Fluid supply system
    1.
    发明授权

    公开(公告)号:US12121926B2

    公开(公告)日:2024-10-22

    申请号:US17638376

    申请日:2020-06-24

    IPC分类号: B05C11/10 B05C9/02

    摘要: A fluid supply system includes: a support body having: a base plate; a side plate provided on one side of the base plate in the longitudinal direction so as to be orthogonal to the base plate; and a top plate provided on one end of the base plate in the height direction so as to be orthogonal to the base plate and the side plate; a process-gas supply unit provided on an outer surface of the top plate; a liquid supply unit provided on an inner surface of the side plate so as to communicate with the process-gas supply unit via a communication-flow-channel forming block; and a purge-gas supply unit provided on an inner surface of base plate so as to communicate with the process-gas supply unit via a communication pipe.

    IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF PRODUCING ARTICLE
    8.
    发明申请
    IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF PRODUCING ARTICLE 审中-公开
    印刷装置,印刷方法和制作方法

    公开(公告)号:US20170057154A1

    公开(公告)日:2017-03-02

    申请号:US15245070

    申请日:2016-08-23

    摘要: An imprint apparatus according to an embodiment of the present invention includes a supply unit configured to supply an imprint material on a substrate, a pattern formation unit including a holder holding a mold, the pattern formation unit being configured to bring the mold in contact with the imprint material supplied by the supply unit to form a pattern, a prevention unit configured to supply a gas in a direction intersecting a direction along the substrate to prevent a foreign matter from attaching to the substrate, and a removal unit configured to locally supply a fluid to the substrate to remove a foreign matter on the substrate.

    摘要翻译: 根据本发明的实施例的压印装置包括:供给单元,被配置为将压印材料供应到基板上;图案形成单元,包括保持模具的保持架,所述图案形成单元构造成使模具与 由供给单元提供的压印材料形成图案,防止单元,其构造成沿与所述基板的方向交叉的方向供给气体,以防止异物附着到所述基板;以及去除单元,被配置为局部地供应流体 以去除衬底上的异物。