LIGHT-DEGRADABLE MATERIAL, SUBSTRATE, AND METHOD FOR PATTERNING THE SUBSTRATE
    2.
    发明申请
    LIGHT-DEGRADABLE MATERIAL, SUBSTRATE, AND METHOD FOR PATTERNING THE SUBSTRATE 有权
    光降解材料,基板和方法,用于绘制基板

    公开(公告)号:US20150267159A1

    公开(公告)日:2015-09-24

    申请号:US14435342

    申请日:2013-10-11

    IPC分类号: C12M1/00 G03F7/075 C08F230/08

    摘要: There is provided a new material that can form a finer pattern and can be applied to adsorption/adhesion control of various cell species, proteins, viruses, and the like without the limitation of the light source. A light-degradable material comprising: a moiety that is capable of bonding to a surface of a substrate through a siloxane bond; and a structural unit of Formula (2-a) and/or Formula (2-b): (where R2 to R4 are saturated linear alkyl groups; X is a hydrogen atom or an alkyl group; Z is a carbanionor a sulfo anion; Q is an ester bond group, a phosphodiester bond group, an amido bond group, an alkylene group, or an phenylene group or a combination of these divalent groups; m1 is an integer of 1 to 200, and n is an integer of 1 to 10).

    摘要翻译: 提供了可以形成更精细图案的新材料,并且可以应用于各种细胞种类,蛋白质,病毒等的吸附/粘附控制,而不受光源的限制。 一种光降解材料,包括:能够通过硅氧烷键与基材表面结合的部分; (2-a)和/或式(2-b)的结构单元:(其中R 2至R 4为饱和直链烷基; X为氢原子或烷基; Z为碳阴离子,磺基阴离子; Q是酯键基,磷酸二酯键基,酰胺键,亚烷基或亚苯基或这些二价基的组合; m1是1〜200的整数,n是1〜 10)。

    Cationically polymerizable resist underlayer film-forming composition

    公开(公告)号:US10437151B2

    公开(公告)日:2019-10-08

    申请号:US15563834

    申请日:2016-03-18

    摘要: There is provided a composition for forming a resist underlayer film for lithography that can be used as an underlayer anti-reflective coating that decreases the reflection of irradiated light during exposure from a semiconductor substrate toward the photoresist layer that is formed on the semiconductor substrate and in particular, can be suitably used as a flattening film for flattening a semiconductor substrate having a recess and a project by embedding, in a lithography process for production of a semiconductor device. A resist underlayer film-forming composition for lithography comprising (A) an alicyclic epoxy compound having an alicyclic skeleton and one or more epoxy groups, and a light absorption moiety, in the molecule, (B) a thermal acid generator, and (C) a solvent.

    FILM-FORMING COMPOSITION AND ION IMPLANTATION METHOD
    8.
    发明申请
    FILM-FORMING COMPOSITION AND ION IMPLANTATION METHOD 有权
    成膜组合物和离子植入方法

    公开(公告)号:US20150017791A1

    公开(公告)日:2015-01-15

    申请号:US14374992

    申请日:2013-02-08

    IPC分类号: H01L21/266 G03F7/40 C07F5/04

    摘要: There is provided an ion implantation method, a composition for forming an ion implantation film and a resist underlayer film-forming composition. An ion implantation method including the steps of: forming a film by applying a film-forming composition containing a compound including an element in group 13, group 14, group 15, or group 16 and an organic solvent onto a substrate and baking the film-forming composition; and implanting impurity ions into the substrate from above through the film and introducing the element in group 13, group 14, group 15, or group 16 in the film into the substrate. The film-forming composition is a film-forming composition for ion implantation containing a compound including an element in group 13, group 14, group 15, or group 16, and an organic solvent. In addition, the underlayer film-forming composition contains a compound having at least two borate ester groups.

    摘要翻译: 提供了离子注入方法,用于形成离子注入膜的组合物和抗蚀剂下层膜形成组合物。 一种离子注入方法,包括以下步骤:通过将含有第13族,第14族,第15族或第16族元素的化合物和有机溶剂的成膜组合物涂布在基材上, 成型组成; 并通过膜从上面将杂质离子注入到衬底中,并将膜中的第13族,第14族,第15族或第16族中的元素引入衬底中。 成膜组合物是用于离子注入的成膜组合物,其含有包含第13族,第14族,第15族或第16族中的元素的化合物和有机溶剂。 此外,下层膜形成组合物含有具有至少两个硼酸酯基的化合物。