公开(公告)号：US20180218998A1

公开(公告)日：2018-08-02

申请号：US15937149

申请日：2018-03-27

申请人： Invensas Corporation

发明人： Cyprian Emeka Uzoh

IPC分类号： H01L23/00 ,  H01L25/065 ,  H01L25/00

CPC分类号： H01L24/81 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/17 ,  H01L24/80 ,  H01L24/83 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/03009 ,  H01L2224/0401 ,  H01L2224/05571 ,  H01L2224/05572 ,  H01L2224/05605 ,  H01L2224/05609 ,  H01L2224/05611 ,  H01L2224/05616 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05684 ,  H01L2224/11009 ,  H01L2224/11464 ,  H01L2224/13018 ,  H01L2224/13019 ,  H01L2224/13084 ,  H01L2224/13562 ,  H01L2224/13564 ,  H01L2224/13655 ,  H01L2224/13684 ,  H01L2224/13686 ,  H01L2224/13805 ,  H01L2224/13809 ,  H01L2224/13811 ,  H01L2224/13844 ,  H01L2224/13847 ,  H01L2224/13855 ,  H01L2224/16148 ,  H01L2224/16238 ,  H01L2224/16265 ,  H01L2224/16268 ,  H01L2224/16501 ,  H01L2224/2919 ,  H01L2224/80357 ,  H01L2224/80895 ,  H01L2224/80896 ,  H01L2224/81026 ,  H01L2224/81065 ,  H01L2224/81099 ,  H01L2224/81193 ,  H01L2224/8181 ,  H01L2224/83026 ,  H01L2224/83815 ,  H01L2225/06513 ,  H01L2924/01013 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01031 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/19104 ,  H01L2924/3841 ,  H01L2924/013 ,  H01L2924/00014 ,  H01L2924/00012

摘要： A method of making an assembly can include juxtaposing a top surface of a first electrically conductive element at a first surface of a first substrate with a top surface of a second electrically conductive element at a major surface of a second substrate. One of: the top surface of the first conductive element can be recessed below the first surface, or the top surface of the second conductive element can be recessed below the major surface. Electrically conductive nanoparticles can be disposed between the top surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers. The method can also include elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles can cause metallurgical joints to form between the juxtaposed first and second conductive elements.

公开(公告)号：US12027487B2

公开(公告)日：2024-07-02

申请号：US18145310

申请日：2022-12-22

申请人： ADEIA SEMICONDUCTOR TECHNOLOGIES LLC

发明人： Cyprian Emeka Uzoh

IPC分类号： H01L23/538 ,  H01L23/00 ,  H01L25/00 ,  H01L25/065

CPC分类号： H01L24/81 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/17 ,  H01L24/80 ,  H01L24/83 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/03009 ,  H01L2224/0401 ,  H01L2224/05571 ,  H01L2224/05572 ,  H01L2224/05605 ,  H01L2224/05609 ,  H01L2224/05611 ,  H01L2224/05616 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05684 ,  H01L2224/11009 ,  H01L2224/11464 ,  H01L2224/13018 ,  H01L2224/13019 ,  H01L2224/13084 ,  H01L2224/13562 ,  H01L2224/13564 ,  H01L2224/13655 ,  H01L2224/13684 ,  H01L2224/13686 ,  H01L2224/13805 ,  H01L2224/13809 ,  H01L2224/13811 ,  H01L2224/13844 ,  H01L2224/13847 ,  H01L2224/13855 ,  H01L2224/16148 ,  H01L2224/16238 ,  H01L2224/16265 ,  H01L2224/16268 ,  H01L2224/16501 ,  H01L2224/2919 ,  H01L2224/80357 ,  H01L2224/80895 ,  H01L2224/80896 ,  H01L2224/81026 ,  H01L2224/81065 ,  H01L2224/81099 ,  H01L2224/81193 ,  H01L2224/8181 ,  H01L2224/83026 ,  H01L2224/83815 ,  H01L2225/06513 ,  H01L2924/01013 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01031 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/19104 ,  H01L2924/3841

摘要： A method of making an assembly can include juxtaposing a top surface of a first electrically conductive element at a first surface of a first substrate with a top surface of a second electrically conductive element at a major surface of a second substrate. One of: the top surface of the first conductive element can be recessed below the first surface, or the top surface of the second conductive element can be recessed below the major surface. Electrically conductive nanoparticles can be disposed between the top surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers. The method can also include elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles can cause metallurgical joints to form between the juxtaposed first and second conductive elements.

