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公开(公告)号：US20170092841A1
公开(公告)日：2017-03-30
申请号：US15275935
申请日：2016-09-26
IPC分类号： H01L41/27 , H01L41/08 , H01L41/297 , B05D3/00 , C23C30/00 , B05C11/00 , B05C9/02 , H01L41/047 , H01L41/317
CPC分类号： B05D3/007 , B05C9/02 , B05C11/00 , B41J2/14233 , B41J2202/03 , B41J2202/11 , C23C30/005 , H01L41/0477 , H01L41/0815 , H01L41/0973 , H01L41/29 , H01L41/317 , H01L41/319
摘要： A substrate for piezoelectric body formation has a base substrate layer containing at least SiO2 or SiN in the surface, an intermediate layer containing at least one of Ti and TiO2 on the base substrate layer, and an electrode layer containing Pt on the intermediate layer, in which the film thickness of the electrode layer is 40 nm or more and 1000 nm or less and Ti is not detected in the surface of the electrode layer by an elemental quantitative analysis method.
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公开(公告)号：US20180269374A1
公开(公告)日：2018-09-20
申请号：US15912223
申请日：2018-03-05
IPC分类号： H01L41/047 , H01L41/27
CPC分类号： H01L41/0471 , B41J2/14233 , B41J2002/14258 , H01L41/0805 , H01L41/0973 , H01L41/1871 , H01L41/27 , H01L41/318
摘要： A piezoelectric element has a first piezoelectric layer, a second piezoelectric layer on the first piezoelectric layer, and an electrode layer on the second piezoelectric layer, in which the first piezoelectric layer and the second piezoelectric layer have pores, and the porosity of the second piezoelectric layer is lower than the porosity near the interface on the second piezoelectric layer side of the first piezoelectric layer.
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3.发明申请公开(公告)号：US20170365773A1
公开(公告)日：2017-12-21
申请号：US15608111
申请日：2017-05-30
CPC分类号： B41J2/161 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , H01L41/0815 , H01L41/0973 , H01L41/1876 , H01L41/318 , H01L41/319
摘要： Disclosed is a method of manufacturing a piezoelectric substrate, the method including: forming an intermediate layer of Ti and a lower electrode of Pt oriented in a (111) axis direction on a substrate without heating the substrate; applying a coating liquid for forming an orientation control layer made of lead titanate onto the lower electrode; drying the coating liquid at a predetermined temperature to form an orientation control layer precursor made of lead titanate; applying a coating liquid for forming a piezoelectric thin film made of lead zirconate titanate; drying the coating liquid at a predetermined temperature to form a piezoelectric precursor made of a lead zirconate titanate precursor; and collectively firing the orientation control layer precursor and the piezoelectric precursor to crystallize both the precursors, to thereby form a piezoelectric thin film made of lead zirconate titanate preferentially oriented in a (110) plane.
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公开(公告)号：US10532567B2
公开(公告)日：2020-01-14
申请号：US15886167
申请日：2018-02-01
摘要： A piezoelectric actuator has a ground substrate layer, an intermediate layer containing at least one of Ti and TiO2 on the ground substrate layer, an electrode layer containing Pt on the intermediate layer, and a piezoelectric layer containing lead zirconate titanate on the electrode layer, in which the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in the (100), (001), or (110) direction, the Pt contained in the electrode layer is preferentially oriented in the (111) direction, and the half width of the rocking curve in the (111) plane of the Pt contained in the electrode layer in X-ray diffraction is 1° or more.
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公开(公告)号：US20180222184A1
公开(公告)日：2018-08-09
申请号：US15886167
申请日：2018-02-01
摘要： A piezoelectric actuator has a ground substrate layer, an intermediate layer containing at least one of Ti and TiO2 on the ground substrate layer, an electrode layer containing Pt on the intermediate layer, and a piezoelectric layer containing lead zirconate titanate on the electrode layer, in which the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in the (100), (001), or (110) direction, the Pt contained in the electrode layer is preferentially oriented in the (111) direction, and the half width of the rocking curve in the (111) plane of the Pt contained in the electrode layer in X-ray diffraction is 1° or more.
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