公开(公告)号：US20170094765A1

公开(公告)日：2017-03-30

申请号：US15274956

申请日：2016-09-23

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Sebaek Oh ,  Joshua Wittenberg ,  Lauren Wilson ,  Rahul Yadav ,  Ilya Bezel ,  Michael Navone ,  Anatoly Shchemelinin

IPC: H05G2/00 ,  G01N23/04 ,  G02B6/02 ,  F21V8/00 ,  G02B27/14

CPC classification number: H05G2/008 ,  G01N23/04 ,  G02B6/0005 ,  G02B6/0006 ,  G02B6/0008 ,  G02B6/02042 ,  G02B6/028 ,  G02B6/4215 ,  G02B27/141

Abstract: An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.

公开(公告)号：US10257918B2

公开(公告)日：2019-04-09

申请号：US15274956

申请日：2016-09-23

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Sebaek Oh ,  Joshua Wittenberg ,  Lauren Wilson ,  Rahul Yadav ,  Ilya Bezel ,  Michael Navone ,  Anatoly Shchemelinin

IPC: H05G2/00 ,  G01N23/04 ,  G02B6/02 ,  F21V8/00 ,  G02B27/14 ,  G02B6/42 ,  G02B6/028

Abstract: An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.