公开(公告)号：US20230335531A1

公开(公告)日：2023-10-19

申请号：US18145310

申请日：2022-12-22

申请人： ADEIA SEMICONDUCTOR TECHNOLOGIES LLC

发明人： Cyprian Emeka Uzoh

IPC分类号： H01L23/00 ,  H01L25/065 ,  H01L25/00

CPC分类号： H01L24/81 ,  H01L24/17 ,  H01L24/83 ,  H01L25/0657 ,  H01L25/50 ,  H01L24/11 ,  H01L24/80 ,  H01L24/13 ,  H01L24/16 ,  H01L2224/81026 ,  H01L2224/83026 ,  H01L2224/16501 ,  H01L2924/01029 ,  H01L2924/01013 ,  H01L2924/01074 ,  H01L2924/01047 ,  H01L2924/01028 ,  H01L2924/0105 ,  H01L2924/01082 ,  H01L2924/01031 ,  H01L2924/01049 ,  H01L2924/01079 ,  H01L2224/16148 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/19104 ,  H01L2225/06513 ,  H01L2224/80895 ,  H01L2224/13684 ,  H01L2224/13562 ,  H01L2224/13844 ,  H01L2224/05605 ,  H01L2224/8181 ,  H01L2224/0401 ,  H01L2224/81193 ,  H01L2224/05611 ,  H01L2224/81065 ,  H01L2224/13655 ,  H01L2224/03009 ,  H01L2224/05639 ,  H01L2224/13847 ,  H01L2224/80896 ,  H01L2224/16268 ,  H01L2224/81099 ,  H01L2224/16238 ,  H01L2224/05684 ,  H01L2224/13805 ,  H01L2224/11464 ,  H01L2224/13018 ,  H01L2224/13686 ,  H01L2224/05572 ,  H01L2224/13019 ,  H01L2224/05616 ,  H01L2224/13084 ,  H01L2224/13809 ,  H01L2224/2919 ,  H01L2224/13564 ,  H01L2224/05644 ,  H01L2224/13855 ,  H01L2224/05609 ,  H01L2224/13811 ,  H01L2224/11009 ,  H01L2224/05571 ,  H01L2224/80357 ,  H01L2224/83815 ,  H01L2924/014 ,  H01L2924/3841 ,  H01L2224/16265

摘要： A method of making an assembly can include juxtaposing a top surface of a first electrically conductive element at a first surface of a first substrate with a top surface of a second electrically conductive element at a major surface of a second substrate. One of: the top surface of the first conductive element can be recessed below the first surface, or the top surface of the second conductive element can be recessed below the major surface. Electrically conductive nanoparticles can be disposed between the top surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers. The method can also include elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles can cause metallurgical joints to form between the juxtaposed first and second conductive elements.

公开(公告)号：US11710718B2

公开(公告)日：2023-07-25

申请号：US17140519

申请日：2021-01-04

申请人： ADEIA SEMICONDUCTOR TECHNOLOGIES LLC

发明人： Cyprian Emeka Uzoh

IPC分类号： H01L23/00 ,  H01L25/065 ,  H01L25/00

CPC分类号： H01L24/81 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/17 ,  H01L24/80 ,  H01L24/83 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/03009 ,  H01L2224/0401 ,  H01L2224/05571 ,  H01L2224/05572 ,  H01L2224/05605 ,  H01L2224/05609 ,  H01L2224/05611 ,  H01L2224/05616 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05684 ,  H01L2224/11009 ,  H01L2224/11464 ,  H01L2224/13018 ,  H01L2224/13019 ,  H01L2224/13084 ,  H01L2224/13562 ,  H01L2224/13564 ,  H01L2224/13655 ,  H01L2224/13684 ,  H01L2224/13686 ,  H01L2224/13805 ,  H01L2224/13809 ,  H01L2224/13811 ,  H01L2224/13844 ,  H01L2224/13847 ,  H01L2224/13855 ,  H01L2224/16148 ,  H01L2224/16238 ,  H01L2224/16265 ,  H01L2224/16268 ,  H01L2224/16501 ,  H01L2224/2919 ,  H01L2224/80357 ,  H01L2224/80895 ,  H01L2224/80896 ,  H01L2224/81026 ,  H01L2224/81065 ,  H01L2224/8181 ,  H01L2224/81099 ,  H01L2224/81193 ,  H01L2224/83026 ,  H01L2224/83815 ,  H01L2225/06513 ,  H01L2924/014 ,  H01L2924/0105 ,  H01L2924/01013 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01031 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/19104 ,  H01L2924/3841 ,  H01L2224/13655 ,  H01L2924/013 ,  H01L2924/00014 ,  H01L2224/13684 ,  H01L2924/013 ,  H01L2924/00014 ,  H01L2224/05644 ,  H01L2924/00014 ,  H01L2224/05611 ,  H01L2924/00014 ,  H01L2224/05684 ,  H01L2924/00014 ,  H01L2224/05616 ,  H01L2924/00014 ,  H01L2224/05605 ,  H01L2924/00014 ,  H01L2224/05609 ,  H01L2924/00014 ,  H01L2224/05639 ,  H01L2924/00014 ,  H01L2224/13811 ,  H01L2924/013 ,  H01L2924/00014 ,  H01L2224/13809 ,  H01L2924/013 ,  H01L2924/00014 ,  H01L2224/13805 ,  H01L2924/013 ,  H01L2924/00014 ,  H01L2224/13847 ,  H01L2924/013 ,  H01L2924/00014 ,  H01L2224/13855 ,  H01L2924/013 ,  H01L2924/00014 ,  H01L2224/13844 ,  H01L2924/013 ,  H01L2924/00014 ,  H01L2224/05571 ,  H01L2924/00012 ,  H01L2224/05572 ,  H01L2924/00012

