Method and device for safely generating pure ammonia for GC/CI-MS/MS and ICP-MS applications

    公开(公告)号:US12098078B1

    公开(公告)日:2024-09-24

    申请号:US18408250

    申请日:2024-01-09

    CPC classification number: C01C1/026 C01C1/024 G01N30/7206 G01N2030/025

    Abstract: A method of supplying ammonia to a gas chromatography-chemical ionization tandem mass spectrometry (GC/CI-MS/MS) includes the steps of: providing ammonium carbonate and diethanolamine in a reaction vessel; heating the reaction vessel to a temperature of 50-60° C. to decompose the ammonium carbonate to form ammonia, carbon dioxide and water; absorbing the carbon dioxide and water by the diethanolamine to form diethanolamine carbonate; and supplying the ammonia to the GC/CI-MS/MS. Another method of supplying ammonia to a gas chromatography-chemical ionization tandem mass spectrometry (GC/CI-MS/MS) includes the steps of: providing ammonium carbonate and a mixture of monoethanolamine and diethanolamine in a reaction vessel; reacting the ammonium carbonate with the monoethanolamine to form ammonia and monoethanolamine carbonate; and supplying the ammonia to the GC/CI-MS/MS.

    System and Method for Ammonia Distillation
    2.
    发明申请
    System and Method for Ammonia Distillation 有权
    氨蒸馏系统与方法

    公开(公告)号:US20150284256A1

    公开(公告)日:2015-10-08

    申请号:US14246513

    申请日:2014-04-07

    CPC classification number: C01C1/10 C01C1/022 C01C1/024

    Abstract: A system for ammonia distillation may include a condenser to condense ammonia vapor into liquid anhydrous ammonia, a flush tank to receive a flushed portion of the liquid anhydrous ammonia, a collection tank to receive a collected portion of the liquid anhydrous ammonia, and a corrosion inhibitor dispenser to transfer a corrosion inhibitor to the collected portion of the liquid anhydrous ammonia to form corrosion-inhibiting liquid anhydrous ammonia.

    Abstract translation: 用于氨蒸馏的系统可以包括用于将氨蒸汽冷凝成液体无水氨的冷凝器,用于接收液体无水氨的冲洗部分的冲洗槽,用于接收液体无水氨的收集部分的收集罐,以及腐蚀抑制剂 分配器将腐蚀抑制剂转移到液体无水氨的收集部分以形成腐蚀抑制液体无水氨。

    Method for producing electronic grade aqueous ammonium fluoride solution
    3.
    发明申请
    Method for producing electronic grade aqueous ammonium fluoride solution 审中-公开
    电子级氟化铵水溶液的生产方法

    公开(公告)号:US20120145949A1

    公开(公告)日:2012-06-14

    申请号:US12973434

    申请日:2010-12-20

    CPC classification number: C01C1/162 C01C1/024 C01P2004/62 C01P2006/80

    Abstract: The present invention relates to a method for producing of electronic grade aqueous ammonium fluoride solution. The industrial grade liquid ammonia is used as the raw material, when it is heated, the ammonia gas will be released. The organic gas impurities in the ammonia gas are removed by activated charcoal, and the oxygen is removed by deoxidizer, and then the high-purity ammonia gas is gotten. The high-purity hydrofluoric acid absorbs and reacts with the high-purity ammonia gas to obtain the electronic grade aqueous ammonium fluoride solution. The product has high-purity and stable quality, and it can be used in producing of electronic products directly. The method for producing of electronic grade ammonium aqueous fluoride solution provided by the present invention is suitable for continuous production on a large scale because of its simple operation.

