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    Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
    1.
    发明申请
    Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping 有权

    公开(公告)号：US20050139942A1

    公开(公告)日：2005-06-30

    申请号：US11064608

    申请日：2005-02-23

    申请人： Mark Eskridge ,  David Malametz

    发明人： Mark Eskridge ,  David Malametz

    IPC分类号： G01P15/08 ,  G01P15/125 ,  H01L21/00 ,  G01P3/00 ,  H01L29/84

    CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/0831

    摘要： A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a an elongated sensing element of substantially uniform thickness suspended for motion relative to a rotational axis offset between first and second ends thereof such that a first portion of the sensing element between the rotational axis and the first end is longer than a shorter second portion between the rotational axis and the second end; a stationary silicon substrate spaced away from the sensing element; a capacitor formed by a surface of the substrate and each of the first and second portions of the sensing element; and a valley formed in the substrate surface opposite from the first longer portion of the sensing element and spaced away from the rotational axis a distance substantially the same as the distance between the rotational axis and the second end of the sensing element.

    Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
    2.
    发明申请
    Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping 有权

    公开(公告)号：US20050109109A1

    公开(公告)日：2005-05-26

    申请号：US10718974

    申请日：2003-11-20

    申请人： Mark Eskridge ,  David Malametz

    发明人： Mark Eskridge ,  David Malametz

    IPC分类号： G01P15/08 ,  G01P15/125

    CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/0831

    摘要： A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a an elongated sensing element of substantially uniform thickness suspended for motion relative to a rotational axis offset between first and second ends thereof such that a first portion of the sensing element between the rotational axis and the first end is longer than a shorter second portion between the rotational axis and the second end; a stationary silicon substrate spaced away from the sensing element; a capacitor formed by a surface of the substrate and each of the first and second portions of the sensing element; and a valley formed in the substrate surface opposite from the first longer portion of the sensing element and spaced away from the rotational axis a distance substantially the same as the distance between the rotational axis and the second end of the sensing element.

    METHODS AND SYSTEMS FOR LIMITING SENSOR MOTION
    3.
    发明申请
    METHODS AND SYSTEMS FOR LIMITING SENSOR MOTION 审中-公开
    限制传感器运动的方法和系统

    公开(公告)号：US20130264755A1

    公开(公告)日：2013-10-10

    申请号：US13440931

    申请日：2012-04-05

    申请人： Mark Eskridge

    发明人： Mark Eskridge

    IPC分类号： F16M7/00 ,  B32B37/12 ,  B32B37/14

    CPC分类号： B81B7/0016

    摘要： Methods and systems for limiting sensor motion. An embodiment of the invention uses unattached stud bumps to create a shock cage between a spring-mounted pad and a base substrate or a stop ring.

    摘要翻译： 限制传感器运动的方法和系统。 本发明的一个实施例使用未附接的柱形凸起来在弹簧安装的垫和基底衬底或止动环之间产生振动笼。

    Systems and methods for reduced stress anchors
    4.
    发明授权
    Systems and methods for reduced stress anchors 有权
    减少应力锚的系统和方法

    公开(公告)号：US08039912B2

    公开(公告)日：2011-10-18

    申请号：US12146014

    申请日：2008-06-25

    申请人： Michael Foster ,  Mark Williams ,  Mark Eskridge

    发明人： Michael Foster ,  Mark Williams ,  Mark Eskridge

    IPC分类号： H04R23/00

    CPC分类号： H01L29/84 ,  B81B1/00 ,  B81B2201/0242 ,  B81B2203/0307 ,  B81B2207/07 ,  B81C1/00039 ,  G01C19/5719

    摘要： Anchor systems and methods anchor components of a Micro-Electro-Mechanical Systems (MEMS) device to a substrate. An exemplary embodiment has a trace anchor bonded to a substrate, a device anchor bonded to the substrate, and an anchor flexure configured flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor.

    摘要翻译： 锚固系统和方法将微机电系统（MEMS）装置的部件锚定到基板上。 示例性实施例具有结合到基底的迹线锚固件，结合到基底的装置锚固件和构造成可挠曲地连接轨迹锚和装置锚固件的锚固件挠曲件，以基本上防止在轨迹锚中感应的应力的传递被传递到 设备锚点。

    SILICON TAB EDGE MOUNT FOR A WAFER LEVEL PACKAGE
    5.
    发明申请
    SILICON TAB EDGE MOUNT FOR A WAFER LEVEL PACKAGE 有权
    硅胶边缘安装用于水平包装

    公开(公告)号：US20110108935A1

    公开(公告)日：2011-05-12

    申请号：US12615188

    申请日：2009-11-09

    申请人： Mark Eskridge

    发明人： Mark Eskridge

    IPC分类号： H01L29/84

    CPC分类号： B81B7/007 ,  B81B7/0074 ,  B81B2207/097

    摘要： A Micro-ElectroMechanical Systems (MEMS) device having electrical connections (a metallization pattern) available at an edge of the MEMS die. The metallization pattern on the edge of the die allows the die to be mounted on edge with no further packaging, if desired.

