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公开(公告)号：US20190265024A1
公开(公告)日：2019-08-29
申请号：US16410145
申请日：2019-05-13
Applicant: OLYMPUS CORPORATION
Inventor： Mayumi ODAIRA , Yoshimasa SUZUKI
Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as to include an optical axis at a pupil position of an illumination optical system. Light transmitted through the sample is incident on the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.
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2.发明申请FOCUSING METHOD, MEASURING METHOD, PRINCIPAL POINT DETECTING METHOD, FOCUSING DEVICE, MEASURING DEVICE, AND PRINCIPAL POINT DETECTING DEVICE 审中-公开聚焦方法，测量方法，主要检测方法，聚焦装置，测量装置和主要检测装置公开(公告)号：US20160357002A1
公开(公告)日：2016-12-08
申请号：US15240384
申请日：2016-08-18
Applicant: OLYMPUS CORPORATION
Inventor： Yoshimasa SUZUKI , Kazuo KAJITANI
Abstract: A focusing method includes a step of preparing a microscope, a step of mounting a sample, and a predetermined processing step, the predetermined processing step includes a step of receiving light emitted from the observation optical system, a step of obtaining the quantity of light based on light from a predetermined region of the received light, a step of calculating a difference or a ratio between the quantity of light in the predetermined region and the quantity of light as a reference, a step of comparing a calculation result with a threshold, and a step of changing the distance between the sample and the observation optical system, and in the step of preparing, a partial region of illumination light is shielded or darkened, and when the result of the calculation is equal to or smaller than the threshold, the predetermined processing step is terminated.
Abstract translation: 聚焦方法包括准备显微镜的步骤，安装样品的步骤和预定的处理步骤，所述预定处理步骤包括接收从观察光学系统发射的光的步骤，获得基于光量的步骤 在来自所接收的光的预定区域的光上，计算在所述预定区域中的光量与所述光量之间的差异或比率作为参考的步骤，将计算结果与阈值进行比较的步骤，以及 改变样品与观察光学系统之间的距离的步骤，并且在准备的步骤中，照明光的一部分区域被屏蔽或变暗，并且当计算结果等于或小于阈值时， 预定处理步骤终止。
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公开(公告)号：US20160025959A1
公开(公告)日：2016-01-28
申请号：US14835844
申请日：2015-08-26
Applicant: OLYMPUS CORPORATION
Inventor： Yoshimasa SUZUKI
CPC classification number: G02B21/367 , A61B1/00009 , A61B1/00188 , G02B5/201 , G02B21/0088 , G02B21/02 , G02B21/12 , G02B21/14 , G02B21/365 , G02B23/2469 , H04N5/23293 , H04N7/183
Abstract: A sample observation method includes an acquisition of for acquiring an electronic image of a sample, and a subtraction step of subtracting a DC component from a signal of the electronic image, and the acquisition step is performed in a state of bright-field observation, the electronic image at the subtraction step is an image acquired in a first predetermined state, and in the first predetermined state, at least a position of the sample and a in-focus position of an image forming optical system are different. A sample observation device includes a light source, an illumination optical system, an image forming optical system, an image-pickup device, and an image processing device, and the illumination optical system is disposed so as to irradiate a sample with illumination light from the light source, the image forming optical system is disposed so that light from the sample is incident thereon and an optical image of the sample is formed, the image-pickup device is disposed at a position of the optical image, and the image processing device is configured to implement the aforementioned sample observation method.
Abstract translation: 样本观察方法包括获取样本的电子图像的获取，以及从电子图像的信号中减去DC分量的减法步骤，并且在亮场观察的状态下执行获取步骤， 在减法步骤中的电子图像是在第一预定状态下获取的图像，并且在第一预定状态下，图像形成光学系统的样本和对焦位置的至少一个位置不同。 样本观察装置包括光源，照明光学系统，图像形成光学系统，图像拾取装置和图像处理装置，并且照明光学系统被设置为用来照射来自 光源，成像光学系统被布置成使得来自样品的光入射到其上并形成样品的光学图像，图像拾取装置设置在光学图像的位置，并且图像处理装置是 被配置为实现上述样本观察方法。
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公开(公告)号：US20190271644A1
公开(公告)日：2019-09-05
申请号：US16409985
申请日：2019-05-13
Applicant: OLYMPUS CORPORATION
Inventor： Yoshimasa SUZUKI , Mayumi ODAIRA
Abstract: A sample observation apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and an image processing apparatus. The scanning unit relatively moves the light spot and the sample. An optical member is disposed. The illumination optical system and the detection optical system are disposed such that an image of a pupil of the illumination optical system is formed at a pupil position of the detection optical system. The image of the pupil of the illumination optical system is decentered relative to a pupil of the detection optical system due to refraction caused by the sample. The illumination optical system, the detection optical system, and the optical member are configured such that quantity of light passing through the pupil of the detection optical system changes by decentering.
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公开(公告)号：US20190041198A1
公开(公告)日：2019-02-07
申请号：US16150339
申请日：2018-10-03
Applicant: OLYMPUS CORPORATION
Inventor： Yoshimasa SUZUKI
IPC: G01B11/26
Abstract: A sample shape measuring method includes a step of preparing illumination light that is to be passed through a predetermined illumination region, a step of irradiating the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set such that an area of a region of the illumination light passing through a pupil of an observation optical system is smaller than an area of the pupil of the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of computing a position of an image of the predetermined illumination region from light received, a step of computing a difference between the position of the image of the predetermined illumination region and a reference position, and a step of calculating an amount of inclination at a surface of the sample, from the difference calculated.
