MICROELECTROMECHANICAL SENSOR
    5.
    发明申请
    MICROELECTROMECHANICAL SENSOR 有权
    微电子传感器

    公开(公告)号:US20120073371A1

    公开(公告)日:2012-03-29

    申请号:US13241665

    申请日:2011-09-23

    Applicant: Horst Theuss

    Inventor: Horst Theuss

    Abstract: In various embodiments, a microelectromechanical system may include a mass element; a substrate; a signal generator; and a fixing structure configured to fix the mass element to the substrate; wherein the mass element is fixed in such a way that, upon an acceleration of the microelectromechanical system, the mass element can be moved relative to the substrate in at least two spatial directions, and wherein a signal is generated by the movement of the mass element by means of the signal generator.

    Abstract translation: 在各种实施例中,微机电系统可以包括质量元件; 底物; 信号发生器; 以及固定结构,其构造成将所述质量元件固定到所述基板; 其中所述质量元件被固定为使得在所述微机电系统的加速时,所述质量元件能够在至少两个空间方向上相对于所述衬底移动,并且其中通过所述质量元件的运动产生信号 通过信号发生器。

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