SYSTEMS AND METHODS FOR AUTOFOCUS
    2.
    发明公开

    公开(公告)号:US20240151937A1

    公开(公告)日:2024-05-09

    申请号:US18499911

    申请日:2023-11-01

    发明人: David P. HOFFMAN

    IPC分类号: G02B7/28 G02B7/38

    CPC分类号: G02B7/282 G02B7/38

    摘要: A method for maintaining focus of an optical system on a target surface is provided. The method includes directing at least one beam of light through an objective lens to a sample, wherein the at least one beam of light is associated with at least two effective numerical apertures and receiving at least one reflected beam at the objective lens. The at least one reflected beam is associated with the at least two effective numerical apertures. The method also includes determining at least one image based on the at least one reflected beam, determining a baseline of a feature for each of the one or more objects, and when the feature differs from the baseline, adjusting a working distance between the objective lens and the sample.

    Focus control device, lens apparatus, imaging apparatus, and control method

    公开(公告)号:US11809017B2

    公开(公告)日:2023-11-07

    申请号:US17071799

    申请日:2020-10-15

    发明人: Satoshi Maruyama

    IPC分类号: G02B7/28 G02B7/08 G03B3/10

    CPC分类号: G02B7/282 G02B7/08 G03B3/10

    摘要: A lens control unit as a control device includes a second position profile generator that generates a second target position profile indicating a target position of a second focus lens unit of a lens apparatus in driving the second focus lens unit. A trajectory shift amount calculator of the lens control unit calculates a shift between an ideal position of the second focus lens unit corresponding to a position of the first focus lens unit and a position of the second focus lens unit in the second target position profile. A correction value calculator corrects the target position of the second focus lens unit based on this shift.