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公开(公告)号：US10522340B2
公开(公告)日：2019-12-31
申请号：US16042887
申请日：2018-07-23
发明人： Lauren Wilson , Anant Chimmalgi , Matthew Panzer , Ilya Bezel
摘要： A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
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公开(公告)号：US09941655B2
公开(公告)日：2018-04-10
申请号：US14667235
申请日：2015-03-24
CPC分类号： H01S3/0915 , G02B6/2804 , G02B6/4296 , H01S3/0071 , H01S3/2383 , H05G2/008
摘要： A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam.
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3.发明申请Switchable Laser and Fiber Based Lamphouse for Optimal Power Output in Different Wavelength Bands and Pixel Sizes 有权可切换的激光和光纤灯箱，用于不同波长带和像素尺寸的最佳功率输出公开(公告)号：US20150268400A1
公开(公告)日：2015-09-24
申请号：US14301781
申请日：2014-06-11
发明人： Anant Chimmalgi , Rahul Yadav , Joshua Wittenberg
CPC分类号： G02B6/0006 , G02B6/0008 , G02B6/3512 , H01J65/04
摘要： Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to generate light for different bands and pixel sizes, switchable fiber sizes and wavelength combinations are provided for optimal power output in different wavelength bands and pixel sizes. More specifically, switchable fiber configurations are provided where larger fibers with higher pump powers are used for bigger pixel sizes and higher wavelength bands while smaller fibers are used for smaller pixel size and shorter wavelength bands. Additionally and/or alternatively, pumping schemes are provided where pump wavelengths close to the absorption peak of the gas fill are used for bigger pixel sizes while pump wavelengths away from the gas fill absorption peak are used for smaller pixel sizes.
摘要翻译： 公开了用于提供激光持续等离子体光源的系统和方法。 与传统的激光持续等离子体光源不同，其中在灯塔中使用一个光纤尺寸和一个波长组合来产生用于不同带和像素尺寸的光，可提供可切换的光纤尺寸和波长组合用于在不同波长带和像素尺寸中的最佳功率输出 。 更具体地说，可提供可切换的光纤配置，其中具有更高的泵浦功率的较大的光纤用于较大的像素尺寸和较高的波长带，而较小的光纤用于较小的像素尺寸和较短的波长带。 附加地和/或替代地，提供泵送方案，其中靠近气体填充物的吸收峰的泵浦波长被用于更大的像素尺寸，而远离气体填充吸收峰的泵浦波长被用于更小的像素尺寸。
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4.发明申请Method and System for Controlling Convective Flow in a Light-Sustained Plasma 有权用于控制轻维持等离子体中对流的方法和系统公开(公告)号：US20140291546A1
公开(公告)日：2014-10-02
申请号：US14224945
申请日：2014-03-25
发明人： Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Ken Gross , David W. Shortt , Wei Zhao , Anant Chimmalgi , Jincheng Wang
CPC分类号： H01J65/042 , H01J61/28 , H01J61/523 , H01J65/00 , H05H1/24
摘要： A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.
摘要翻译： 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。
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公开(公告)号：US20180330937A1
公开(公告)日：2018-11-15
申请号：US16042887
申请日：2018-07-23
发明人： Lauren Wilson , Anant Chimmalgi , Matthew Panzer , Ilya Bezel
摘要： A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
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6.发明授权公开(公告)号：US09899205B2
公开(公告)日：2018-02-20
申请号：US15223335
申请日：2016-07-29
发明人： Ilya Bezel , Kenneth P. Gross , Lauren Wilson , Rahul Yadav , Joshua Wittenberg , Aizaz Bhuiyan , Anatoly Shchemelinin , Anant Chimmalgi , Richard Solarz
摘要： A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.
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7.发明申请公开(公告)号：US20170150590A1
公开(公告)日：2017-05-25
申请号：US15280073
申请日：2016-09-29
发明人： Anant Chimmalgi , Rudolf Brunner , Anatoly Shchemelinin , Ilya Bezel , Erik Kim , Rajeev Patil
CPC分类号： H05G2/008 , G02B6/4204 , H01J61/025 , H01J61/54 , H01J65/04 , H01J65/042 , H05G2/003
摘要： An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also includes one or more sustaining lasers configured to sustain the plasma. The illumination sources includes a delivery optical fiber one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers and an output of the one or more sustaining lasers to the delivery optical fiber.
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公开(公告)号：US20170094765A1
公开(公告)日：2017-03-30
申请号：US15274956
申请日：2016-09-23
发明人： Anant Chimmalgi , Sebaek Oh , Joshua Wittenberg , Lauren Wilson , Rahul Yadav , Ilya Bezel , Michael Navone , Anatoly Shchemelinin
CPC分类号： H05G2/008 , G01N23/04 , G02B6/0005 , G02B6/0006 , G02B6/0008 , G02B6/02042 , G02B6/028 , G02B6/4215 , G02B27/141
摘要： An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.
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公开(公告)号：US20150279628A1
公开(公告)日：2015-10-01
申请号：US14670210
申请日：2015-03-26
发明人： Lauren Wilson , Anant Chimmalgi , Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Gildardo Delgado
IPC分类号： H01J37/32
CPC分类号： H01J37/32339 , H01J37/32449 , H01J65/04
摘要： An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.
摘要翻译： 开放式等离子体灯包括空腔部分。 空腔部分的气体输入和气体输出被布置成使气体流过空腔部分。 等离子体灯还包括气体供应组件，其流体地耦合到空腔部分的气体输入并且被配置为将气体供应到空腔部分的内部容积。 等离子体灯还包括流体耦合到空腔部分的气体输出的喷嘴组件。 喷嘴组件和空腔部分布置成使得一定体积的气体从泵浦源接收泵送照明，其中持续等离子体发射宽带辐射。 喷嘴组件被配置成建立从空腔部分内到空腔部分外部的区域的对流气流，使得通过气流将一部分持续等离子体从空腔部分移除。
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10.发明申请公开(公告)号：US20150042979A1
公开(公告)日：2015-02-12
申请号：US14521977
申请日：2014-10-23
发明人： Anant Chimmalgi , Younus Vora , Rudolf Brunner
IPC分类号： G01N21/95
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8845 , G01N2021/95676 , G01N2201/0612 , G03F7/70483
摘要： Disclosed are methods and apparatus for performing inspection or metrology of a semiconductor device. The apparatus includes a plurality of laser diode arrays that are configurable to provide an incident beam having different wavelength ranges. At least some of the laser diode arrays form two dimensional stacks that have different wavelength ranges from each other. The apparatus also includes optics for directing the incident beam towards the sample, a detector for generating an output signal or image based on an output beam emanating from the sample in response to the incident beam, and optics for directing the output beam towards the detector. The apparatus further includes a controller for configuring the laser diode arrays to provide the incident beam at the different wavelength ranges and detecting defects or characterizing a feature of the sample based on the output signal or image.
摘要翻译： 公开了用于执行半导体器件的检查或计量的方法和装置。 该装置包括可配置为提供具有不同波长范围的入射光束的多个激光二极管阵列。 至少一些激光二极管阵列形成彼此具有不同波长范围的二维叠层。 该装置还包括用于将入射光束引向样品的光学器件，用于响应于入射光束而从样品发出的输出光束产生输出信号或图像的检测器，以及用于将输出光束引向检测器的光学器件。 该装置还包括控制器，用于配置激光二极管阵列以在不同波长范围提供入射光束，并基于输出信号或图像检测缺陷或表征样本的特征。
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