    摘要翻译： 具有在MEMS管芯的边缘处可用的电连接（金属化图案）的微电子机械系统（MEMS）器件。 如果需要，模具边缘上的金属化图案允许模具安装在边缘上，而不需要进一步的包装。

    OUT-OF-PLANE COMPENSATION SUSPENSION FOR AN ACCELEROMETER
    7.
    发明申请
    OUT-OF-PLANE COMPENSATION SUSPENSION FOR AN ACCELEROMETER 失效
    用于加速度计的平面补偿悬挂

    公开(公告)号：US20050092107A1

    公开(公告)日：2005-05-05

    申请号：US10696323

    申请日：2003-10-29

    申请人： Mark Eskridge

    发明人： Mark Eskridge

    IPC分类号： B81B3/00 ,  G01P15/08 ,  G01P15/125 ,  G01L1/14

    CPC分类号： G01P15/0802 ,  B81B3/0062 ,  B81B2201/0235 ,  G01P15/125

    摘要： A high aspect ratio microelectromechanical system device for measuring an applied force and having a suspension structure for compensating out-of-plane displacements of the device proof mass, wherein the device includes a frame; a proof mass coupled to the frame for in-plane motion along an axis of symmetry, the proof mass having first and second sets of spaced apart capacitor plates projected therefrom on each side of the axis of symmetry and oriented substantially crosswise to the axis of symmetry; and third and fourth sets of spaced apart capacitor plates oriented substantially crosswise to the axis of symmetry of the proof mass and intermeshed respectively with the first and second sets of capacitor plates, the third and fourth sets of capacitor plates being suspended for motion relative to the frame about respective first and second axes of motion oriented substantially parallel with the axis of symmetry of the proof mass.

    摘要翻译： 一种高纵横比微机电系统装置，用于测量施加的力并具有用于补偿装置防止质量块的平面外位移的悬架结构，其中所述装置包括框架; 耦合到框架的用于沿着对称轴线进行平面内运动的检测质量块，所述检验质量块具有在对称轴线的每一侧上从其上突出的第一组和第二组间隔开的电容器板，并且基本上横向于对称轴 ; 以及第三组和第四组间隔开的电容器板，其基本上与检验质量体的对称轴交叉定位，并与第一和第二组电容器板相互啮合，第三组和第四组电容器板相对于 框架关于相应的第一和第二运动轴线基本上平行于检验质量块的对称轴定位。

    ANODICALLY BONDED STRAIN ISOLATOR
    8.
    发明申请
    ANODICALLY BONDED STRAIN ISOLATOR 有权
    阳离子粘结分离器

    公开(公告)号：US20130341735A1

    公开(公告)日：2013-12-26

    申请号：US13533356

    申请日：2012-06-26

    申请人： Mark Eskridge ,  Shifang Zhou

    发明人： Mark Eskridge ,  Shifang Zhou

    IPC分类号： H01L23/52 ,  H01L29/84 ,  H01L21/30

    CPC分类号： B81B7/0051

    摘要： A stress isolator that allows a sensor to be attached to materials of the same coefficient of thermal expansion and still provide the required elastic isolation between the sensor and the system to which it is mounted. The isolator is made of two materials, borosilicate glass and silicon. The glass is the same material as the mounting surface of the microelectromechanical system (MEMS) sensors. The silicon makes an excellent isolator, being very elastic and easy to form into complex shapes. The two materials of the isolator are joined using an anodic bond. The construction of the isolator can be specific to different types of MEMS sensors, making the most of their geometry to reduce overall volume.

    摘要翻译： 应力隔离器允许传感器连接到具有相同热膨胀系数的材料，并且仍然在传感器与其安装的系统之间提供所需的弹性隔离。 隔离器由两种材料制成，硼硅酸盐玻璃和硅。 该玻璃与微机电系统（MEMS）传感器的安装表面相同。 硅是一种优秀的隔离器，非常有弹性，易于形成复杂的形状。 隔离器的两种材料使用阳极键连接。 隔离器的结构可以针对不同类型的MEMS传感器，使其大部分几何形状能够减小总体积。

    Methods for reduced stress anchors
    9.
    发明授权
    Methods for reduced stress anchors 有权
    减少应力锚的方法

    公开(公告)号：US08383442B2

    公开(公告)日：2013-02-26

    申请号：US13237838

    申请日：2011-09-20

    申请人： Michael Foster ,  Mark Williams ,  Mark Eskridge

    发明人： Michael Foster ,  Mark Williams ,  Mark Eskridge

    IPC分类号： H01L21/00

    CPC分类号： H01L29/84 ,  B81B1/00 ,  B81B2201/0242 ,  B81B2203/0307 ,  B81B2207/07 ,  B81C1/00039 ,  G01C19/5719

    摘要： Methods of anchoring components of a Micro-Electro-Mechanical Systems (MEMS) device to a substrate. An exemplary embodiment has a trace anchor bonded to a substrate, a device anchor bonded to the substrate, and an anchor flexure configured to flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor.

    摘要翻译： 将微机电系统（MEMS）装置的部件锚固到基板上的方法。 示例性实施例具有结合到基底的迹线锚固件，结合到基底的装置锚固件和锚构件挠曲件，其构造成柔性地联接轨迹锚和装置锚固件，以基本上防止在轨迹锚中感应的应力的传递不被传递 到设备锚点。

    Silicon tab edge mount for a wafer level package
    10.
    发明授权
    Silicon tab edge mount for a wafer level package 有权
    用于晶片级封装的硅片边缘安装

    公开(公告)号：US07932570B1

    公开(公告)日：2011-04-26

    申请号：US12615188

    申请日：2009-11-09

    申请人： Mark Eskridge

    发明人： Mark Eskridge

    IPC分类号： H01L29/82

    CPC分类号： B81B7/007 ,  B81B7/0074 ,  B81B2207/097

    摘要： A Micro-ElectroMechanical Systems (MEMS) device having electrical connections (a metallization pattern) available at an edge of the MEMS die. The metallization pattern on the edge of the die allows the die to be mounted on edge with no further packaging, if desired.

    摘要翻译： 具有在MEMS管芯的边缘处可用的电连接（金属化图案）的微电子机械系统（MEMS）器件。 如果需要，模具边缘上的金属化图案允许模具安装在边缘上，而不需要进一步的包装。