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    Method for analyzing electrolytic copper plating solution
    1.
    发明授权
    Method for analyzing electrolytic copper plating solution 有权
    电解镀铜液分析方法

    公开(公告)号：US08440555B2

    公开(公告)日：2013-05-14

    申请号：US12903090

    申请日：2010-10-12

    申请人： Toshikazu Okubo ,  Katsuyoshi Naoi ,  Yuka Yamada

    发明人： Toshikazu Okubo ,  Katsuyoshi Naoi ,  Yuka Yamada

    IPC分类号： H01L21/20

    CPC分类号： C25D21/12 ,  G01N27/42

    摘要： Effective fillability and the uniformity electrodeposition of a copper electroplating solution is judged by determining the time-dependent potential change thereof at a cathode current density of 0.1-20 A/dm2. The potential change is determined at a working electrode rotation of 100-7500 rpm, and the fillability with the solution is judged from the curve profile. In an embodiment of the present invention, the fillability is judged by obtaining the potential change speed in the initial stage of electrolysis and the potential convergent point from the time-dependent potential change curve for a predetermined period of time after the start of the electrolysis.

    摘要翻译： 通过在0.1-20A / dm 2的阴极电流密度下确定其时间依赖的电位变化来判断铜电镀溶液的有效填充性和均匀性电沉积。 在100-7500rpm的工作电极旋转下确定电位变化，并根据曲线轮廓判断溶液的填充性。 在本发明的一个实施例中，通过在电解开始之后的预定时间段内从时间依赖电位变化曲线获得电解初始阶段的电位变化速度和电位收敛点来判断可填充性。

    METHOD FOR ANALYZING ELECTROLYTIC COPPER PLATING SOLUTION
    2.
    发明申请
    METHOD FOR ANALYZING ELECTROLYTIC COPPER PLATING SOLUTION 有权
    分析电解铜溶液的方法

    公开(公告)号：US20110025294A1

    公开(公告)日：2011-02-03

    申请号：US12903090

    申请日：2010-10-12

    申请人： Toshikazu Okubo ,  Katsuyoshi Naoi ,  Yuka Yamada

    发明人： Toshikazu Okubo ,  Katsuyoshi Naoi ,  Yuka Yamada

    IPC分类号： G01N27/00

    CPC分类号： C25D21/12 ,  G01N27/42

    摘要： Effective fillability and the uniformity electrodeposition of a copper electroplating solution is judged by determining the time-dependent potential change thereof at a cathode current density of 0.1-20 A/dm2. The potential change is determined at a working electrode rotation of 100-7500 rpm, and the fillability with the solution is judged from the curve profile. In an embodiment of the present invention, the fillability is judged by obtaining the potential change speed in the initial stage of electrolysis and the potential convergent point from the time-dependent potential change curve for a predetermined period of time after the start of the electrolysis.

    摘要翻译： 通过在0.1-20A / dm 2的阴极电流密度下确定其时间依赖性电位变化来判断铜电镀溶液的有效填充性和均匀性电沉积。 在100-7500rpm的工作电极旋转下确定电位变化，并根据曲线轮廓判断溶液的填充性。 在本发明的一个实施例中，通过在电解开始之后的预定时间段内从时间依赖电位变化曲线获得电解初始阶段的电位变化速度和电位收敛点来判断可填充性。

    Method for analyzing electrolytic copper plating solution, and analyzing device therefor and production method for semi-conductor product
    3.
    发明申请
    Method for analyzing electrolytic copper plating solution, and analyzing device therefor and production method for semi-conductor product 有权
    电解铜电镀液分析方法及其分析装置及半导体制品的制造方法

    公开(公告)号：US20060183257A1

    公开(公告)日：2006-08-17

    申请号：US10550153

    申请日：2004-03-23

    申请人： Toshikazu Okubo ,  Katsuyoshi Naoi ,  Yuka Yamada

    发明人： Toshikazu Okubo ,  Katsuyoshi Naoi ,  Yuka Yamada

    IPC分类号： H01L21/66 ,  H01L21/44

    CPC分类号： C25D21/12 ,  G01N27/42

    摘要： Effective fillability and the uniformity electrodeposition of a copper electroplating solution is judged by determining the time-dependent potential change thereof at a cathode current density of 0.1-20 A/dm2. The potential change is determined at a working electrode rotation of 100-7500 rpm, and the fillability with the solution is judged from the curve profile. The time-dependent potential change curve within a predetermined period of time after the start of electrolysis is approximated according to the Boltzmann's function, and the potential change speed dx and the potential convergent point A2 are obtained to judge the fillability with a plating solution.

