-
公开(公告)号:US20230049283A1
公开(公告)日:2023-02-16
申请号:US17730551
申请日:2022-04-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyounglim SUK , Daewoo Kim , Seokhyun Lee
IPC: H01L23/00 , H01L21/768 , H01L21/56
Abstract: A method of manufacturing a semiconductor package includes: hybrid-bonding a semiconductor chip, including a through-silicon via, to an upper surface of a semiconductor wafer, wet-etching a surface of the semiconductor chip to expose the through-silicon via, covering the exposed through-silicon via with a material, including an organic resin and an inorganic filler, to form an encapsulation layer, removing an upper surface of the encapsulation layer to expose the through-silicon via, and forming a redistribution structure electrically connected to the through-silicon via.
-
公开(公告)号:US20220328388A1
公开(公告)日:2022-10-13
申请号:US17508250
申请日:2021-10-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyeonjeong HWANG , Kyounglim SUK , Seokhyun LEE
IPC: H01L23/498 , H01L23/00
Abstract: A semiconductor package includes a semiconductor chip, a lower redistribution layer disposed under the semiconductor chip, the lower redistribution layer including a plurality of lower insulating layers, a plurality of lower redistribution patterns, and a plurality of lower conductive vias, a lower passivation layer disposed under the lower redistribution layer and provided with a recess at a bottom surface of the lower passivation layer, an under bump metallization (UBM) pad disposed in the first recess, a UBM protective layer disposed in the first recess and connected to the lower conductive vias while covering a top surface and opposite side surfaces of the UBM pad, and an outer connecting terminal connected to a bottom surface of the UBM pad. The bottom surface of the UBM pad is positioned at a first depth from the bottom surface of the lower passivation layer.
-
公开(公告)号:US20240113001A1
公开(公告)日:2024-04-04
申请号:US18212939
申请日:2023-06-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyounglim SUK , Jihwang Kim , Suchang Lee , Hyeonjeong Hwang
IPC: H01L23/498 , H01L23/00 , H01L23/31 , H01L23/48 , H01L23/64 , H01L25/065
CPC classification number: H01L23/49822 , H01L23/3121 , H01L23/481 , H01L23/49811 , H01L23/642 , H01L24/16 , H01L25/0657 , H01L2224/16227
Abstract: A semiconductor package includes: a first redistribution structure including at least one first redistribution layer and at least one first insulating layer; a first semiconductor chip electrically connected to the at least one first redistribution layer and disposed on a first surface of the first redistribution structure; a second semiconductor chip disposed on an upper surface of the first semiconductor chip; a first encapsulant disposed on a second surface of the first redistribution structure opposite the first surface of the first redistribution layer; first conductive posts electrically connected to the first semiconductor chip and penetrating the first encapsulant; and under bump metallurgy (UBM) structures disposed on a lower surface of the first encapsulant, wherein at least a portion of the UBM structures overlap at least a portion of the first conductive posts in a penetration direction of the first conductive posts and are connected to the first conductive posts.
-
公开(公告)号:US20240065003A1
公开(公告)日:2024-02-22
申请号:US18295324
申请日:2023-04-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Dongkyu KIM , Kyounglim SUK , Hyeonseok LEE , Hyeonjeong HWANG
IPC: H10B80/00 , H01L23/522 , H01L23/00 , H01L23/31
CPC classification number: H10B80/00 , H01L23/5226 , H01L24/16 , H01L23/3157 , H01L24/05 , H01L24/08 , H01L24/13 , H01L24/11 , H01L2224/16145 , H01L2224/0401 , H01L2224/08145 , H01L2224/13147 , H01L2224/13124 , H01L2224/13155 , H01L2224/1318 , H01L2224/13144 , H01L2224/13139 , H01L2224/13171 , H01L2224/13111 , H01L2224/13166 , H01L2224/1146
Abstract: A semiconductor package includes a memory chip having chip pads on a first surface thereof. A redistribution layer is formed on the first surface of the memory chip. The redistribution layer is electrically connected to the chip pads. The redistribution layer has first redistribution pads on a first surface of the redistribution layer in a first region and a plurality of second redistribution pads on the first surface of the redistribution layer in a second region thereof. A processor chip is disposed on the first region of the redistribution layer and is electrically connected to the first redistribution pads. A sealing member is disposed on the first surface of the redistribution layer and covers the processor chip. Conductive structures are on the second region and penetrate through the sealing member and extend upwardly in a vertical direction away from the second redistribution pads.
