发明申请
- 专利标题： Gas Purifier
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申请号： US15614409申请日： 2017-06-05
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公开(公告)号： US20170333841A1公开(公告)日： 2017-11-23
- 发明人: Abneesh Srivastava , Thomas Richard Gaffney , Joshua T. Cook , Peter K. Shorgen , Daimhin Paul Murphy , Stenio da Costa Pereira
- 申请人： Entegris, Inc.
- 主分类号： B01D53/86
- IPC分类号： B01D53/86 ; B01D53/28 ; B01D53/75 ; C01B3/56 ; C01B21/04 ; C01B23/00 ; C01B3/58 ; B01J29/14 ; B01D53/26
摘要：
The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve.
公开/授权文献
- US10245554B2 Gas purifier 公开/授权日：2019-04-02
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