    摘要翻译： 通过在0.1-20A / dm 2的阴极电流密度下确定其依赖于电位的变化来判断铜电镀溶液的有效填充性和均匀性电沉积。 在100-7500rpm的工作电极旋转下确定电位变化，并根据曲线轮廓判断溶液的填充性。 在电解开始之后的预定时间段内的时间依赖电位变化曲线根据玻尔兹曼函数近似，并且获得电位变化速度dx和电位收敛点A <2>，以判断 电镀溶液的填充性。

    Method for analyzing copper electroplating solution, apparatus for the analysis, and method for fabricating semiconductor product
    4.
    发明授权
    Method for analyzing copper electroplating solution, apparatus for the analysis, and method for fabricating semiconductor product 有权
    铜电镀液分析方法，分析装置及制造半导体产品的方法

    公开(公告)号：US07820535B2

    公开(公告)日：2010-10-26

    申请号：US10550153

    申请日：2004-03-23

    申请人： Toshikazu Okubo ,  Katsuyoshi Naoi ,  Yuka Yamada

    发明人： Toshikazu Okubo ,  Katsuyoshi Naoi ,  Yuka Yamada

    IPC分类号： H01L21/20

    CPC分类号： C25D21/12 ,  G01N27/42

    摘要： Effective fillability and the uniformity electrodeposition of a copper electroplating solution is judged by determining the time-dependent potential change thereof at a cathode current density of 0.1-20 A/dm2. The potential change is determined at a working electrode rotation of 100-7500 rpm, and the fillability with the solution is judged from the curve profile. The time-dependent potential change curve within a predetermined period of time after the start of electrolysis is approximated according to the Boltzmann's function, and the potential change speed dx and the potential convergent point A2 are obtained to judge the fillability with a plating solution.

    摘要翻译： 通过在0.1-20A / dm 2的阴极电流密度下确定其时间依赖性电位变化来判断铜电镀溶液的有效填充性和均匀性电沉积。 在100-7500rpm的工作电极旋转下确定电位变化，并根据曲线轮廓判断溶液的填充性。 在电解开始之后的预定时间段内的时间依赖电位变化曲线根据波尔兹曼函数近似，并且获得电位变化速度dx和电位收敛点A2，以判断电镀溶液的填充性。

    Electric power generation method using thermoelectric power generation element, thermoelectric power generation element and method of producing the same, and thermoelectric power generation device
    10.
    发明授权
    Electric power generation method using thermoelectric power generation element, thermoelectric power generation element and method of producing the same, and thermoelectric power generation device 有权
    使用热电发电元件的发电方法，热电发电元件及其制造方法以及热电发电装置

    公开(公告)号：US07449628B2

    公开(公告)日：2008-11-11

    申请号：US12056003

    申请日：2008-03-26

    申请人： Yuji Zenitani ,  Tsutomu Kanno ,  Hideaki Adachi ,  Yuka Yamada

    发明人： Yuji Zenitani ,  Tsutomu Kanno ,  Hideaki Adachi ,  Yuka Yamada

    IPC分类号： H01L35/12 ,  H01L35/30

    CPC分类号： H01L35/34 ,  H01L35/22 ,  H01L35/32

    摘要： The present invention provides an electric power generation method using a thermoelectric power generation element, a thermoelectric power generation element, and a thermoelectric power generation device, each of which has high thermoelectric power generation performance and can be used for more applications. The thermoelectric power generation element includes a first electrode and a second electrode that are disposed to oppose each other, and a laminate that is interposed between the first and second electrodes and that is electrically connected to both the first and second electrodes, where the laminate has a structure in which SrB6 layers and metal layers containing Cu, Ag, Au, or Al are laminated alternately, a thickness ratio between the metal layer and the SrB6 layer is in a range of metal layer: SrB6 layer=20:1 to 2.5:1, lamination surfaces of the SrB6 layers and the metal layers are inclined at an inclination angle θ of 20° to 50° with respect to a direction in which the first electrode and the second electrode oppose each other, and a temperature difference applied in a direction perpendicular to the direction in the element generates a potential difference between the first and second electrodes. The electric power generation method and thermoelectric power generation device each use the element.

    摘要翻译： 本发明提供一种使用热电发电元件，热电发电元件和热电发电装置的发电方法，其具有高的热电发电性能并且可用于更多的应用。 热电发电元件包括​​彼此相对设置的第一电极和第二电极，以及插入在第一和第二电极之间并且与第一和第二电极两者电连接的层压体，其中层压体 其中SrB 6层和含有Cu，Ag，Au或Al的金属层交替层叠的结构，金属层和SrB 6层之间的厚度比为 在一层金属层：SrB 6层= 20:1至2.5:1的范围内，SrB 6层和金属层的层叠表面以倾斜角倾斜 θ相对于第一电极和第二电极彼此相对的方向为20°至50°，并且沿垂直于元件中的方向的方向施加的温度差产生第一和第二电极之间的电位差 。 发电方法和热电发电装置均使用该元件。