    Abstract translation: 本发明涉及电子级氟化铵水溶液的制造方法。 工业级液氨用作原料,加热时氨气将被释放。 通过活性炭除去氨气中的有机气体杂质,通过脱氧剂除去氧气,然后得到高纯度氨气。 高纯度氢氟酸吸收并与高纯氨气反应,得到电子级氟化铵水溶液。 该产品具有高纯度,质量稳定,可直接用于电子产品的生产。 本发明提供的电子级氟化铵水溶液的制造方法由于操作简单,适合大规模连续生产。

    Purification and transfilling of ammonia
    5.
    发明授权
    Purification and transfilling of ammonia 有权
    氨的净化和转运

    公开(公告)号:US07297181B2

    公开(公告)日:2007-11-20

    申请号:US11009510

    申请日:2004-12-13

    CPC classification number: B01D53/261 B01D53/02 C01C1/024 Y10S203/17

    Abstract: An ammonia purification system includes a hydrocarbon removal station that removes hydrocarbons from gaseous ammonia via adsorption, a moisture removal station that removes water from gaseous ammonia via adsorption, and a distillation station including a distillation column connected with a condenser to facilitate removal of impurities from ammonia and condensation of gaseous ammonia to form a purified liquid ammonia product. The system further includes a storage tank to receive purified ammonia, a remote station connected with the storage tank, and a vaporizer connected with the storage tank. The vaporizer is configured to receive and vaporize liquid ammonia from the storage tank and deliver gaseous ammonia back to the storage tank so as to facilitate pumping of the ammonia to the remote station based upon a vapor pressure established within the storage tank.

    Abstract translation: 氨净化系统包括通过吸附从气态氨除去烃的除烃站,通过吸附从气态氨除去水的除湿站,以及包括与冷凝器连接的蒸馏塔以便于从氨除去杂质的蒸馏站 和气态氨的缩合形成纯化的液氨产物。 该系统还包括用于接收净化氨的储罐,与储罐连接的远程站以及与储存罐连接的蒸发器。 蒸发器被配置为从储罐接收和蒸发液氨,并将气态氨返回到储罐,以便于基于在储罐内建立的蒸汽压力将氨泵送到远程站。

    On-site generation, purification, and distribution of ultra-pure anhydrous ammonia
    7.
    发明申请
    On-site generation, purification, and distribution of ultra-pure anhydrous ammonia 失效
    超纯无水氨的现场生成,净化和分配

    公开(公告)号:US20050260108A1

    公开(公告)日:2005-11-24

    申请号:US11130505

    申请日:2005-05-17

    CPC classification number: C01C1/086 B01D53/79 C01C1/024 C01P2006/80

    Abstract: A system and method for generating, purifying, and using ultra-pure ammonia on-site, such as at a semiconductor manufacturing facility. The system includes an ammonia generation system configured to generate ammonia including carbon dioxide, water, and other impurities. A purification system is provided with the generation system in the manufacturing facility and is linked to the output of the generation system. The purification system processes the effluent from the ammonia generation system to remove substantially all of the carbon dioxide, water, and other impurities to produce an outlet stream of ultra-pure ammonia. The system further includes a point of use system provided at the same manufacturing facility to utilize the outlet stream of ultra-pure ammonia.

    Abstract translation: 用于生产,净化和使用现场超纯氨的系统和方法,例如在半导体制造设备。 该系统包括氨生成系统,其被配置为产生包括二氧化碳,水和其它杂质的氨。 净化系统在制造设施中具有发电系统,并与发电系统的输出相连接。 净化系统处理来自氨生成系统的流出物以除去基本上所有的二氧化碳,水和其它杂质,以产生超纯氨的出口流。 该系统还包括设置在同一制造设施处以利用超纯氨出口流的使用点系统。

    Method for the purification of corrosive gases
    9.
    发明申请
    Method for the purification of corrosive gases 有权
    腐蚀性气体净化方法

    公开(公告)号:US20040089152A1

    公开(公告)日:2004-05-13

    申请号:US10472846

    申请日:2003-09-26

    Abstract: The present invention relates to a novel process for the preparation of high-purity chemicals with an extremely low particle count, such as ammonia gas, hydrogen fluoride and hydrogen chloride, which are also used as aqueous solutions in semiconductor technology the corrosive gas is enriched with an absorbent which is miscible with the gas and in which impurities present in the gas are soluble, and the gas is subsequently subjected to membrane filtration.

    Abstract translation: 本发明涉及一种用于制备具有极低的颗粒数的高纯度化学品的新方法,例如氨气,氟化氢和氯化氢,它们也用作半导体技术中的水溶液,腐蚀性气体富含 与气体混溶并且气体中存在的杂质可溶的吸收剂,随后对气体进行膜过滤。

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