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1.发明申请公开(公告)号：US20170150590A1
公开(公告)日：2017-05-25
申请号：US15280073
申请日：2016-09-29
Applicant: KLA-Tencor Corporation
Inventor： Anant Chimmalgi , Rudolf Brunner , Anatoly Shchemelinin , Ilya Bezel , Erik Kim , Rajeev Patil
CPC classification number: H05G2/008 , G02B6/4204 , H01J61/025 , H01J61/54 , H01J65/04 , H01J65/042 , H05G2/003
Abstract: An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also includes one or more sustaining lasers configured to sustain the plasma. The illumination sources includes a delivery optical fiber one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers and an output of the one or more sustaining lasers to the delivery optical fiber.
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2.发明申请Method and Apparatus to Reduce Thermal Stress by Regulation and Control of Lamp Operating Temperatures 有权通过调节和控制灯泡工作温度来减少热应力的方法和装置公开(公告)号：US20140060792A1
公开(公告)日：2014-03-06
申请号：US13975945
申请日：2013-08-26
Applicant: KLA-Tencor Corporation
Inventor： Jincheng Wang , Anant Chimmalgi , Rajeev Patil , Erik Kim , Rudolf Brunner , Quang Giang , Lauren Wilson , Ken Gross , Ilya Bezel , Dan Scott , Younus Vora , Matthew Derstine , Cedric Lasfargues
IPC: F28C3/04
CPC classification number: F28C3/04 , F21V19/00 , F21V29/02 , F21V29/503 , F21V29/60
Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.
Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。
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3.发明授权公开(公告)号：US10244613B2
公开(公告)日：2019-03-26
申请号：US15280073
申请日：2016-09-29
Applicant: KLA-Tencor Corporation
Inventor： Anant Chimmalgi , Rudolf Brunner , Anatoly Shchemelinin , Ilya Bezel , Erik Kim , Rajeev Patil
Abstract: An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also include one or more sustaining lasers configured to sustain the plasma. The illumination sources include a delivery optical fiber, one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers, and an output of the one or more sustaining lasers to the delivery optical fiber.
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4.发明授权Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures 有权通过调节和控制灯工作温度来减少热应力的方法和装置公开(公告)号：US09534848B2
公开(公告)日：2017-01-03
申请号：US13975945
申请日：2013-08-26
Applicant: KLA-Tencor Corporation
Inventor： Jincheng Wang , Anant Chimmalgi , Rajeev Patil , Erik Kim , Rudolf Brunner , Quang Giang , Lauren Wilson , Ken Gross , Ilya Bezel , Dan Scott , Younus Vora , Matthew Derstine , Cedric Lasfargues
CPC classification number: F28C3/04 , F21V19/00 , F21V29/02 , F21V29/503 , F21V29/60
Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.
Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。
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