公开(公告)号：US20240191037A1

公开(公告)日：2024-06-13

申请号：US18387800

申请日：2023-11-07

申请人： Lucas Marin ,  Alexander Lukacs, III ,  Michael Leimas

发明人： Lucas Marin ,  Alexander Lukacs, III ,  Michael Leimas

IPC分类号： C08G77/62 ,  B01D17/02 ,  C01B21/087

CPC分类号： C08G77/62 ,  B01D17/0217 ,  C01B21/087

摘要： A rapid, centrifugal method to prepare polysilazanes and separate them from their ammonium halide-anhydrous, liquid ammonia by-product is coupled with several, alternative methods to recover ammonium halide and anhydrous, liquid ammonia from the by-product. Some reactive modes of by-product recovery lead to sodium chloride as the sole waste product of, optionally, to ammonia borane as a secondary product of the process.

公开(公告)号：US20220119947A1

公开(公告)日：2022-04-21

申请号：US17567142

申请日：2022-01-02

申请人： DOW SILICONES CORPORATION

发明人： Byung K. HWANG ,  Brian D. Rekken ,  Michael D. Telgenhoff ,  Xiaobing Zhou

IPC分类号： C23C16/455 ,  C01B21/068 ,  C01B33/08 ,  C01B33/12 ,  C23C16/34 ,  C23C16/40 ,  C23C16/50 ,  C01B21/087 ,  C01B33/107

摘要： Disclosed herein are chlorodisazanes; silicon-heteroatom compounds synthesized therefrom; devices containing the silicon-heteroatom compounds; methods of making the chlorodisilazanes, the silicon-heteroatom compounds, and the devices; and uses of the chlorodisilazanes, silicon-heteroatom compounds, and devices.

公开(公告)号：US20210395890A1

公开(公告)日：2021-12-23

申请号：US17409229

申请日：2021-08-23

申请人： L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude

发明人： Jean-Marc GIRARD ,  Peng ZHANG ,  Antonio SANCHEZ ,  Manish KHANDELWAL ,  Gennadiy ITOV ,  Reno PESARESI ,  Grigory NIKIFOROV ,  David ORBAN

IPC分类号： C23C16/455 ,  H01L21/02 ,  C01B21/088 ,  C23C16/515 ,  C23C16/40 ,  C23C16/34 ,  C23C16/30 ,  C01B21/087 ,  C07F7/02

摘要： Methods for producing halosilazane comprise halogenating a hydrosilazane with a halogenating agent to produce the halosilazane, the halosilazane having a formula (SiHa(NR2)bXc)(n+2)Nn(SiH(2−d)Xd)(n−1), wherein each a, b, c is independently 0 to 3; a+b+c=3; d is 0 to 2 and n≥1; wherein X is selected from a halogen atom selected from F, Cl, Br or I; each R is selected from H, a C1-C6 linear or branched, saturated or unsaturated hydrocarbyl group, or a silyl group [SiR′3]; further wherein each R′ of the [SiR′3] is independently selected from H, a halogen atom selected from F, Cl, Br or I, a C1-C4 saturated or unsaturated hydrocarbyl group, a C1-C4 saturated or unsaturated alkoxy group, or an amino group [—NR1R2] with each R1 and R2 being further selected from H or a C1-C6 linear or branched, saturated or unsaturated hydrocarbyl group, provided that when c=0, d≠0; or d=0, c≠0.

公开(公告)号：US10985013B2

公开(公告)日：2021-04-20

申请号：US16430882

申请日：2019-06-04

申请人： Versum Materials US, LLC

发明人： Jianheng Li ,  Robert G. Ridgeway ,  Xinjian Lei ,  Raymond N. Vrtis ,  Bing Han ,  Madhukar B. Rao

IPC分类号： H01L21/02 ,  C23C16/34 ,  C23C16/40 ,  C01B21/087 ,  C07F7/10 ,  H01L27/11517 ,  H01L27/11556 ,  H01L27/11563 ,  H01L27/11582

摘要： Described herein is an apparatus comprising a plurality of silicon-containing layers wherein the silicon-containing layers are selected from a silicon oxide and a silicon nitride layer or film. Also described herein are methods for forming the apparatus to be used, for example, as 3D vertical NAND flash memory stacks. In one particular aspect or the apparatus, the silicon oxide layer comprises slightly compressive stress and good thermal stability. In this or other aspects of the apparatus, the silicon nitride layer comprises slightly tensile stress and less than 300 MPa stress change after up to about 800° C. thermal treatment. In this or other aspects of the apparatus, the silicon nitride layer etches much faster than the silicon oxide layer in hot H3PO4, showing good etch selectivity.

