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    Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes
    4.
    发明授权
    Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes 有权
    可切换的激光和光纤灯塔，用于在不同波段和像素尺寸下实现最佳功率输出

    公开(公告)号：US09341761B2

    公开(公告)日：2016-05-17

    申请号：US14301781

    申请日：2014-06-11

    申请人： KLA-Tencor Corporation

    发明人： Anant Chimmalgi ,  Rahul Yadav ,  Joshua Wittenberg

    IPC分类号： F21V8/00 ,  G02B6/35

    CPC分类号： G02B6/0006 ,  G02B6/0008 ,  G02B6/3512 ,  H01J65/04

    摘要： Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to generate light for different bands and pixel sizes, switchable fiber sizes and wavelength combinations are provided for optimal power output in different wavelength bands and pixel sizes. More specifically, switchable fiber configurations are provided where larger fibers with higher pump powers are used for bigger pixel sizes and higher wavelength bands while smaller fibers are used for smaller pixel size and shorter wavelength bands. Additionally and/or alternatively, pumping schemes are provided where pump wavelengths close to the absorption peak of the gas fill are used for bigger pixel sizes while pump wavelengths away from the gas fill absorption peak are used for smaller pixel sizes.

    摘要翻译： 公开了用于提供激光持续等离子体光源的系统和方法。 与传统的激光持续等离子体光源不同，其中在灯塔中使用一个光纤尺寸和一个波长组合来产生用于不同带和像素尺寸的光，可提供可切换的光纤尺寸和波长组合用于在不同波长带和像素尺寸中的最佳功率输出 。 更具体地说，可提供可切换的光纤配置，其中具有更高的泵浦功率的较大的光纤用于较大的像素尺寸和较高的波长带，而较小的光纤用于较小的像素尺寸和较短的波长带。 附加地和/或替代地，提供泵送方案，其中靠近气体填充物的吸收峰的泵浦波长用于更大的像素尺寸，而远离气体填充吸收峰的泵波长用于较小的像素尺寸。

    System and Method for Inhibiting Radiative Emission of a Laser-Sustained Plasma Source
    9.
    发明申请
    System and Method for Inhibiting Radiative Emission of a Laser-Sustained Plasma Source 有权
    用于抑制激光持续等离子体源的辐射发射的系统和方法

    公开(公告)号：US20160205758A1

    公开(公告)日：2016-07-14

    申请号：US14989348

    申请日：2016-01-06

    申请人： KLA-Tencor Corporation

    发明人： Ilya Bezel ,  Anatoly Shchemelinin ,  Kenneth P. Gross ,  Richard Solarz ,  Lauren Wilson ,  Rahul Yadav ,  Joshua Wittenberg ,  Anant Chimmalgi ,  Xiumei Liu ,  Brooke Bruguier

    IPC分类号： H05G2/00

    CPC分类号： H05G2/008 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H05G2/003

    摘要： A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.

    摘要翻译： 用于形成激光维持等离子体的系统包括气体容纳元件，被配置为产生泵浦照明的照明源和收集器元件。 气体容纳元件构造成容纳一定体积的气体混合物。 收集器元件被配置为将来自泵送源的泵浦照明聚焦到容纳在气体容纳元件内的气体混合物的体积中，以便在发射宽带辐射的气体混合物的体积内产生等离子体。 气体混合物过滤由等离子体发射的一个或多个选定波长的辐射。

    Switchable Laser and Fiber Based Lamphouse for Optimal Power Output in Different Wavelength Bands and Pixel Sizes
    10.
    发明申请
    Switchable Laser and Fiber Based Lamphouse for Optimal Power Output in Different Wavelength Bands and Pixel Sizes 有权
    可切换的激光和光纤灯箱，用于不同波长带和像素尺寸的最佳功率输出

    公开(公告)号：US20150268400A1

    公开(公告)日：2015-09-24

    申请号：US14301781

    申请日：2014-06-11

    申请人： KLA-Tencor Corporation

    发明人： Anant Chimmalgi ,  Rahul Yadav ,  Joshua Wittenberg

    IPC分类号： F21V8/00 ,  G02B6/35

    CPC分类号： G02B6/0006 ,  G02B6/0008 ,  G02B6/3512 ,  H01J65/04

    摘要： Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to generate light for different bands and pixel sizes, switchable fiber sizes and wavelength combinations are provided for optimal power output in different wavelength bands and pixel sizes. More specifically, switchable fiber configurations are provided where larger fibers with higher pump powers are used for bigger pixel sizes and higher wavelength bands while smaller fibers are used for smaller pixel size and shorter wavelength bands. Additionally and/or alternatively, pumping schemes are provided where pump wavelengths close to the absorption peak of the gas fill are used for bigger pixel sizes while pump wavelengths away from the gas fill absorption peak are used for smaller pixel sizes.

    摘要翻译： 公开了用于提供激光持续等离子体光源的系统和方法。 与传统的激光持续等离子体光源不同，其中在灯塔中使用一个光纤尺寸和一个波长组合来产生用于不同带和像素尺寸的光，可提供可切换的光纤尺寸和波长组合用于在不同波长带和像素尺寸中的最佳功率输出 。 更具体地说，可提供可切换的光纤配置，其中具有更高的泵浦功率的较大的光纤用于较大的像素尺寸和较高的波长带，而较小的光纤用于较小的像素尺寸和较短的波长带。 附加地和/或替代地，提供泵送方案，其中靠近气体填充物的吸收峰的泵浦波长被用于更大的像素尺寸，而远离气体填充吸收峰的泵浦波长被用于更小的像素尺寸。