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1.
公开(公告)号:US20250022713A1
公开(公告)日:2025-01-16
申请号:US18633627
申请日:2024-04-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Joongsuk Oh , Jinuk Byun , Hoyoung Kim , Hyunkyu Moon , Kiho Bae , Boun Yoon , Hojoon Lee , Seunghoon Choi
IPC: H01L21/304 , G06N3/04 , H01L21/66 , H01L21/67
Abstract: An offset data correction method includes measuring a measurement target that has undergone a chemical mechanical polishing (CMP) process, generating an offset correction model based on the measurement of the measurement target, and using the offset correction model, correcting measured data obtained from the measurement of the measurement target, wherein the offset correction model is trained by using the measured data and layout data of the measurement target as inputs.
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2.
公开(公告)号:US20240051079A1
公开(公告)日:2024-02-15
申请号:US18296021
申请日:2023-04-05
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Eunkyoung Kim , Kiho Bae , Hoyoung Kim , Boumyoung Park , Boun Yoon
IPC: B24B37/005 , G05D11/13
CPC classification number: B24B37/0056 , G05D11/138 , H01L21/31053
Abstract: A chemical mechanical polishing apparatus includes: supply pipes to which a slurry stock solution and a diluent are supplied; flow rate control units, respectively disposed on the supply pipes to control flow rates of the slurry stock solution and the diluent; a mixer connected to the flow rate control units and configured to mix the slurry stock solution and the diluent, supplied from the supply pipes, to prepare a slurry; a slurry storage unit connected to the mixer and configured to store the slurry prepared in the mixer; a slurry supply unit configured to draw out the slurry stored in the slurry storage unit and to supply the slurry to a polishing pad; and a control unit configured to control the flow rate control units to control a mixing ratio of the slurry stock solution and the diluent and a flow rate of the slurry to the polishing pad.
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公开(公告)号:US09972696B2
公开(公告)日:2018-05-15
申请号:US15229930
申请日:2016-08-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hoyoung Kim , Sang Won Bae , Jae-Jik Baek , Wonsang Choi
IPC: H01L21/3213 , H01L29/66 , H01L21/28 , H01L21/3205 , C09K13/00
CPC classification number: H01L29/66545 , C09K13/00 , H01L21/28017 , H01L21/28255 , H01L21/32055 , H01L21/32134 , H01L29/66553 , H01L29/66795 , H01L29/7848
Abstract: The present disclosure relates to an etchant, a method of making an etchant, an etching method and a method of fabricating a semiconductor device using the same. The etching method includes supplying an etchant on an etch-target layer to etch the etch-target layer in a wet etch manner. The etchant contains a basic compound and a sugar alcohol, and the basic compound contains ammonium hydroxide or tetraalkyl ammonium hydroxide. In the etchant, the sugar alcohol has 0.1 to 10 parts by weight for every 100 parts by weight of the basic compound.
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公开(公告)号:US09898838B2
公开(公告)日:2018-02-20
申请号:US15073731
申请日:2016-03-18
Applicant: Samsung Electronics Co., Ltd.
Inventor: Heejun Shim , Kwontaek Kwon , Sunmin Kwon , Hoyoung Kim , Seonghun Jeong
CPC classification number: G06T11/001 , G06T1/20 , G06T11/40 , G06T15/04 , G06T2210/36
Abstract: A method of determining a level of detail (LOD) for a texturing includes: acquiring texture coordinate data on pixels included in an upper block; determining a reference quad among quads included in the upper block; determining a similarity between the determined reference quad and the upper block using texture coordinates of the determined reference quad and the upper block; and determining LODs of remaining quads among the quads included in the upper block to be the same as an LOD of the determined reference quad in response to the determining of the similarity including determining that the determined reference quad and the upper block are similar.
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5.
公开(公告)号:US09006067B2
公开(公告)日:2015-04-14
申请号:US14146185
申请日:2014-01-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Bo Kyeong Kang , Jaeseok Kim , Boun Yoon , Hoyoung Kim , Ilyoung Yoon
IPC: H01L21/8234
CPC classification number: H01L21/823431 , H01L21/823456 , H01L21/823481
Abstract: A method of fabricating a semiconductor device includes forming first gate patterns on a semiconductor substrate using an etch mask pattern, forming a trench in the semiconductor substrate between the first gate patterns, forming an insulating layer in the trench, such that the insulating layer fills the trench and is disposed on the etch mask pattern, planarizing the insulating layer until a top surface of the etch mask pattern is exposed, etching a portion of the planarized insulating layer to form a device isolation layer in the trench, forming a second gate layer covering the etch mask pattern and disposed on the device isolation pattern, and planarizing the second gate layer until the top surface of the etch mask pattern is exposed, such that a second gate pattern is formed.