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Patent Agency Ranking
公开(公告)号：US20220074854A1
公开(公告)日：2022-03-10
申请号：US17528404
申请日：2021-11-17
Applicant: OLYMPUS CORPORATION
Inventor： Yoshimasa SUZUKI , Toshiro OKAMURA
Abstract: A refractive index distribution estimating system includes an illumination optical system configured to illuminate a sample, an imaging optical system configured to form an optical sample image, an image sensor configured to capture optical images of the sample, and a processor configured to reconstruct a refractive index distribution of the sample from images. The processor performs processing including the steps of: estimating the sample; calculating the estimated sample image from a plurality of first wavefronts emanating from a plurality of modeled light sources; optimizing a refractive index distribution of the estimated sample from a plurality of second wavefronts after the first wavefronts pass through the estimated sample, the captured image, and the image of the estimated sample; updating the estimation sample by repeating calculation of the estimated sample image and optimization of the refractive index distribution of the estimated sample; and reconstructing and outputting a structure of the estimated sample.
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公开(公告)号：US20190265022A1
公开(公告)日：2019-08-29
申请号：US16406103
申请日：2019-05-08
Applicant: OLYMPUS CORPORATION
Inventor： Mayumi ODAIRA , Yoshimasa SUZUKI
Abstract: A sample shape measuring apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and a processing apparatus. A scanning unit relatively moves a light spot and the sample. Illumination light applied to the sample is transmitted through the sample, and light transmitted through the sample is incident on the detection optical system. The light detection element receives light. The illumination optical system or the detection optical system includes an optical member. The processing apparatus obtains a quantity of light based on a received light, calculates at least one of a difference and a ratio between the quantity of light and a reference quantity of light, calculates an amount of tilt at a surface of the sample, and calculates a shape of the sample from the amount of tilt.
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公开(公告)号：US20160048011A1
公开(公告)日：2016-02-18
申请号：US14926517
申请日：2015-10-29
Applicant: OLYMPUS CORPORATION
Inventor： Yoshimasa SUZUKI , Kazuo KAJITANI
CPC classification number: G02B21/12 , G02B5/005 , G02B13/22 , G02B21/02 , G02B21/086 , G02B21/14 , G02B21/367
Abstract: A sample observation device includes an illumination optical system and an observation optical system, and the illumination optical system includes a light source, a condenser lens and an aperture member, and the observation optical system includes an objective lens and an imaging lens, and the aperture member has a light-shielding part or a darkening part and a transmission part, and the aperture member is disposed so that the light-shielding part or the darkening part includes an optical axis of the illumination optical system, and an image of an inner edge of the transmission part is formed inside of an outer edge of the pupil of the objective lens, and an image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens.
Abstract translation: 样本观察装置包括照明光学系统和观察光学系统，并且所述照明光学系统包括光源，聚光透镜和光圈部件，并且所述观察光学系统包括物镜和成像透镜，并且所述光圈 构件具有遮光部分或变暗部分和透射部分，并且孔径构件设置成使得遮光部分或变暗部分包括照明光学系统的光轴，并且内边缘的图像 在物镜的光瞳的外缘的内侧形成有透光部，透镜部的外缘的图像形成在物镜的光瞳的外缘的外侧。
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公开(公告)号：US20210048387A1
公开(公告)日：2021-02-18
申请号：US17084717
申请日：2020-10-30
Applicant: OLYMPUS CORPORATION
Inventor： Mayumi ODAIRA , Yoshimasa SUZUKI
Abstract: A data acquisition apparatus includes a light source, a first beam splitter, a predetermined beam splitter, a first light deflector, a second light deflector, a first measuring unit, a second measuring unit, a second beam splitter, and a photodetector. A second measurement optical path is positioned in a first direction and a reference optical path is positioned in a second direction. The predetermined beam splitter is disposed in the second measurement optical path or the reference optical path. A first measurement optical path is positioned between the predetermined beam splitter and the photodetector. The first light deflector and the first measuring unit are disposed in the first measurement optical path, and the second light deflector and the second measuring unit are disposed in the second measurement optical path. The first measurement optical path and the second measurement optical path intersect.
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公开(公告)号：US20180073865A1
公开(公告)日：2018-03-15
申请号：US15815867
申请日：2017-11-17
Applicant: OLYMPUS CORPORATION
Inventor： Yoshimasa SUZUKI , Hisashi ODE , Mayumi ODAIRA
CPC classification number: G01B11/2513 , G01B11/24 , G01B11/26 , G02B21/0016 , G02B21/0088 , G02B21/082 , G02B21/084 , G02B21/26 , G02B21/364
Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as not to include the optical axis at a pupil position of the illumination optical system and is set such that the illumination light is applied to part of the inside of the pupil and the outside of the pupil at a pupil position of the observation optical system. The predetermined processing step includes a step of receiving light, a step of obtaining the quantity of light, a step of calculating the difference or the ratio between the quantity of light and a reference quantity of light, and a step of calculating the amount of tilt in the surface of the sample from the difference or the ratio.
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