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8 条记录 (耗时 0.01 秒)

    MEMS teeter-totter accelerometer having reduced non-linearty
    1.
    发明申请
    MEMS teeter-totter accelerometer having reduced non-linearty 有权
    具有减少的非线性的MEMS跷跷板加速度计

    公开(公告)号：US20060185433A1

    公开(公告)日：2006-08-24

    申请号：US11145909

    申请日：2005-06-06

    申请人： Ronald Leonardson ,  David Malametz

    发明人： Ronald Leonardson ,  David Malametz

    IPC分类号： G01P15/125

    CPC分类号： G01P15/125 ,  G01P2015/0831

    摘要： An apparatus and method for force sensing device having a pendulous mechanism proof mass formed in a silicon semiconductor substrate and structured for rotation about an intermediate rotational axis, the proof mass being substantially rectangular in shape with opposing first and second lateral peripheral edges and opposing first and second endwise peripheral edges. A plurality of capacitor comb teeth are formed symmetrically along the opposing first and second endwise peripheral proof mass edges and along the opposing first and second lateral peripheral proof mass edges adjacent to the first and second endwise peripheral edges, and one or more mass reduction apertures are formed in an interior portion of the proof mass on one side of the intermediate hinge axis.

    摘要翻译： 一种用于力感测装置的装置和方法，其具有形成在硅半导体衬底中并围绕中间旋转轴线旋转构造的下摆机构防护质量块，所述防弹质量基本上为矩形，具有相对的第一和第二横向周边边缘， 第二端边缘。 多个电容器梳齿沿着相对的第一和第二端部周向隔离质量边缘对称地形成，并且沿着与第一和第二端部周边边缘相邻的相对的第一和第二横向周向质量边缘形成，并且一个或多个质量减小孔 形成在中间铰链轴的一侧上的证明物质的内部。

    Internally shock caged serpentine flexure for micro-machined accelerometer
    2.
    发明申请
    Internally shock caged serpentine flexure for micro-machined accelerometer 有权
    用于微加工加速度计的内部震动笼形蛇形弯曲

    公开(公告)号：US20050126287A1

    公开(公告)日：2005-06-16

    申请号：US10736330

    申请日：2003-12-15

    申请人： David Malametz

    发明人： David Malametz

    IPC分类号： G01P15/08 ,  G01P15/125 ,  G01P15/18 ,  G01P15/00

    CPC分类号： G01P15/0802 ,  B81B3/0051 ,  B81B7/0016 ,  B81B2201/0235 ,  B81B2203/0163 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

    摘要： An apparatus and method for sensing accelerations and other forces. The apparatus having a capacitance pick-off force sensor having a proof mass that is suspended relative to a relatively stationary frame by a plurality of serpentine suspension members having internal caging. The device provides easily implemented fabrication modification for trading-off between input range and pick-off sensitivity by altering etching periods of the serpentine suspension members. The input range and pick-off sensitivity can be traded-off by enlarging or reducing the quantity of elongated flexure fingers forming the serpentine suspension member. Different ones of the elongated flexure fingers are optionally formed with different thicknesses, whereby the serpentine suspension member exhibits a spring rate that progressively increases as it is compressed by in-plane motion of the proof mass relative to the relatively stationary frame.

    摘要翻译： 一种用于感测加速度和其他力的装置和方法。 该装置具有电容拾取力传感器，其具有相对于相对固定的框架被多个具有内部笼子的蛇形悬挂构件悬挂的证明质量块。 该装置通过改变蛇形悬挂构件的蚀刻周期提供了容易实现的制造修改，用于在输入范围和拾取灵敏度之间进行折衷。 可以通过扩大或减少形成蛇形悬挂构件的细长弯曲指头的数量来消除输入范围和拾取灵敏度。 不同的细长挠曲指状物可任选地形成有不同的厚度，由此蛇形悬挂构件表现出弹性率，其随着其被相对于相对静止的框架的面内运动而被逐渐增加。

    Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
    4.
    发明申请
    Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping 有权

    公开(公告)号：US20050109109A1

    公开(公告)日：2005-05-26

    申请号：US10718974

    申请日：2003-11-20

    申请人： Mark Eskridge ,  David Malametz

    发明人： Mark Eskridge ,  David Malametz

    IPC分类号： G01P15/08 ,  G01P15/125

    CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/0831

    摘要： A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a an elongated sensing element of substantially uniform thickness suspended for motion relative to a rotational axis offset between first and second ends thereof such that a first portion of the sensing element between the rotational axis and the first end is longer than a shorter second portion between the rotational axis and the second end; a stationary silicon substrate spaced away from the sensing element; a capacitor formed by a surface of the substrate and each of the first and second portions of the sensing element; and a valley formed in the substrate surface opposite from the first longer portion of the sensing element and spaced away from the rotational axis a distance substantially the same as the distance between the rotational axis and the second end of the sensing element.