公开(公告)号：US10403494B2

公开(公告)日：2019-09-03

申请号：US15692544

申请日：2017-08-31

申请人： L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude

发明人： Jean-Marc Girard ,  Peng Zhang ,  Antonio Sanchez ,  Manish Khandelwal ,  Gennadiy Itov ,  Reno Pesaresi

IPC分类号： H01L21/02 ,  C07F7/02 ,  C01B21/087 ,  C01B21/088 ,  C23C16/30 ,  C23C16/34 ,  C23C16/40 ,  C23C16/455 ,  C23C16/515

摘要： Mono-substituted TSA precursor Si-containing film forming compositions are disclosed. The precursors have the formula: (SiH3)2N—SiH2—X, wherein X is selected from a halogen atom; an isocyanato group; an amino group; an N-containing C4-C10 saturated or unsaturated heterocycle; or an alkoxy group. Methods for forming the Si-containing film using the disclosed mono-substituted TSA precursor are also disclosed.

公开(公告)号：US20180029914A1

公开(公告)日：2018-02-01

申请号：US15732189

申请日：2017-09-29

申请人： Dennis A. Burke

发明人： Dennis A. Burke

IPC分类号： C02F9/00 ,  C02F3/12 ,  C01B21/087 ,  C01C1/28 ,  C02F1/24 ,  C02F3/30 ,  C02F3/34 ,  C02F1/20 ,  C02F101/16 ,  C02F1/52 ,  C02F1/66 ,  C02F101/10

CPC分类号： C02F9/00 ,  C01B21/087 ,  C01C1/28 ,  C02F1/20 ,  C02F1/24 ,  C02F1/5236 ,  C02F1/66 ,  C02F3/1215 ,  C02F3/308 ,  C02F3/34 ,  C02F3/341 ,  C02F2101/105 ,  C02F2101/16 ,  C02F2303/22 ,  Y02P20/129 ,  Y02W10/15 ,  Y02W10/37

摘要： An economical method for recovering phosphate or phosphate and nitrogen from liquid streams. A liquid containing phosphate is introduced into a culture of autotrophic microorganisms in the presence of natural or artificial light, thereby producing a liquid effluent with elevated pH and reduced alkalinity. The alkalinity is reduced through the consumption of bicarbonate/carbonate by the autotrophic microorganisms. The effluent is then chemically treated with low-cost chemicals to provide Ca++ or Mg++ ions necessary to form a phosphate precipitate such as calcium phosphate or magnesium-ammonium-phosphate (MAP). The autotrophic microorganisms can be cultivated in ponds, lagoons, or photobioreactors. The pH of the culture is adjustable within a preferred range of 7.5 to 10.5 by adjusting the photobioreactor operation. The process includes an economical flotation separator for solid, liquid, gas separation and a means of concentrating ammonia nitrogen that may also be removed during the process of phosphate reclamation.

公开(公告)号：US09656869B2

公开(公告)日：2017-05-23

申请号：US14131126

申请日：2012-05-15

申请人： Carl-Friedrich Hoppe ,  Hartwig Rauleder ,  Ingrid Lunt-Rieg ,  Christian Goetz

发明人： Carl-Friedrich Hoppe ,  Hartwig Rauleder ,  Ingrid Lunt-Rieg ,  Christian Goetz

IPC分类号： C01B21/087 ,  C01C1/16 ,  C01B33/04 ,  B01J19/24

CPC分类号： C01B21/087 ,  B01J19/24 ,  C01B33/043 ,  C01C1/164

摘要： The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant in which such a process can be carried out with advantage.

公开(公告)号：US20160379817A1

公开(公告)日：2016-12-29

申请号：US15039440

申请日：2014-12-08

申请人： AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.I.

