发明授权
- 专利标题： Methods for reduced stress anchors
- 专利标题（中）： 减少应力锚的方法
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申请号： US13237838申请日： 2011-09-20
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公开(公告)号： US08383442B2公开(公告)日： 2013-02-26
- 发明人: Michael Foster , Mark Williams , Mark Eskridge
- 申请人： Michael Foster , Mark Williams , Mark Eskridge
- 申请人地址： US NJ Morristown
- 专利权人： Honeywell International Inc.
- 当前专利权人： Honeywell International Inc.
- 当前专利权人地址： US NJ Morristown
- 代理机构： Lowe Graham Jones PLLC
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
Methods of anchoring components of a Micro-Electro-Mechanical Systems (MEMS) device to a substrate. An exemplary embodiment has a trace anchor bonded to a substrate, a device anchor bonded to the substrate, and an anchor flexure configured to flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor.
公开/授权文献
- US20120070931A1 METHODS FOR REDUCED STRESS ANCHORS 公开/授权日：2012-03-22
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