公开(公告)号：US20160126138A1

公开(公告)日：2016-05-05

申请号：US14926308

申请日：2015-10-29

申请人： DISCO CORPORATION

发明人： Hiroshi Morikazu ,  Motohiko Shimada

IPC分类号： H01L21/78 ,  H01L21/683 ,  H01L21/268

CPC分类号： H01L21/78 ,  H01L21/268 ,  H01L21/67092 ,  H01L21/6836 ,  H01L21/784 ,  H01L21/786 ,  H01L2221/68327 ,  H01L2221/68331 ,  H01L2221/6834 ,  H01S3/10

摘要： A wafer is formed with a plurality of division lines on a front surface of a single crystal substrate having an off angle and formed with devices in a plurality of regions partitioned by the division lines. The wafer is processed by setting a numerical aperture (NA) of a focusing lens for focusing a pulsed laser beam so that a value obtained by dividing the numerical aperture (NA) by a refractive index (N) of the single crystal substrate falls within the range from 0.05 to 0.2. The pulsed laser beam is applied along the division lines, with a focal point of the pulsed laser beam positioned at a desired position from a back surface of the single crystal substrate, so as to form shield tunnels each composed of a pore and a pore-shielding amorphous portion along the division lines from the focal point positioned inside the single crystal substrate.

摘要翻译： 在具有偏角的单晶基板的前表面上形成有多条分割线，并且由分割线划分的多个区域中的器件形成晶片。 通过设置用于聚焦脉冲激光束的聚焦透镜的数值孔径（NA）来处理晶片，使得通过将数值孔径（NA）除以单晶衬底的折射率（N）而获得的值落入 范围从0.05到0.2。 脉冲激光束沿着分割线施加，其中脉冲激光束的焦点位于单晶衬底的背面的期望位置，从而形成每个由孔和孔隙组成的屏蔽通道， 沿着分隔线从位于单晶衬底内的焦点屏蔽非晶部分。

公开(公告)号：US09536786B2

公开(公告)日：2017-01-03

申请号：US14926308

申请日：2015-10-29

申请人： DISCO CORPORATION

发明人： Hiroshi Morikazu ,  Motohiko Shimada

IPC分类号： H01L21/78 ,  H01L21/268 ,  H01L21/683 ,  H01L21/786 ,  H01L21/784 ,  H01L21/67 ,  H01S3/10

CPC分类号： H01L21/78 ,  H01L21/268 ,  H01L21/67092 ,  H01L21/6836 ,  H01L21/784 ,  H01L21/786 ,  H01L2221/68327 ,  H01L2221/68331 ,  H01L2221/6834 ,  H01S3/10

摘要： A wafer is formed with a plurality of division lines on a front surface of a single crystal substrate having an off angle and formed with devices in a plurality of regions partitioned by the division lines. The wafer is processed by setting a numerical aperture (NA) of a focusing lens for focusing a pulsed laser beam so that a value obtained by dividing the numerical aperture (NA) by a refractive index (N) of the single crystal substrate falls within the range from 0.05 to 0.2. The pulsed laser beam is applied along the division lines, with a focal point of the pulsed laser beam positioned at a desired position from a back surface of the single crystal substrate, so as to form shield tunnels each composed of a pore and a pore-shielding amorphous portion along the division lines from the focal point positioned inside the single crystal substrate.

摘要翻译： 在具有偏角的单晶基板的前表面上形成有多条分割线，并且由分割线划分的多个区域中的器件形成晶片。 通过设置用于聚焦脉冲激光束的聚焦透镜的数值孔径（NA）来处理晶片，使得通过将数值孔径（NA）除以单晶衬底的折射率（N）而获得的值落入 范围从0.05到0.2。 脉冲激光束沿着分割线施加，其中脉冲激光束的焦点位于单晶衬底的背面的期望位置，从而形成每个由孔和孔隙组成的屏蔽通道， 沿着分隔线从位于单晶衬底内的焦点屏蔽非晶部分。