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    System and method for transverse pumping of laser-sustained plasma
    3.
    发明授权
    System and method for transverse pumping of laser-sustained plasma 有权

    公开(公告)号：US09723703B2

    公开(公告)日：2017-08-01

    申请号：US14675322

    申请日：2015-03-31

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Richard Solarz ,  Sebaek Oh ,  Matthew Derstine

    IPC: H05G2/00 ,  H01J61/02 ,  H01J61/30 ,  H01J65/04

    CPC classification number: H05G2/003 ,  H01J61/025 ,  H01J61/302 ,  H01J65/042 ,  H05G2/001 ,  H05G2/008

    Abstract: A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.

    Open Plasma Lamp for Forming a Light-Sustained Plasma
    4.
    发明申请
    Open Plasma Lamp for Forming a Light-Sustained Plasma 有权
    开放式等离子灯形成轻维持等离子体

    公开(公告)号：US20150279628A1

    公开(公告)日：2015-10-01

    申请号：US14670210

    申请日：2015-03-26

    Applicant: KLA-Tencor Corporation

    Inventor： Lauren Wilson ,  Anant Chimmalgi ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Gildardo Delgado

    IPC: H01J37/32

    CPC classification number: H01J37/32339 ,  H01J37/32449 ,  H01J65/04

    Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.

    Abstract translation: 开放式等离子体灯包括空腔部分。 空腔部分的气体输入和气体输出被布置成使气体流过空腔部分。 等离子体灯还包括气体供应组件，其流体地耦合到空腔部分的气体输入并且被配置为将气体供应到空腔部分的内部容积。 等离子体灯还包括流体耦合到空腔部分的气体输出的喷嘴组件。 喷嘴组件和空腔部分布置成使得一定体积的气体从泵浦源接收泵送照明，其中持续等离子体发射宽带辐射。 喷嘴组件被配置成建立从空腔部分内到空腔部分外部的区域的对流气流，使得通过气流将一部分持续等离子体从空腔部分移除。

    Method and Apparatus to Reduce Thermal Stress by Regulation and Control of Lamp Operating Temperatures
    5.
    发明申请
    Method and Apparatus to Reduce Thermal Stress by Regulation and Control of Lamp Operating Temperatures 有权
    通过调节和控制灯泡工作温度来减少热应力的方法和装置

    公开(公告)号：US20140060792A1

    公开(公告)日：2014-03-06

    申请号：US13975945

    申请日：2013-08-26

    Applicant: KLA-Tencor Corporation

    Inventor： Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Erik Kim ,  Rudolf Brunner ,  Quang Giang ,  Lauren Wilson ,  Ken Gross ,  Ilya Bezel ,  Dan Scott ,  Younus Vora ,  Matthew Derstine ,  Cedric Lasfargues

    IPC: F28C3/04

    CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

    Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

    Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。

    System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination
    6.
    发明授权
    System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination 有权

    公开(公告)号：US10714327B2

    公开(公告)日：2020-07-14

    申请号：US16283379

    申请日：2019-02-22

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Derstine

    IPC: H01J61/02 ,  G02B27/14 ,  H01J65/04 ,  G01N21/55 ,  G01N23/04

    Abstract: A system for pumping laser sustained plasma and enhancing one or more selected wavelengths of output illumination generated by the laser sustained plasma is disclosed. In embodiments, the system includes one or more pump modules configured to generate pump illumination for the laser sustained plasma and one or more enhancing illumination sources configured to generate enhancing illumination at one or more selected wavelengths. The pump illumination may be directed along one or more pump illumination paths that are non-collinear to an output illumination path of the output illumination. The enhancing illumination may be directed along an illumination path that is collinear to the output illumination path of the output illumination so that the enhancing illumination is combined with the output illumination, thereby enhancing the output illumination at the one or more selected wavelengths.

    System and Method for Pumping Laser Sustained Plasma and Enhancing Selected Wavelengths of Output Illumination
    8.
    发明申请
    System and Method for Pumping Laser Sustained Plasma and Enhancing Selected Wavelengths of Output Illumination 审中-公开

    公开(公告)号：US20190287785A1

    公开(公告)日：2019-09-19

    申请号：US16283379

    申请日：2019-02-22

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Derstine

    IPC: H01J61/02 ,  G02B27/14 ,  G01N23/04 ,  H01J65/04 ,  G01N21/55

    Abstract: A system for pumping laser sustained plasma and enhancing one or more selected wavelengths of output illumination generated by the laser sustained plasma is disclosed. In embodiments, the system includes one or more pump modules configured to generate pump illumination for the laser sustained plasma and one or more enhancing illumination sources configured to generate enhancing illumination at one or more selected wavelengths. The pump illumination may be directed along one or more pump illumination paths that are non-collinear to an output illumination path of the output illumination. The enhancing illumination may be directed along an illumination path that is collinear to the output illumination path of the output illumination so that the enhancing illumination is combined with the output illumination, thereby enhancing the output illumination at the one or more selected wavelengths.

    Method and System for Controlling Convective Flow in a Light-Sustained Plasma
    10.
    发明申请
    Method and System for Controlling Convective Flow in a Light-Sustained Plasma 有权
    用于控制轻维持等离子体中对流的方法和系统

    公开(公告)号：US20140291546A1

    公开(公告)日：2014-10-02

    申请号：US14224945

    申请日：2014-03-25

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Ken Gross ,  David W. Shortt ,  Wei Zhao ,  Anant Chimmalgi ,  Jincheng Wang

    IPC: H05H1/24 ,  H01J65/00

    CPC classification number: H01J65/042 ,  H01J61/28 ,  H01J61/523 ,  H01J65/00 ,  H05H1/24

    Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.

    Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。

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