METHODS FOR MAKING SEMICONDUCTOR DEVICES
    2.
    发明公开

    公开(公告)号:US20230386888A1

    公开(公告)日:2023-11-30

    申请号:US18317093

    申请日:2023-05-15

    摘要: A method for making semiconductor devices includes: attaching a substrate with a plurality of electronic components onto a composite tape having an adhesive layer which is sensitive to ultraviolet (UV) irradiation and a UV-transparent base film, wherein the substrate is attached onto the adhesive layer of the composite tape; placing the substrate and the composite tape on a UV-transparent carrier, wherein the UV-transparent carrier is in contact with the UV-transparent base film of the composite tape; singulating the substrate into a plurality of semiconductor devices each having one of the plurality of electronic components; depositing a shielding material on the plurality of semiconductor devices to form a shielding layer on each of the plurality of semiconductor devices; irradiating a UV light to the composite tape through the UV-transparent carrier to reduce adhesivity of the adhesive layer; and detaching the plurality of semiconductor devices from the UV-transparent carrier.

    WAFER PROCESSING METHOD
    5.
    发明申请
    WAFER PROCESSING METHOD 有权
    WAFER加工方法

    公开(公告)号:US20160126138A1

    公开(公告)日:2016-05-05

    申请号:US14926308

    申请日:2015-10-29

    申请人: DISCO CORPORATION

    摘要: A wafer is formed with a plurality of division lines on a front surface of a single crystal substrate having an off angle and formed with devices in a plurality of regions partitioned by the division lines. The wafer is processed by setting a numerical aperture (NA) of a focusing lens for focusing a pulsed laser beam so that a value obtained by dividing the numerical aperture (NA) by a refractive index (N) of the single crystal substrate falls within the range from 0.05 to 0.2. The pulsed laser beam is applied along the division lines, with a focal point of the pulsed laser beam positioned at a desired position from a back surface of the single crystal substrate, so as to form shield tunnels each composed of a pore and a pore-shielding amorphous portion along the division lines from the focal point positioned inside the single crystal substrate.

    摘要翻译: 在具有偏角的单晶基板的前表面上形成有多条分割线,并且由分割线划分的多个区域中的器件形成晶片。 通过设置用于聚焦脉冲激光束的聚焦透镜的数值孔径(NA)来处理晶片,使得通过将数值孔径(NA)除以单晶衬底的折射率(N)而获得的值落入 范围从0.05到0.2。 脉冲激光束沿着分割线施加,其中脉冲激光束的焦点位于单晶衬底的背面的期望位置,从而形成每个由孔和孔隙组成的屏蔽通道, 沿着分隔线从位于单晶衬底内的焦点屏蔽非晶部分。