公开(公告)号：US20240118308A1

公开(公告)日：2024-04-11

申请号：US18483626

申请日：2023-10-10

Applicant: SEIKO EPSON CORPORATION

Inventor： Satoru TANAKA

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831

Abstract: The physical quantity sensor includes, a first support beam, a movable body, a first stationary electrode fixation part, a first stationary electrode unit, a second stationary electrode unit, and a first wiring line. The first stationary electrode unit is disposed at the first direction side of the first support beam and the second stationary electrode unit is disposed at a fourth direction side of the first support beam. A rotary torque of the second movable electrode unit is lower than a rotary torque of the first movable electrode unit. The movable body has an opening at a fourth direction side with respect to the first support beam, and the first wiring line is extracted from the first stationary electrode fixation part to an outside of the movable body through the opening.

公开(公告)号：US11867716B2

公开(公告)日：2024-01-09

申请号：US18162874

申请日：2023-02-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumiya Ito

IPC: G01P15/135 ,  G01P15/08 ,  G01P15/125 ,  B81B7/00

CPC classification number: G01P15/135 ,  B81B7/0016 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0235 ,  G01P2015/0831 ,  G01P2015/0871

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

公开(公告)号：US20230314465A1

公开(公告)日：2023-10-05

申请号：US18191131

申请日：2023-03-28

Applicant: SEIKO EPSON CORPORATION

Inventor： Shota KIGURE

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831

Abstract: A physical quantity sensor includes: a substrate; a first anchor; a second anchor; a first support beam; a second support beam; a first movable body; a second movable body; and a shielder. A first fixed electrode and a second fixed electrode are provided on the substrate. The first movable body is provided to be swingable with respect to the substrate about a first rotation axis along a second direction. The second movable body is provided to be swingable with respect to the substrate about a second rotation axis along the second direction. The shielder is provided between the first movable body and the second movable body along a first direction.

公开(公告)号：US20180275162A1

公开(公告)日：2018-09-27

申请号：US15910419

申请日：2018-03-02

Applicant: Seiko Epson Corporation

Inventor： Satoru TANAKA

IPC: G01P15/125 ,  G01C21/10 ,  G01P15/18 ,  G01C21/00

CPC classification number: G01P15/125 ,  B60Y2400/304 ,  G01C21/005 ,  G01C21/10 ,  G01P15/18 ,  G01P2015/0831

Abstract: A physical quantity sensor includes: a movable body; a support that supports the movable body via a coupler; a substrate that is disposed so as to overlap the movable body in a plan view and is provided with a first fixed electrode and a second fixed electrode thereon along a first direction orthogonal to a longitudinal direction of the coupler; a third fixed electrode that does not overlap the movable body in the plan view, is electrically connected with any one of the first fixed electrode and the second fixed electrode, and is provided on the substrate; and a first dummy electrode that is disposed next to the third fixed electrode in the plan view, is at the same potential as the movable body, and is provided on the substrate.

公开(公告)号：US09869692B2

公开(公告)日：2018-01-16

申请号：US14536034

申请日：2014-11-07

Applicant: Robert Bosch GmbH

Inventor： Guenther-Nino-Carlo Ullrich

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2203/053 ,  G01P2015/0831 ,  G01P2015/0871 ,  Y10T29/49002

Abstract: A micromechanical Z-sensor, including a rocker having trough structures which is twistably supported with the aid of a spring device, the rocker having a mass distribution which is asymmetric with respect to the spring device, first electrodes situated above the trough structure, and second electrodes situated below the rocker, and a catch device including at least one spring element against which a stop element which is anchored to a substrate is able to strike, at least two catch devices which are spatially separated from each other being provided per rocker arm of the rocker.

公开(公告)号：US20170315147A1

公开(公告)日：2017-11-02

申请号：US15487294

申请日：2017-04-13

Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC

Inventor： Cenk ACAR ,  Brenton SIMON ,  Sandipan MAITY

IPC: G01P15/135

CPC classification number: G01P15/135 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0831

Abstract: Implementations of an accelerometer component may include: a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass including a first plurality of electrodes. Implementations may include a second Z proof mass rotatable about the first axis and coupled to the anchor, the second Z proof mass including a second plurality of electrodes. An X-axis accelerometer subcomponent may be located within a perimeter of the first Z proof mass, and a Y-axis accelerometer subcomponent may be located within a perimeter of the second Z proof mass. The first plurality of electrodes and the second plurality of electrodes may be symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.

公开(公告)号：US20170248629A1

公开(公告)日：2017-08-31

申请号：US15438040

申请日：2017-02-21

Applicant: Robert Bosch GmbH

Inventor： Kay Hammer ,  Axel Franke ,  Sebastian Guenther

IPC: G01P15/125 ,  G01P21/00

CPC classification number: G01P15/125 ,  G01P21/00 ,  G01P2015/0831

Abstract: A method for operating a micromechanical z-accelerometer. The method includes applying a test signal to an electrode in order to induce a defined displacement of a rocker of the z-accelerometer during operation of the z-accelerometer; detecting the displacement of the rocker and converting the displacement into an acceleration value; and evaluating the acquired acceleration value by determining a difference between the acquired acceleration value and an initial acceleration value acquired in a manufacturing process, a difference between the acquired acceleration value and the initial acceleration value being compared to a defined threshold value and assessed.

公开(公告)号：US09702895B2

公开(公告)日：2017-07-11

申请号：US14874845

申请日：2015-10-05

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Hitoshi Yoshida ,  Nobuyuki Ibara ,  Hideki Ueda ,  Takeshi Okada ,  Takeshi Mori ,  Masatoshi Nomura ,  Katsumi Kakimoto ,  Yuji Suzuki

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/18

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

公开(公告)号：US20170082653A1

公开(公告)日：2017-03-23

申请号：US15264866

申请日：2016-09-14

Applicant: Seiko Epson Corporation

Inventor： Koichiro KOMIZO

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831

Abstract: A physical quantity sensor includes a base substrate, a movable unit which is disposed so as to be displaced with respect to the base substrate, a detecting electrode which is provided on the movable unit side of the base substrate, and is disposed so as to face the movable unit, and a conductive film which is provided on the base substrate side of the movable unit, and is disposed so as to face the detecting electrode, in which a difference in work function between the detecting electrode and the conductive film is 0.4 eV or less.

公开(公告)号：US09476905B2

公开(公告)日：2016-10-25

申请号：US14267331

申请日：2014-05-01

Applicant: Seiko Epson Corporation

Inventor： Shigekazu Takagi

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B3/0008 ,  B81B2201/0235 ,  G01P2015/0831 ,  G01P2015/0871

Abstract: A sensor element includes: a detection electrode section; a movable body that is provided to face the detection electrode section; and a protruding section that is provided in a region where the detection electrode section is provided in a plan view of the detection electrode section seen in a vertical direction and protrudes toward the movable body. At least a part of a surface of the protruding section is made of an insulating material.

Abstract translation: 传感器元件包括：检测电极部分; 设置成面向所述检测电极部的移动体; 以及设置在检测电极部设置在垂直方向上的检测电极部分的平面图中的区域中的突出部分，并朝向可移动体突出。 突出部的表面的至少一部分由绝缘材料制成。