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    Method and apparatus for pressure swing adsorption
    2.
    发明授权
    Method and apparatus for pressure swing adsorption 有权
    用于变压吸附的方法和装置

    公开(公告)号：US07824472B2

    公开(公告)日：2010-11-02

    申请号：US12084622

    申请日：2006-02-23

    申请人： Tatsushi Urakami

    发明人： Tatsushi Urakami

    IPC分类号： B01D59/26

    CPC分类号： B01D53/053 ,  B01D53/0423 ,  B01D53/0446 ,  B01D2253/102 ,  B01D2253/108 ,  B01D2256/10 ,  B01D2256/12 ,  B01D2256/18 ,  B01D2257/11 ,  B01D2258/0216 ,  B01D2259/40054 ,  B01D2259/40079 ,  B01D2259/40081 ,  B01D2259/402 ,  B01D2259/41 ,  C01B23/0063 ,  C01B23/0068 ,  C01B2210/0035 ,  C01B2210/0037 ,  C01B2210/0042 ,  C01B2210/0045 ,  C01B2210/0046 ,  C01B2210/0053 ,  C01B2210/0082

    摘要： In order to provide a new PSA method which can concentrate simultaneously a strong adsorbate such as xenon and a weak adsorbate such as nitrogen in a high concentration with a high recovery percentage when highly valuable gas such as xenon and krypton contained in the exhaust gas from a semiconductor manufacturing equipment, etc. is recovered in a high concentration with a high recovery percentage, the present invention provides a new PSA method in which the method uses a separation apparatus comprising a lower column and a upper column which are filled with an adsorbent, a material gas storage tank for storing the material gas to be introduced into the lower column, a strong adsorbate storage tank for storing a main component which is easily adsorbed by the adsorbent, and a compressor, and the strong adsorbate which is easily adsorbed by the adsorbent and the weak adsorbate which is not readily adsorbed by the adsorbent are recovered, wherein the method comprises an (a) adsorption step, (b) rinse step, (c) low column depressurization step, (d) upper column depressurization step, and (e) purge step sequentially repeated based on a predetermined sequence.

    摘要翻译： 为了提供一种新的PSA方法，其可以同时浓缩强吸附物质，如氙气和弱吸附物质如氮气，高回收率的高浓度，当废气中含有诸如氙气和氪气的高价值气体时， 半导体制造装置等以高回收率高回收率，本发明提供了一种新的PSA方法，其中该方法使用包含填充有吸附剂的下塔和上塔的分离装置， 用于储存待引入下塔的原料气体的原料气体储罐，用于储存容易被吸附剂吸附的主要成分的强吸附物储存罐和压缩机，以及容易被吸附剂吸附的强吸附物质 并且回收不容易被吸附剂吸附的弱吸附物质，其中该方法包括（a）吸附剂 p，（b）冲洗步骤，（c）低塔减压步骤，（d）上塔减压步骤，和（e）基于预定顺序顺序重复的吹扫步骤。

    Method and Apparatus for Pressure Swing Adsorption
    3.
    发明申请
    Method and Apparatus for Pressure Swing Adsorption 有权
    压力摆动吸附方法和装置

    公开(公告)号：US20090107331A1

    公开(公告)日：2009-04-30

    申请号：US12084622

    申请日：2006-02-23

    申请人： Tatsushi Urakami

    发明人： Tatsushi Urakami

    IPC分类号： B01D53/047

    CPC分类号： B01D53/053 ,  B01D53/0423 ,  B01D53/0446 ,  B01D2253/102 ,  B01D2253/108 ,  B01D2256/10 ,  B01D2256/12 ,  B01D2256/18 ,  B01D2257/11 ,  B01D2258/0216 ,  B01D2259/40054 ,  B01D2259/40079 ,  B01D2259/40081 ,  B01D2259/402 ,  B01D2259/41 ,  C01B23/0063 ,  C01B23/0068 ,  C01B2210/0035 ,  C01B2210/0037 ,  C01B2210/0042 ,  C01B2210/0045 ,  C01B2210/0046 ,  C01B2210/0053 ,  C01B2210/0082

    摘要： In order to provide a new PSA method which can concentrate simultaneously a strong adsorbate such as xenon and a weak adsorbate such as nitrogen in a high concentration with a high recovery percentage when highly valuable gas such as xenon and krypton contained in the exhaust gas from a semiconductor manufacturing equipment, etc. is recovered in a high concentration with a high recovery percentage, the present invention provides a new PSA method in which the method uses a separation apparatus comprising a lower column and a upper column which are filled with an adsorbent, a material gas storage tank for storing the material gas to be introduced into the lower column, a strong adsorbate storage tank for storing a main component which is easily adsorbed by the adsorbent, and a compressor, and the strong adsorbate which is easily adsorbed by the adsorbent and the weak adsorbate which is not readily adsorbed by the adsorbent are recovered, wherein the method comprises an (a) adsorption step, (b) rinse step, (c) low column depressurization step, (d) upper column depressurization step, and (e) purge step sequentially repeated based on a predetermined sequence.

