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    ELECTROLYTE ANALYZER
    1.
    发明公开
    ELECTROLYTE ANALYZER 审中-公开

    公开(公告)号：US20240094160A1

    公开(公告)日：2024-03-21

    申请号：US18276157

    申请日：2021-12-07

    申请人： Hitachi High-Tech Corporation

    发明人： Takushi MIYAKAWA ,  Taichiro YAMASHITA

    IPC分类号： G01N27/411 ,  G01N27/30 ,  G01N27/42

    CPC分类号： G01N27/4117 ,  G01N27/301 ,  G01N27/42

    摘要： Problem



    Provided is an electrolyte analyzer that allows reducing a load of a user in a replacement work compared with conventional one.




    Solution



    An electrolyte analyzer includes an ISE electrode 1 that includes at least one electrode, a reference electrode 2 that includes at least one electrode different from the ISE electrode 1, and a housing 200 that houses the electrodes of the ISE electrode 1 and the reference electrode 2. The housing 200 includes a pressing unit that presses the electrodes to one another, a first press switching unit 210 that switches the ISE electrode 1 between a secured state and a released state, and a second press switching unit 215 that switches the reference electrode 2 between a secured state and a released state. The ISE electrode 1 and the reference electrode 2 are each switched between the secured state and the released state. Selected Drawing: FIG. 3

    Functionalized nanopipette biosensor
    5.
    发明授权
    Functionalized nanopipette biosensor 有权

    公开(公告)号：US09766204B2

    公开(公告)日：2017-09-19

    申请号：US14603134

    申请日：2015-01-22

    申请人： The Regents of the University of California

    发明人： Miloslav Karhanek ,  Chris David Webb ,  Senkei Umehara ,  Nader Pourmand

    IPC分类号： G01N27/42 ,  G01N27/403 ,  G01N33/487

    CPC分类号： G01N27/42 ,  G01N27/4035 ,  G01N33/48707

    摘要： Disclosed are methods and devices for biomolecular detection, comprising a nanopipette, exemplified as a hollow inert, non-biological structure with a conical tip opening of nanoscale dimensions, suitable for holding an electrolyte solution which may contain an analyte such as a protein biomolecule to be detected as it is passed through the tip opening. Biomolecules are detected by specific reaction with peptide ligands chemically immobilized in the vicinity of the tip. Analytes which bind to the ligands cause a detectable change in ionic current. A sensitive detection circuit, using a feedback amplifier circuit, and alternating voltages is further disclosed. Detection of IL-10 at a concentration of 4 ng/ml is also disclosed, as is detection of VEGF.

    Closed loop electrolyte analyzer
    8.
    发明授权
    Closed loop electrolyte analyzer 有权
    闭环电解质分析仪

    公开(公告)号：US09469913B2

    公开(公告)日：2016-10-18

    申请号：US14527493

    申请日：2014-10-29

    申请人： APPLIED Materials, Inc.

    发明人： Thomas H. Oberlitner ,  Cameron H. Law ,  Justin Boucher

    IPC分类号： C25D21/12 ,  C25D21/14 ,  G01N27/42 ,  G01N27/416

    CPC分类号： C25D21/14 ,  G01N27/4166 ,  G01N27/42

    摘要： A processing system for electroplating semiconductor wafers and similar substrates includes an electrolyte tank, at least one processing chamber connected to the electrolyte tank via fluid lines, and an electrolyte analyzer. The electrolyte analyzer may have a probe, such as a voltammetry probe, in the electrolyte tank, a pump, a reservoir and at least one valve, with these components connected via fluid lines to form a fluid loop. The valve may be switchable to provide a closed fluid loop where electrolyte circulates through the probe to analyze the electrolyte, and to provide an open fluid loop to removal of the used electrolyte and introduction of fresh electrolyte from the tank into the fluid loop. The used electrolyte may be moved to a facility drain and not returned to the electrolyte tank, to reduce risk of contamination.

    摘要翻译： 用于电镀半导体晶片和类似基板的处理系统包括电解液箱，经由流体管线连接到电解槽的至少一个处理室和电解质分析器。 电解质分析器可以在电解液罐，泵，储存器和至少一个阀中具有诸如伏安法探针的探针，这些部件通过流体管线连接以形成流体回路。 阀可以切换以提供闭合的流体回路，其中电解质循环通过探针以分析电解质，并且提供开放的流体回路以去除所使用的电解质并将新鲜电解质从罐引入流体回路中。 所使用的电解质可以移动到设备排水口，而不是返回到电解槽，以减少污染的风险。

    Method for analyzing electrolytic copper plating solution
    10.
    发明授权
    Method for analyzing electrolytic copper plating solution 有权
    电解镀铜液分析方法

    公开(公告)号：US08440555B2

    公开(公告)日：2013-05-14

    申请号：US12903090

    申请日：2010-10-12

    申请人： Toshikazu Okubo ,  Katsuyoshi Naoi ,  Yuka Yamada

    发明人： Toshikazu Okubo ,  Katsuyoshi Naoi ,  Yuka Yamada

    IPC分类号： H01L21/20

    CPC分类号： C25D21/12 ,  G01N27/42

    摘要： Effective fillability and the uniformity electrodeposition of a copper electroplating solution is judged by determining the time-dependent potential change thereof at a cathode current density of 0.1-20 A/dm2. The potential change is determined at a working electrode rotation of 100-7500 rpm, and the fillability with the solution is judged from the curve profile. In an embodiment of the present invention, the fillability is judged by obtaining the potential change speed in the initial stage of electrolysis and the potential convergent point from the time-dependent potential change curve for a predetermined period of time after the start of the electrolysis.

    摘要翻译： 通过在0.1-20A / dm 2的阴极电流密度下确定其时间依赖的电位变化来判断铜电镀溶液的有效填充性和均匀性电沉积。 在100-7500rpm的工作电极旋转下确定电位变化，并根据曲线轮廓判断溶液的填充性。 在本发明的一个实施例中，通过在电解开始之后的预定时间段内从时间依赖电位变化曲线获得电解初始阶段的电位变化速度和电位收敛点来判断可填充性。