Abstract translation: 制造半导体器件的方法包括使用蚀刻掩模图案在半导体衬底上形成第一栅极图案,在第一栅极图案之间的半导体衬底中形成沟槽,在沟槽中形成绝缘层,使得绝缘层填充 沟槽并且设置在蚀刻掩模图案上,使绝缘层平坦化,直到暴露蚀刻掩模图案的顶表面,蚀刻平坦化绝缘层的一部分以在沟槽中形成器件隔离层,形成第二栅极层覆盖层 蚀刻掩模图案并且设置在器件隔离图案上,并且平坦化第二栅极层,直到暴露出蚀刻掩模图案的顶表面,使得形成第二栅极图案。
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公开(公告)号:US11632129B2
公开(公告)日:2023-04-18
申请号:US17965141
申请日:2022-10-13
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hoyoung Kim
Abstract: A method of compressing weights of a neural network includes compressing a weight set including the weights of a the neural network, determining modified weight sets by changing at least one of the weights, calculating compression efficiency values for the determined modified weight sets based on a result of compressing the weight set and results of compressing the determined modified weight sets, determining a target weight of the weights satisfying a compression efficiency condition among the weights based on the calculated compression efficiency values, and determining a final compression result by compressing the weights based on a result of replacing the determined target weight.
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公开(公告)号:US11502701B2
公开(公告)日:2022-11-15
申请号:US17394584
申请日:2021-08-05
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hoyoung Kim
Abstract: A method of compressing weights of a neural network includes compressing a weight set including the weights of a the neural network, determining modified weight sets by changing at least one of the weights, calculating compression efficiency values for the determined modified weight sets based on a result of compressing the weight set and results of compressing the determined modified weight sets, determining a target weight of the weights satisfying a compression efficiency condition among the weights based on the calculated compression efficiency values, and determining a final compression result by compressing the weights based on a result of replacing the determined target weight.
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公开(公告)号:US09721359B2
公开(公告)日:2017-08-01
申请号:US14667780
申请日:2015-03-25
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sunmin Kwon , Jeongae Park , Hoyoung Kim , Heejun Shim , Seonghoon Jeong
IPC: G06T9/00
CPC classification number: G06T9/00
Abstract: Provided is a decompression apparatus and method thereof for decompressing rendering data. The decompression apparatus includes a data parsing unit configured to acquire a control component and a texture component from compressed input data including rendering information of an object, a decompression controller configured to allocate the control component to a control unit, wherein the control unit extracts a control command from the control component, and a logic calculation unit configured to, based on the control command, restore texture data of the object from the texture component.
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9.
公开(公告)号:US12277390B2
公开(公告)日:2025-04-15
申请号:US17677396
申请日:2022-02-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Dongil Yang , Hoyoung Kim , Jaehyung An , Jiyeon Lee , Cheolseung Jung , Wonjong Choi
IPC: G06F40/279 , G06V30/18 , G06V30/19
Abstract: An electronic device for providing a corrected response message according to an utterance intention of a user by using a keyword included in an input inquiry input by the user, and an operation method of the electronic device are provided. The electronic device includes receiving the input inquiry input by the user, identifying a representative inquiry according to an utterance intention of the user by analyzing the input inquiry by using a natural language understanding (NLU) model, extracting a keyword from the input inquiry by comparing a vector value of a first embedding vector of the input inquiry changed through the NLU model with a vector value of a second embedding vector of the representative inquiry, and correcting a response message mapped to correspond to the representative inquiry, by using the extracted keyword.
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公开(公告)号:US12277149B2
公开(公告)日:2025-04-15
申请号:US17712301
申请日:2022-04-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jaehyung An , Hoyoung Kim , Dongil Yang , Jiyeon Lee , Cheolseung Jung
IPC: G06F16/3329 , G06F16/334 , G06F40/289 , G06F40/30
Abstract: A method of controlling an electronic device includes, based on obtaining first text information corresponding to a user query, identifying a main query corresponding to the first text information; obtaining a plurality of responses related to the main query; identifying a plurality of phrases included in the first text information; identifying at least one first phrase corresponding to the main query among the plurality of phrases based on a similarity between the plurality of phrases and the main query; identifying, among the plurality of responses, at least one first response corresponding to a remaining second phrase, among the plurality of phrases except the at least one first phrase, based on a similarity between each of the plurality of responses and the remaining second phrase; and providing second text information corresponding to a remaining second response other than the at least one first response among the plurality of responses.
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