公开(公告)号：US20160048011A1

公开(公告)日：2016-02-18

申请号：US14926517

申请日：2015-10-29

Applicant: OLYMPUS CORPORATION

Inventor： Yoshimasa SUZUKI ,  Kazuo KAJITANI

IPC: G02B21/12 ,  G02B21/14 ,  G02B21/36 ,  G02B21/02

CPC classification number: G02B21/12 ,  G02B5/005 ,  G02B13/22 ,  G02B21/02 ,  G02B21/086 ,  G02B21/14 ,  G02B21/367

Abstract: A sample observation device includes an illumination optical system and an observation optical system, and the illumination optical system includes a light source, a condenser lens and an aperture member, and the observation optical system includes an objective lens and an imaging lens, and the aperture member has a light-shielding part or a darkening part and a transmission part, and the aperture member is disposed so that the light-shielding part or the darkening part includes an optical axis of the illumination optical system, and an image of an inner edge of the transmission part is formed inside of an outer edge of the pupil of the objective lens, and an image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens.

Abstract translation: 样本观察装置包括照明光学系统和观察光学系统，并且所述照明光学系统包括光源，聚光透镜和光圈部件，并且所述观察光学系统包括物镜和成像透镜，并且所述光圈 构件具有遮光部分或变暗部分和透射部分，并且孔径构件设置成使得遮光部分或变暗部分包括照明光学系统的光轴，并且内边缘的图像 在物镜的光瞳的外缘的内侧形成有透光部，透镜部的外缘的图像形成在物镜的光瞳的外缘的外侧。

公开(公告)号：US20180313643A1

公开(公告)日：2018-11-01

申请号：US16028936

申请日：2018-07-06

Applicant: OLYMPUS CORPORATION

Inventor： Mayumi ODAIRA ,  Yoshimasa SUZUKI ,  Kazuo KAJITANI ,  Hisashi ODE

IPC: G01B11/24 ,  G01B11/26

CPC classification number: G01B11/24 ,  G01B11/26 ,  G02B21/0004 ,  G02B21/0096 ,  G02B21/086

Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set such that the illumination light is applied to part of inside of a pupil and outside of the pupil, a light intensity of the illumination light incident on the predetermined illumination region differs between a center and a periphery. The predetermined processing step includes a step of receiving light transmitted through the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

公开(公告)号：US20160357002A1

公开(公告)日：2016-12-08

申请号：US15240384

申请日：2016-08-18

Applicant: OLYMPUS CORPORATION

Inventor： Yoshimasa SUZUKI ,  Kazuo KAJITANI

IPC: G02B21/24 ,  G02B7/28 ,  G02B21/08 ,  G02B21/34

Abstract: A focusing method includes a step of preparing a microscope, a step of mounting a sample, and a predetermined processing step, the predetermined processing step includes a step of receiving light emitted from the observation optical system, a step of obtaining the quantity of light based on light from a predetermined region of the received light, a step of calculating a difference or a ratio between the quantity of light in the predetermined region and the quantity of light as a reference, a step of comparing a calculation result with a threshold, and a step of changing the distance between the sample and the observation optical system, and in the step of preparing, a partial region of illumination light is shielded or darkened, and when the result of the calculation is equal to or smaller than the threshold, the predetermined processing step is terminated.

Abstract translation: 聚焦方法包括准备显微镜的步骤，安装样品的步骤和预定的处理步骤，所述预定处理步骤包括接收从观察光学系统发射的光的步骤，获得基于光量的步骤 在来自所接收的光的预定区域的光上，计算在所述预定区域中的光量与所述光量之间的差异或比率作为参考的步骤，将计算结果与阈值进行比较的步骤，以及 改变样品与观察光学系统之间的距离的步骤，并且在准备的步骤中，照明光的一部分区域被屏蔽或变暗，并且当计算结果等于或小于阈值时， 预定处理步骤终止。