摘要： A method of making an assembly can include juxtaposing a top surface of a first electrically conductive element at a first surface of a first substrate with a top surface of a second electrically conductive element at a major surface of a second substrate. One of: the top surface of the first conductive element can be recessed below the first surface, or the top surface of the second conductive element can be recessed below the major surface. Electrically conductive nanoparticles can be disposed between the top surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers. The method can also include elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles can cause metallurgical joints to form between the juxtaposed first and second conductive elements.

公开(公告)号：US20240312954A1

公开(公告)日：2024-09-19

申请号：US18674629

申请日：2024-05-24

申请人： ADEIA SEMICONDUCTOR TECHNOLOGIES LLC

发明人： Cyprian Emeka Uzoh

IPC分类号： H01L23/00 ,  H01L25/00 ,  H01L25/065

CPC分类号： H01L24/81 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/17 ,  H01L24/80 ,  H01L24/83 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/03009 ,  H01L2224/0401 ,  H01L2224/05571 ,  H01L2224/05572 ,  H01L2224/05605 ,  H01L2224/05609 ,  H01L2224/05611 ,  H01L2224/05616 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05684 ,  H01L2224/11009 ,  H01L2224/11464 ,  H01L2224/13018 ,  H01L2224/13019 ,  H01L2224/13084 ,  H01L2224/13562 ,  H01L2224/13564 ,  H01L2224/13655 ,  H01L2224/13684 ,  H01L2224/13686 ,  H01L2224/13805 ,  H01L2224/13809 ,  H01L2224/13811 ,  H01L2224/13844 ,  H01L2224/13847 ,  H01L2224/13855 ,  H01L2224/16148 ,  H01L2224/16238 ,  H01L2224/16265 ,  H01L2224/16268 ,  H01L2224/16501 ,  H01L2224/2919 ,  H01L2224/80357 ,  H01L2224/80895 ,  H01L2224/80896 ,  H01L2224/81026 ,  H01L2224/81065 ,  H01L2224/81099 ,  H01L2224/81193 ,  H01L2224/8181 ,  H01L2224/83026 ,  H01L2224/83815 ,  H01L2225/06513 ,  H01L2924/01013 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01031 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/19104 ,  H01L2924/3841

摘要： A method of making an assembly can include juxtaposing a top surface of a first electrically conductive element at a first surface of a first substrate with a top surface of a second electrically conductive element at a major surface of a second substrate. One of: the top surface of the first conductive element can be recessed below the first surface, or the top surface of the second conductive element can be recessed below the major surface. Electrically conductive nanoparticles can be disposed between the top surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers. The method can also include elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles can cause metallurgical joints to form between the juxtaposed first and second conductive elements.

