Manufacturing Apparatus and Manufacturing Method of Lighting Device
    2.
    发明申请
    Manufacturing Apparatus and Manufacturing Method of Lighting Device 有权
    照明装置制造装置及制造方法

    公开(公告)号:US20100236691A1

    公开(公告)日:2010-09-23

    申请号:US12721110

    申请日:2010-03-10

    申请人: Shunpei Yamazaki

    发明人: Shunpei Yamazaki

    IPC分类号: B05D5/12 B05C11/00

    摘要: A manufacturing apparatus of a lighting device, including a vacuum chamber, an exhaust system by which the vacuum chamber is set to a reduced-pressure state, and a transfer chamber from which a substrate is transferred to the vacuum chamber is provided. The vacuum chamber of the manufacturing apparatus includes a plurality of deposition chambers in which a first electrode, a first light-emitting unit including at least a light-emitting layer, an intermediate layer, a second light-emitting unit including at least a light-emitting layer, a second electrode, a sealing film are formed, and a substrate transfer means by which the substrate is sequentially transferred to the deposition chambers.

    摘要翻译: 提供了一种照明装置的制造装置,其包括真空室,将真空室设置为减压状态的排气系统和将基板从该传送室传送到真空室。 制造装置的真空室包括多个沉积室,其中第一电极,至少包括发光层的第一发光单元,中间层,至少包括发光层的第二发光单元, 形成发光层,第二电极,密封膜,以及将基板依次转印到沉积室的基板转印装置。