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公开(公告)号：US20170333945A1
公开(公告)日：2017-11-23
申请号：US15660813
申请日：2017-07-26
IPC分类号： B06B1/02
CPC分类号： B06B1/0292
摘要： A method of producing an electromechanical transducer includes forming an insulating film on a first electrode, forming a sacrificial layer on the insulating film, forming a first membrane on the sacrificial layer, forming a second electrode on the first membrane, forming an etching-hole in the first membrane and removing the sacrificial layer through the etching-hole, and forming a second membrane on the second electrode, and sealing the etching-hole. Forming the second membrane and sealing the etching-hole are performed in one operation.
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公开(公告)号：US20170317264A1
公开(公告)日：2017-11-02
申请号：US15581169
申请日：2017-04-28
发明人： Toshio Tomiyoshi
CPC分类号： H01L41/0825 , B06B1/0292 , B06B1/06 , B06B1/10 , H01L41/0533 , H01L41/23 , H01L41/27
摘要： In an ultrasonic transducer manufacturing method, an ultrasonic device is mounted on a substrate, and a protective film having an acoustic matching layer thereon is prepared. Then, the protective film having the acoustic matching layer thereon is placed over the ultrasonic device such that the acoustic matching layer is in contact with the ultrasonic device.
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公开(公告)号：US09510069B2
公开(公告)日：2016-11-29
申请号：US14276930
申请日：2014-05-13
CPC分类号： H04R1/00 , B06B1/0292 , B81B2201/0271 , B81B2203/04 , B81C1/00626 , H04R2201/003
摘要： An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.
摘要翻译： 机电换能器包括基板，设置在基板上的第一电极以及设置在第一电极上的具有间隔的膜的振动膜和设置在膜上以与第一电极相对的第二电极。 第一电极的表面粗糙度值为6nm RMS以下。
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公开(公告)号：US20140241129A1
公开(公告)日：2014-08-28
申请号：US14276930
申请日：2014-05-13
IPC分类号： H04R1/00
CPC分类号： H04R1/00 , B06B1/0292 , B81B2201/0271 , B81B2203/04 , B81C1/00626 , H04R2201/003
摘要： An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.
摘要翻译： 机电换能器包括基板，设置在基板上的第一电极以及设置在第一电极上的具有间隔的膜的振动膜和设置在膜上以与第一电极相对的第二电极。 第一电极的表面粗糙度值为6nm RMS以下。
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公开(公告)号：US10532567B2
公开(公告)日：2020-01-14
申请号：US15886167
申请日：2018-02-01
摘要： A piezoelectric actuator has a ground substrate layer, an intermediate layer containing at least one of Ti and TiO2 on the ground substrate layer, an electrode layer containing Pt on the intermediate layer, and a piezoelectric layer containing lead zirconate titanate on the electrode layer, in which the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in the (100), (001), or (110) direction, the Pt contained in the electrode layer is preferentially oriented in the (111) direction, and the half width of the rocking curve in the (111) plane of the Pt contained in the electrode layer in X-ray diffraction is 1° or more.
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公开(公告)号：US20180222184A1
公开(公告)日：2018-08-09
申请号：US15886167
申请日：2018-02-01
摘要： A piezoelectric actuator has a ground substrate layer, an intermediate layer containing at least one of Ti and TiO2 on the ground substrate layer, an electrode layer containing Pt on the intermediate layer, and a piezoelectric layer containing lead zirconate titanate on the electrode layer, in which the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in the (100), (001), or (110) direction, the Pt contained in the electrode layer is preferentially oriented in the (111) direction, and the half width of the rocking curve in the (111) plane of the Pt contained in the electrode layer in X-ray diffraction is 1° or more.
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公开(公告)号：US20220320463A1
公开(公告)日：2022-10-06
申请号：US17707684
申请日：2022-03-29
发明人： Toshio Tomiyoshi
摘要： A semiconductor apparatus includes a translucent sheet and a semiconductor device that includes an effective pixel area and a peripheral area. A first bonding member is disposed between the peripheral area and the translucent sheet. A second bonding member is disposed between the effective pixel area and the translucent sheet. The first bonding member and the second bonding member are in contact with each other via a first interface. The second bonding member is made of a resin. The second bonding member includes a first part, and a second part disposed between the first part and the first bonding member and in contact with the first bonding member via the first interface. A cure ratio of the second part is lower than a cure ratio of the first part.
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公开(公告)号：US10189050B2
公开(公告)日：2019-01-29
申请号：US15348794
申请日：2016-11-10
IPC分类号： B06B1/00 , B06B1/02 , H01L41/08 , H01L41/09 , H01L41/316 , H01L41/332 , H02N1/08 , H02N1/00
摘要： An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode.
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公开(公告)号：US20220415960A1
公开(公告)日：2022-12-29
申请号：US17840926
申请日：2022-06-15
IPC分类号： H01L27/146
摘要： A disclosed method of manufacturing a semiconductor device includes singulating a bonded substrate including a first substrate provided with an interconnection structure layer and a first bonding layer and a second substrate provided with a second bonding layer opposed to the first bonding layer into a plurality of semiconductor devices. The bonded substrate includes functional element regions and a scribe region in a plan view. The singulating includes forming a groove in the scribe region, and cutting the bonded substrate in a region outside an inner side surface of the groove. The groove is formed penetrating one of the first substrate and the second substrate, the interconnection structure layer, and the first and second bonding layers. The groove extends from the one of the first substrate and the second substrate to a position deeper than all interconnection layers provided between the first and second substrates.
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10.发明申请CAPACITIVE TRANSDUCER AND METHOD OF MANUFACTURING THE SAME, AND OBJECT INFORMATION ACQUIRING APPARATUS 审中-公开电容式传感器及其制造方法以及获取装置的对象信息公开(公告)号：US20160091344A1
公开(公告)日：2016-03-31
申请号：US14890718
申请日：2014-05-29
CPC分类号： G01D5/24 , A61B5/0095 , A61B8/4483 , B06B1/0292 , B06B2201/76 , G01N29/2406 , G01N29/2418 , G01N2291/02466 , G01N2291/02475 , G01N2291/101 , H01G5/16 , H04R19/005
摘要： Provided is a capacitive transducer with improved reliability of sealing. The capacitive transducer includes a cell and a sealing portion. The cell includes a first electrode and a vibrating membrane having a second electrode formed to oppose the first electrode through intermediation of a cavity. An etching opening portion is formed to form the cavity by sacrifice layer etching. The sealing portion seals the etching opening portion. A gap at a periphery of the sealing portion has a height smaller than that of the cavity. In a manufacturing method therefor, in a step of forming a sacrifice layer for forming the cavity and the gap communicating to the cavity via an etching flow path, a height of the sacrifice layer in a region that is to become the gap is set to be smaller than that of the sacrifice layer in a region that is to become the cavity.
摘要翻译： 提供了具有改进的密封可靠性的电容式换能器。 电容换能器包括电池和密封部分。 电池包括第一电极和振动膜，其具有通过腔体通过形成为与第一电极相对的第二电极。 通过牺牲层蚀刻形成蚀刻开口部分以形成空腔。 密封部密封蚀刻开口部。 密封部分的周边处的间隙的高度小于空腔的高度。 在其制造方法中，在形成用于形成空腔的牺牲层和经由蚀刻流路连通到空腔的间隙的步骤中，将要成为间隙的区域中的牺牲层的高度设定为 小于要成为空腔的区域中的牺牲层的尺寸。
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