公开(公告)号：US11973056B2

公开(公告)日：2024-04-30

申请号：US18145330

申请日：2022-12-22

申请人： ADEIA SEMICONDUCTOR TECHNOLOGIES LLC

发明人： Cyprian Emeka Uzoh

IPC分类号： H01L23/485 ,  H01L23/00 ,  H01L25/00 ,  H01L25/065

CPC分类号： H01L24/81 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/17 ,  H01L24/80 ,  H01L24/83 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/03009 ,  H01L2224/0401 ,  H01L2224/05571 ,  H01L2224/05572 ,  H01L2224/05605 ,  H01L2224/05609 ,  H01L2224/05611 ,  H01L2224/05616 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05684 ,  H01L2224/11009 ,  H01L2224/11464 ,  H01L2224/13018 ,  H01L2224/13019 ,  H01L2224/13084 ,  H01L2224/13562 ,  H01L2224/13564 ,  H01L2224/13655 ,  H01L2224/13684 ,  H01L2224/13686 ,  H01L2224/13805 ,  H01L2224/13809 ,  H01L2224/13811 ,  H01L2224/13844 ,  H01L2224/13847 ,  H01L2224/13855 ,  H01L2224/16148 ,  H01L2224/16238 ,  H01L2224/16265 ,  H01L2224/16268 ,  H01L2224/16501 ,  H01L2224/2919 ,  H01L2224/80357 ,  H01L2224/80895 ,  H01L2224/80896 ,  H01L2224/81026 ,  H01L2224/81065 ,  H01L2224/81099 ,  H01L2224/81193 ,  H01L2224/8181 ,  H01L2224/83026 ,  H01L2224/83815 ,  H01L2225/06513 ,  H01L2924/01013 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01031 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/19104 ,  H01L2924/3841

摘要： A method of making an assembly can include juxtaposing a top surface of a first electrically conductive element at a first surface of a first substrate with a top surface of a second electrically conductive element at a major surface of a second substrate. One of: the top surface of the first conductive element can be recessed below the first surface, or the top surface of the second conductive element can be recessed below the major surface. Electrically conductive nanoparticles can be disposed between the top surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers. The method can also include elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles can cause metallurgical joints to form between the juxtaposed first and second conductive elements.

公开(公告)号：US20170047307A1

公开(公告)日：2017-02-16

申请号：US15336192

申请日：2016-10-27

申请人： Invensas Corporation

发明人： Cyprian Emeka Uzoh

IPC分类号： H01L23/00

CPC分类号： H01L24/81 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/17 ,  H01L24/80 ,  H01L24/83 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/03009 ,  H01L2224/0401 ,  H01L2224/05571 ,  H01L2224/05572 ,  H01L2224/05605 ,  H01L2224/05609 ,  H01L2224/05611 ,  H01L2224/05616 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05684 ,  H01L2224/11009 ,  H01L2224/11464 ,  H01L2224/13018 ,  H01L2224/13019 ,  H01L2224/13084 ,  H01L2224/13562 ,  H01L2224/13564 ,  H01L2224/13655 ,  H01L2224/13684 ,  H01L2224/13686 ,  H01L2224/13805 ,  H01L2224/13809 ,  H01L2224/13811 ,  H01L2224/13844 ,  H01L2224/13847 ,  H01L2224/13855 ,  H01L2224/16148 ,  H01L2224/16238 ,  H01L2224/16265 ,  H01L2224/16268 ,  H01L2224/16501 ,  H01L2224/2919 ,  H01L2224/80357 ,  H01L2224/80895 ,  H01L2224/80896 ,  H01L2224/81026 ,  H01L2224/81065 ,  H01L2224/81099 ,  H01L2224/81193 ,  H01L2224/8181 ,  H01L2224/83026 ,  H01L2224/83815 ,  H01L2225/06513 ,  H01L2924/01013 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01031 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/19104 ,  H01L2924/3841 ,  H01L2924/013 ,  H01L2924/00014 ,  H01L2924/00012

摘要： A method of making an assembly can include juxtaposing a top surface of a first electrically conductive element at a first surface of a first substrate with a top surface of a second electrically conductive element at a major surface of a second substrate. One of: the top surface of the first conductive element can be recessed below the first surface, or the top surface of the second conductive element can be recessed below the major surface. Electrically conductive nanoparticles can be disposed between the top surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers. The method can also include elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles can cause metallurgical joints to form between the juxtaposed first and second conductive elements.

摘要翻译： 制造组件的方法可以包括在第一衬底的第一表面处与第二衬底的主表面处的第二导电元件的顶表面并置第一导电元件的顶表面。 一个：第一导电元件的顶表面可以在第一表面下方凹入，或者第二导电元件的顶表面可以在主表面下方凹入。 导电纳米颗粒可以设置在第一和第二导电元件的顶表面之间。 导电纳米颗粒可以具有小于100纳米的长尺寸。 该方法还可以包括至少在并置的第一和第二导电元件的界面处升高温度至导电纳米颗粒可以在并置的第一和第二导电元件之间形成冶金接头的接合温度。