-
公开(公告)号:US20240347435A1
公开(公告)日:2024-10-17
申请号:US18748765
申请日:2024-06-20
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyeonjeong Hwang , Kyounglim SUK , Seokhyun LEE
IPC: H01L23/498 , H01L23/00 , H01L25/065 , H01L25/10
CPC classification number: H01L23/49822 , H01L23/49816 , H01L23/49833 , H01L23/49838 , H01L24/16 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/48 , H01L25/0657 , H01L25/105 , H01L2224/16235 , H01L2224/32225 , H01L2224/48227 , H01L2224/73204
Abstract: A semiconductor package includes a semiconductor chip, a lower redistribution layer disposed under the semiconductor chip, the lower redistribution layer including a plurality of lower insulating layers, a plurality of lower redistribution patterns, and a plurality of lower conductive vias, a lower passivation layer disposed under the lower redistribution layer and provided with a recess at a bottom surface of the lower passivation layer, an under bump metallization (UBM) pad disposed in the first recess, a UBM protective layer disposed in the first recess and connected to the lower conductive vias while covering a top surface and opposite side surfaces of the UBM pad, and an outer connecting terminal connected to a bottom surface of the UBM pad. The bottom surface of the UBM pad is positioned at a first depth from the bottom surface of the lower passivation layer.
-
公开(公告)号:US20230071812A1
公开(公告)日:2023-03-09
申请号:US17846245
申请日:2022-06-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jaegwon JANG , Kyounglim SUK , Inhyung SONG
IPC: H01L25/065 , H01L25/10 , H01L23/498 , H01L23/00
Abstract: A semiconductor package includes a substrate including a redistribution layer, a chip structure including a first semiconductor chip disposed on the substrate and including a first through-electrode, a second semiconductor chip disposed on the first semiconductor chip and electrically connected to the first semiconductor chip by the first through-electrode, and a first encapsulant at least partially surrounding the second semiconductor chip. A first connection bump disposed between the substrate and the chip structure and electrically connects the first through-electrode to the redistribution layer, a second connection bump disposed below the substrate and electrically connects to the redistribution layer, and a second encapsulant e the chip structure on the substrate. The first semiconductor chip is connected to and faces the second semiconductor chip.
-
公开(公告)号:US20220037306A1
公开(公告)日:2022-02-03
申请号:US17190689
申请日:2021-03-03
Applicant: Samsung Electronics Co., Ltd.
Inventor: Seho YOU , Kyounglim SUK
IPC: H01L25/18 , H01L23/498 , H01L23/522 , H01L23/31 , H01L23/00 , H01L23/48 , H01L23/66
Abstract: A semiconductor package is provided. The semiconductor package comprising a first redistribution structure comprising a first redistribution pattern; a first semiconductor chip on the first redistribution structure, the first semiconductor chip comprising a semiconductor substrate comprising a first surface and a second surface, a first back end of line (BEOL) structure on the first surface of the semiconductor substrate and comprising a first interconnect pattern, and a second BEOL structure on the second surface of the semiconductor substrate and comprising a second interconnect pattern; a molding layer covering a sidewall of the first semiconductor chip; a second redistribution structure on the first semiconductor chip and the molding layer and comprising a second redistribution pattern electrically connected to the second interconnect pattern.