    摘要翻译： 为了提供一种新的PSA方法，其可以同时浓缩强吸附物质，如氙气和弱吸附物质如氮气，高回收率的高浓度，当废气中含有诸如氙气和氪气的高价值气体时， 半导体制造装置等以高回收率高回收率，本发明提供了一种新的PSA方法，其中该方法使用包含填充有吸附剂的下塔和上塔的分离装置， 用于储存待引入下塔的原料气体的原料气体储罐，用于储存容易被吸附剂吸附的主要成分的强吸附物储存容器和压缩机，以及容易被吸附剂吸附的强吸附物质 并且回收不容易被吸附剂吸附的弱吸附物质，其中所述方法包括（a）吸附剂 p，（b）冲洗步骤，（c）低塔减压步骤，（d）上塔减压步骤，和（e）基于预定顺序顺序重复的吹扫步骤。

    PROCESS AND SYSTEM FOR PURIFYING GASES
    5.
    发明申请
    PROCESS AND SYSTEM FOR PURIFYING GASES 有权
    净化气体的过程和系统

    公开(公告)号：US20040224418A1

    公开(公告)日：2004-11-11

    申请号：US10175293

    申请日：2002-06-20

    发明人： Charles Edward Terbot ,  Andrew Christopher Mackie

    IPC分类号： G01N033/00

    CPC分类号： C01B21/0483 ,  B01D53/8696 ,  B01J8/0285 ,  B01J19/0013 ,  B01J19/002 ,  B01J2219/00198 ,  B01J2219/00202 ,  B01J2219/0022 ,  B01J2219/00231 ,  B01J2219/00261 ,  C01B2210/0042 ,  C01B2210/0045 ,  C01B2210/0053 ,  Y10T436/12

    摘要： This invention is directed to a system and a process for protecting a gas purification system from damage comprising passing a stream of impure gas through a catalyst bed and measuring the temperature difference before and after the catalyzed bed reaction through a data analyzer to determine the impurity of the gas prior to controlling the feed of impure gas into or out of a reactor for producing a purified gas. In a preferred embodiment, the catalytic beds may be in parallel form, and the plurality of temperature measurements before and after the catalytic beds is considered by a data analyzer for controlling the impure gas for feeding into the purification reactor.

    摘要翻译： 本发明涉及一种用于保护气体净化系统免受损坏的系统和方法，包括使不纯气体流通过催化剂床并通过数据分析仪测量催化床反应之前和之后的温差，以确定 在控制不纯气体进入或流出反应器以产生净化气体之前的气体。 在优选的实施方案中，催化床可以是平行形式，并且数据分析器考虑催化床前后的多个温度测量值，用于控制不纯气体供入净化反应器。

    Method for measuring the concentration of nitrogen in argon by means of ion mobility spectrometry
    6.
    发明申请
    Method for measuring the concentration of nitrogen in argon by means of ion mobility spectrometry 失效
    通过离子迁移谱法测量氩气中氮浓度的方法

    公开(公告)号：US20030201388A1

    公开(公告)日：2003-10-30

    申请号：US10439888

    申请日：2003-05-16

    申请人： SAES GETTERS S.p.A.

    发明人： Luca Pusterla ,  Robert Stimac ,  Antonio Bonucci ,  Marco Succi

    IPC分类号： H01J049/40

    CPC分类号： G01N27/622 ,  C01B23/0084 ,  C01B2210/0034 ,  C01B2210/0042 ,  C01B2210/0046 ,  G01N33/0036

    摘要： A method for carrying out nitrogen analysis by ionization mobility spectroscopy, at concentrations of few parts per billion (ppb) in argon is described. The method involves the addition of hydrogen in concentration of at least 5 ppb and lower than 100 parts per million (ppm) to the argon to be analyzed; the hydrogen addition step is possibly preceded by a purification operation of the argon flow, so as to reduce the total concentration of impurities other than nitrogen under 1 ppb.

    摘要翻译： 描述了在氩气中以几十亿分之几（ppb）的浓度通过电离迁移谱进行氮分析的方法。 该方法包括向待分析的氩气中加入浓度至少为5ppb且低于100ppm（ppm）的氢气; 在氢气添加步骤之前可以进行氩气流的净化操作，从而降低氮气以外的杂质的总浓度在1ppb以下。