发明人： Toshiya OKAMURA ,  Takashi KANDA ,  Issei SAKURAI ,  Bertram Bernd BARNICKEL ,  Hiroyuki AOKI

IPC分类号： H01L21/02 ,  C09D1/00 ,  C01B21/087

CPC分类号： H01L21/02222 ,  C01B21/087 ,  C08G77/62 ,  C09D1/00 ,  H01L21/02164 ,  H01L21/02282

摘要： [Problem] To provide a perhydropolysilazane making it possible to form a siliceous film with minimal defects, and a curing composition comprising the perhydropolysilazane.[Means for Solution] The present invention provides a perhydropolysilazane having a weight-average molecular weight of 5,000 to 17,000, characterized in that when 1H-NMR of a 17% by weight solution of said perhydropolysilazane dissolved in xylol is measured, the ratio of the amount of SiH1,2 based on the aromatic ring hydrogen content of the xylol is 0.235 or less and the ratio of the amount of NH based on the aromatic ring hydrogen content of the xylol is 0.055 or less, and a curing composition comprising the perhydropolysilazane. The present invention also provides a method for forming a siliceous film, comprising coating the curing composition on a substrate and heating.

摘要翻译： [解决方案]本发明提供重均分子量为5,000〜17,000的全氢聚硅氮烷，其特征在于，测定17重量％的所述全氢聚硅氮烷溶解在二甲苯中的溶液的1H-NMR， 基于二甲苯的芳环氢含量的SiH1.2的量为0.235或更小，并且基于二羟甲基的芳环氢含量的NH的量的比例为0.055或更小，以及包含全氢聚硅氮烷的固化组合物。 本发明还提供一种形成硅质膜的方法，其包括将固化组合物涂覆在基材上并加热。

公开(公告)号：US09446958B2

公开(公告)日：2016-09-20

申请号：US14065088

申请日：2013-10-28

申请人： L'Air Liquide Société Anonyme pour l'Etude et L'Exploitation des Procédés Georges Claude

发明人： Cole J. Ritter, III ,  Matthew Damien Stephens

IPC分类号： C01B33/00 ,  C07F7/02 ,  C01B33/04 ,  C01B21/087

CPC分类号： C01B33/04 ,  C01B21/087

摘要： The present invention is directed to a condensed phase batch process for synthesis of trisilylamine (TSA). An improved synthesis process that incorporates a solvent to help promote a condensed-phase reaction between ammonia gas (or liquid) and liquified monochlorosilane (MCS) in good yields is described. This process facilitates the removal of the byproduct waste with little to no reactor down time, substantial reduction of down-stream solids contamination and high-purity product from first-pass distillation.

摘要翻译： 本发明涉及用于合成三甲胺（TSA）的冷凝相间歇方法。 描述了一种改进的合成方法，其包含溶剂以有助于以良好的产率促进氨气（或液体）和液化的一氯硅烷（MCS）之间的冷凝相反应。 该方法有助于在几乎没有反应器停机时间内除去副产物废物，大大减少下游固体污染物和来自一次蒸馏的高纯度产物。

公开(公告)号：US09284198B2

公开(公告)日：2016-03-15

申请号：US14284983

申请日：2014-05-22

申请人： AIR PRODUCTS AND CHEMICALS, INC.

发明人： Rajiv Krishan Agarwal ,  Sai-Hong Andrew Lo ,  Howard Paul Withers, Jr. ,  Joseph T. Sluzevich ,  James Joseph Hart

IPC分类号： C07F7/02 ,  C01C1/16 ,  C01B21/087

CPC分类号： C01B21/087 ,  B01J8/0015 ,  B01J8/02 ,  B01J8/10 ,  B01J8/24 ,  B01J2208/00761 ,  B01J2208/00823 ,  C01C1/164

摘要： The method described herein provides a method for preparing trisilylamine. In one aspect, the method comprises: providing a reaction mixture of trisilylamine and monochlorosilane into a reactor wherein the reaction mixture is at a temperature and pressure sufficient to provide trisilylamine in a liquid phase wherein the reaction mixture is substantially free of an added solvent; contacting the reaction mixture with ammonia to provide a crude mixture comprising trisilylamine and an ammonium chloride solid wherein monochlorosilane is in stoichiometric excess in relation to ammonia; purifiying the crude mixture to provide trisilylamine wherein the trisilyamine is produced at purity level of 90% or greater; and optionally removing the ammonium chloride solid from the reactor.