    Dynamically balanced capacitive pick-off accelerometer
    6.
    发明申请
    Dynamically balanced capacitive pick-off accelerometer 有权
    动态平衡电容式拾取加速度计

    公开(公告)号：US20050268719A1

    公开(公告)日：2005-12-08

    申请号：US10863047

    申请日：2004-06-07

    申请人： David Malametz

    发明人： David Malametz

    IPC分类号： G01P15/00 ,  G01P15/08 ,  G01P15/125

    CPC分类号： G01P15/125 ,  G01P15/0802 ,  H01G5/18 ,  H01G5/40

    摘要： A Micro Electro-Mechanical System (MEMS) acceleration sensing device formed of a silicon substrate having a substantially planar surface; a pendulous sensing element having a substantially planar surface suspended in close proximity to the substrate planar surface; a flexure suspending the sensing element for motion relative to the substrate planar surface, the flexure having a both static geometric centerline and a dynamic centerline that is offset from the static geometric centerline; and a metal electrode positioned on the substrate surface for forming a capacitor with the pendulous sensing element, the metal electrode being positioned as a function of the dynamic centerline of the flexure.

    摘要翻译： 一种由具有基本平坦表面的硅基板形成的微机电系统（MEMS）加速度感测装置; 一个下摆感测元件，其具有悬挂在基板平面表面附近的基本平坦的表面; 所述挠曲件悬挂所述感测元件以相对于所述基板平面表面运动，所述挠曲件具有静态几何中心线和偏离所述静态几何中心线的动态中心线; 以及金属电极，其位于所述基板表面上，用于与所述下摆感测元件形成电容器，所述金属电极被定位为所述挠曲件的动态中心线的函数。

    Internally shock caged serpentine flexure for micro-machined accelerometer
    7.
    发明申请
    Internally shock caged serpentine flexure for micro-machined accelerometer 有权

    公开(公告)号：US20050183503A1

    公开(公告)日：2005-08-25

    申请号：US11102222

    申请日：2005-04-08

    申请人： David Malametz

    发明人： David Malametz

    IPC分类号： G01P15/08 ,  G01P15/125 ,  G01P15/18

    CPC分类号： G01P15/0802 ,  B81B3/0051 ,  B81B7/0016 ,  B81B2201/0235 ,  B81B2203/0163 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

    摘要： An apparatus and method for sensing accelerations and other forces. The apparatus having a capacitance pick-off force sensor having a proof mass that is suspended relative to a relatively stationary frame by a plurality of serpentine suspension members having internal caging. The device provides easily implemented fabrication modification for trading-off between input range and pick-off sensitivity by altering etching periods of the serpentine suspension members. The input range and pick-off sensitivity can be traded-off by enlarging or reducing the quantity of elongated flexure fingers forming the serpentine suspension member. Different ones of the elongated flexure fingers are optionally formed with different thicknesses, whereby the serpentine suspension member exhibits a spring rate that progressively increases as it is compressed by in-plane motion of the proof mass relative to the relatively stationary frame.

    Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
    8.
    发明申请
    Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping 有权

    公开(公告)号：US20050139942A1

    公开(公告)日：2005-06-30

    申请号：US11064608

    申请日：2005-02-23

    申请人： Mark Eskridge ,  David Malametz

    发明人： Mark Eskridge ,  David Malametz

    IPC分类号： G01P15/08 ,  G01P15/125 ,  H01L21/00 ,  G01P3/00 ,  H01L29/84

    CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/0831

    摘要： A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a an elongated sensing element of substantially uniform thickness suspended for motion relative to a rotational axis offset between first and second ends thereof such that a first portion of the sensing element between the rotational axis and the first end is longer than a shorter second portion between the rotational axis and the second end; a stationary silicon substrate spaced away from the sensing element; a capacitor formed by a surface of the substrate and each of the first and second portions of the sensing element; and a valley formed in the substrate surface opposite from the first longer portion of the sensing element and spaced away from the rotational axis a distance substantially the same as the distance between the rotational axis and the second end of the sensing element.