-
公开(公告)号:US20240145396A1
公开(公告)日:2024-05-02
申请号:US18381711
申请日:2023-10-19
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sehoon JANG , Hyeonjeong HWANG , Kyounglim SUK
CPC classification number: H01L23/5386 , H01L21/4857 , H01L21/568 , H01L23/3128 , H01L23/5385 , H01L25/18 , H10B80/00 , H01L24/16
Abstract: A semiconductor package includes a base substrate. An interposer substrate includes a plurality of interposer redistribution structures sequentially stacked in a vertical direction and an interposer insulation layer. The plurality of interposer redistribution structures includes a plurality of conductive interposer patterns and a plurality of conductive interposer vias. A semiconductor chip is disposed between the base substrate and the interposer substrate and is attached on the base substrate. A plurality of conductive connection pads is respectively disposed on a plurality of uppermost conductive interposer patterns of an uppermost interposer redistribution structure of the plurality of interposer redistribution structures. The interposer insulation layer includes a plurality of pad holes exposing at least a portion of each of an upper surface of a corresponding uppermost conductive interposer pattern of the plurality of uppermost conductive interposer patterns.
-
公开(公告)号:US20240047324A1
公开(公告)日:2024-02-08
申请号:US18183699
申请日:2023-03-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyeonjeong HWANG , Dongwook KIM , Kyounglim SUK , Inhyung SONG , Sehoon JANG
IPC: H01L23/498 , H01L23/00 , H01L25/065 , H01L25/10 , H01L21/56 , H01L23/31
CPC classification number: H01L23/49816 , H01L24/32 , H01L24/16 , H01L25/0657 , H01L25/105 , H01L24/73 , H01L24/05 , H01L21/565 , H01L23/3128 , H01L2224/32225 , H01L2224/73204 , H01L2224/16227 , H01L2224/0401 , H01L2225/1058 , H01L2224/05008
Abstract: A semiconductor package includes a redistribution wiring layer having a first surface and a second surface opposite to the first surface, a conductive bump on the first surface, and a first semiconductor device on the conductive bump. The redistribution wiring layer includes redistribution wirings having an uppermost redistribution wiring, a bonding pad, and an uppermost insulating layer. The uppermost redistribution wiring has a redistribution via and a redistribution line on the redistribution via. The bonding pad disposes on the redistribution line of the uppermost redistribution wiring, and the conductive bump is disposed on the bonding pad. The uppermost insulating layer overlapping (e.g., covering) the uppermost redistribution wiring and having an opening exposing a portion of the bonding pad.
-
公开(公告)号:US20230253392A1
公开(公告)日:2023-08-10
申请号:US18301420
申请日:2023-04-17
Applicant: Samsung Electronics Co., Ltd.
Inventor: Seho YOU , Kyounglim SUK
IPC: H01L25/18 , H01L23/498 , H01L23/522 , H01L23/31 , H01L23/00 , H01L23/48 , H01L23/66
CPC classification number: H01L25/18 , H01L23/49822 , H01L23/5226 , H01L23/3128 , H01L24/20 , H01L23/481 , H01L23/66 , H01L23/49811 , H01L24/16 , H01L2223/6677 , H01L2224/16227
Abstract: A semiconductor package is provided. The semiconductor package comprising a first redistribution structure comprising a first redistribution pattern; a first semiconductor chip on the first redistribution structure, the first semiconductor chip comprising a semiconductor substrate comprising a first surface and a second surface, a first back end of line (BEOL) structure on the first surface of the semiconductor substrate and comprising a first interconnect pattern, and a second BEOL structure on the second surface of the semiconductor substrate and comprising a second interconnect pattern; a molding layer covering a sidewall of the first semiconductor chip; a second redistribution structure on the first semiconductor chip and the molding layer and comprising a second redistribution pattern electrically connected to the second interconnect pattern.
-
-
-
-
-
-
-
-
-