224/73204 , H01L2224/81193 , H01L2224/81815 , H01L2224/831 , H01L2224/83862 , H01L2924/01019 , H01L2924/01037 , H01L2924/01055 , H01L2924/01079 , Y10T428/28 , H01L2924/00
Abstract: 本发明涉及倒装芯片型半导体背面用薄膜、切割带一体型半导体背面用薄膜、倒装芯片型半导体背面用薄膜的制造方法以及半导体装置。本发明的课题在于可以在倒装芯片式连接到被粘物上的半导体元件的背面设置电磁波屏蔽层,并且可以在不降低生产率的情况下制造具有该电磁波屏蔽层的半导体装置。一种倒装芯片型半导体背面用薄膜,用于在倒装芯片式连接到被粘物上的半导体元件的背面上形成,其具有胶粘剂层和电磁波屏蔽层。
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公开(公告)号:CN102386054B
公开(公告)日:2016-01-20
申请号:CN201110270510.7
申请日:2011-09-06
Applicant: 日东电工株式会社
IPC: H01L21/00
CPC classification number: H01L21/67132 , H01L21/67092 , Y10T428/21 , Y10T428/31504 , Y10T428/31855
Abstract: 本发明提供一种半导体装置用薄膜以及半导体装置,在将所述半导体装置用薄膜卷绕为卷筒状时,可以抑制在胶粘薄膜上产生转印痕迹,所述半导体装置用薄膜为在切割薄膜上层叠有胶粘薄膜的带有切割片的胶粘薄膜以规定的间隔层叠在覆盖薄膜上而得到的半导体装置用薄膜。一种半导体装置用薄膜,其为在切割薄膜上层叠有胶粘薄膜的带有切割片的胶粘薄膜以规定的间隔层叠在覆盖薄膜上而得到的半导体装置用薄膜,其特征在于,23℃下胶粘薄膜的拉伸储能弹性模量Ea与23℃下覆盖薄膜的拉伸储能弹性模量Eb的比Ea/Eb在0.001~50的范围内。
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