CHEMICAL MECHANICAL POLISHING APPARATUS AND CHEMICAL MECHANICAL POLISHING SYSTEM USING THE SAME

    公开(公告)号:US20240051079A1

    公开(公告)日:2024-02-15

    申请号:US18296021

    申请日:2023-04-05

    CPC classification number: B24B37/0056 G05D11/138 H01L21/31053

    Abstract: A chemical mechanical polishing apparatus includes: supply pipes to which a slurry stock solution and a diluent are supplied; flow rate control units, respectively disposed on the supply pipes to control flow rates of the slurry stock solution and the diluent; a mixer connected to the flow rate control units and configured to mix the slurry stock solution and the diluent, supplied from the supply pipes, to prepare a slurry; a slurry storage unit connected to the mixer and configured to store the slurry prepared in the mixer; a slurry supply unit configured to draw out the slurry stored in the slurry storage unit and to supply the slurry to a polishing pad; and a control unit configured to control the flow rate control units to control a mixing ratio of the slurry stock solution and the diluent and a flow rate of the slurry to the polishing pad.

    Semiconductor device and method of fabricationg the same
    5.
    发明授权
    Semiconductor device and method of fabricationg the same 有权
    半导体器件及其制造方法相同

    公开(公告)号:US09006067B2

    公开(公告)日:2015-04-14

    申请号:US14146185

    申请日:2014-01-02

    CPC classification number: H01L21/823431 H01L21/823456 H01L21/823481

    Abstract: A method of fabricating a semiconductor device includes forming first gate patterns on a semiconductor substrate using an etch mask pattern, forming a trench in the semiconductor substrate between the first gate patterns, forming an insulating layer in the trench, such that the insulating layer fills the trench and is disposed on the etch mask pattern, planarizing the insulating layer until a top surface of the etch mask pattern is exposed, etching a portion of the planarized insulating layer to form a device isolation layer in the trench, forming a second gate layer covering the etch mask pattern and disposed on the device isolation pattern, and planarizing the second gate layer until the top surface of the etch mask pattern is exposed, such that a second gate pattern is formed.

    Abstract translation: 制造半导体器件的方法包括使用蚀刻掩模图案在半导体衬底上形成第一栅极图案,在第一栅极图案之间的半导体衬底中形成沟槽,在沟槽中形成绝缘层,使得绝缘层填充 沟槽并且设置在蚀刻掩模图案上,使绝缘层平坦化,直到暴露蚀刻掩模图案的顶表面,蚀刻平坦化绝缘层的一部分以在沟槽中形成器件隔离层,形成第二栅极层覆盖层 蚀刻掩模图案并且设置在器件隔离图案上,并且平坦化第二栅极层,直到暴露出蚀刻掩模图案的顶表面,使得形成第二栅极图案。

    Method and apparatus for compressing weights of neural network

    公开(公告)号:US11632129B2

    公开(公告)日:2023-04-18

    申请号:US17965141

    申请日:2022-10-13

    Inventor: Hoyoung Kim

    Abstract: A method of compressing weights of a neural network includes compressing a weight set including the weights of a the neural network, determining modified weight sets by changing at least one of the weights, calculating compression efficiency values for the determined modified weight sets based on a result of compressing the weight set and results of compressing the determined modified weight sets, determining a target weight of the weights satisfying a compression efficiency condition among the weights based on the calculated compression efficiency values, and determining a final compression result by compressing the weights based on a result of replacing the determined target weight.

    Method and apparatus for compressing weights of neural network

    公开(公告)号:US11502701B2

    公开(公告)日:2022-11-15

    申请号:US17394584

    申请日:2021-08-05

    Inventor: Hoyoung Kim

    Abstract: A method of compressing weights of a neural network includes compressing a weight set including the weights of a the neural network, determining modified weight sets by changing at least one of the weights, calculating compression efficiency values for the determined modified weight sets based on a result of compressing the weight set and results of compressing the determined modified weight sets, determining a target weight of the weights satisfying a compression efficiency condition among the weights based on the calculated compression efficiency values, and determining a final compression result by compressing the weights based on a result of replacing the determined target weight.

    Electronic device for processing user's inquiry, and operation method of the electronic device

    公开(公告)号:US12277390B2

    公开(公告)日:2025-04-15

    申请号:US17677396

    申请日:2022-02-22

    Abstract: An electronic device for providing a corrected response message according to an utterance intention of a user by using a keyword included in an input inquiry input by the user, and an operation method of the electronic device are provided. The electronic device includes receiving the input inquiry input by the user, identifying a representative inquiry according to an utterance intention of the user by analyzing the input inquiry by using a natural language understanding (NLU) model, extracting a keyword from the input inquiry by comparing a vector value of a first embedding vector of the input inquiry changed through the NLU model with a vector value of a second embedding vector of the representative inquiry, and correcting a response message mapped to correspond to the representative inquiry, by using the extracted keyword.

    Response determining device and controlling method of electronic device therefor

    公开(公告)号:US12277149B2

    公开(公告)日:2025-04-15

    申请号:US17712301

    申请日:2022-04-04

    Abstract: A method of controlling an electronic device includes, based on obtaining first text information corresponding to a user query, identifying a main query corresponding to the first text information; obtaining a plurality of responses related to the main query; identifying a plurality of phrases included in the first text information; identifying at least one first phrase corresponding to the main query among the plurality of phrases based on a similarity between the plurality of phrases and the main query; identifying, among the plurality of responses, at least one first response corresponding to a remaining second phrase, among the plurality of phrases except the at least one first phrase, based on a similarity between each of the plurality of responses and the remaining second phrase; and providing second text information corresponding to a remaining second response other than the at least one first response among the plurality of responses.

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