- 专利标题: System and method for laser-sustained plasma illumination
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申请号: US15274956申请日: 2016-09-23
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公开(公告)号: US10257918B2公开(公告)日: 2019-04-09
- 发明人: Anant Chimmalgi , Sebaek Oh , Joshua Wittenberg , Lauren Wilson , Rahul Yadav , Ilya Bezel , Michael Navone , Anatoly Shchemelinin
- 申请人: KLA-Tencor Corporation
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Suiter Swantz pc llo
- 主分类号: H05G2/00
- IPC分类号: H05G2/00 ; G01N23/04 ; G02B6/02 ; F21V8/00 ; G02B27/14 ; G02B6/42 ; G02B6/028
摘要:
An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.
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