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1.发明授权公开(公告)号：US09899205B2
公开(公告)日：2018-02-20
申请号：US15223335
申请日：2016-07-29
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Kenneth P. Gross , Lauren Wilson , Rahul Yadav , Joshua Wittenberg , Aizaz Bhuiyan , Anatoly Shchemelinin , Anant Chimmalgi , Richard Solarz
Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.
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公开(公告)号：US10386234B2
公开(公告)日：2019-08-20
申请号：US15485097
申请日：2017-04-11
Applicant: KLA-Tencor Corporation
Inventor： Kenneth P. Gross
Abstract: A wideband spectrograph apparatus includes a first spectrograph assembly and one or more subsequent spectrograph assemblies. Each subsequent spectrograph assembly is optically coupled to a previous spectrograph assembly and is configured to receive a cascading beam from one or more dispersion elements of the previous spectrograph assembly. The first spectrograph assembly is configured for detecting illumination in a first wavelength range and the one or more subsequent spectrograph assemblies are configured for detecting illumination in wavelength ranges different from the first or any previous wavelength ranges to provide simultaneous sampling of different spectral portions of an input beam.
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3.发明申请System and Method for Imaging a Sample with an Illumination Source Modified by a Spatial Selective Wavelength Filter 审中-公开用空间选择波长滤波器修改的照明源成像样品的系统和方法公开(公告)号：US20170059490A1
公开(公告)日：2017-03-02
申请号：US14839338
申请日：2015-08-28
Applicant: KLA-Tencor Corporation
Inventor： Wei Zhao , Kenneth P. Gross , Ilya Bezel , Matthew Panzer
CPC classification number: H05G2/008 , G01J3/0208 , G01J3/12 , G01J3/14 , G01J3/18 , G01J2003/1213 , G01J2003/1286 , G01N21/9501 , G01N21/956 , G02B5/203 , G02B26/0833 , G03F7/7065
Abstract: A system for illuminating a sample with a spectrally filtered illumination source includes an illumination source configured to generate a beam of illumination having a first set of wavelengths. In addition, the system includes a wavelength filtering sub-system, a sample stage, an illumination sub-system, a detector, and an objective to focus illumination from the surface of one or more samples and focus the collected illumination to the detector. Further, the wavelength filtering sub-system includes one or more first dispersive elements positioned to introduce spatial dispersion into the beam, a spatial filter element, and one or more dispersive elements positioned to remove spatial dispersion from the beam. The spatial filter element is further positioned to pass at least a portion of the beam including a second set of wavelengths, wherein the second set of wavelengths is a subset of the first set of wavelengths.
Abstract translation: 用频谱滤波的照明源照射样本的系统包括被配置为产生具有第一组波长的照明束的照明源。 此外，该系统包括波长滤波子系统，样本台，照明子系统，检测器和用于聚焦来自一个或多个样本的表面的照明并将所收集的照明聚焦到检测器的目的。 此外，波长滤波子系统包括定位成将空间色散引入光束中的一个或多个第一色散元件，空间滤光元件以及定位成从光束去除空间色散的一个或多个色散元件。 空间滤波器元件还被定位成使包括第二组波长的波束的至少一部分通过，其中第二组波长是第一组波长的子集。
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公开(公告)号：US10690589B2
公开(公告)日：2020-06-23
申请号：US16043764
申请日：2018-07-24
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Kenneth P. Gross , John Szilagyi
Abstract: A broadband radiation source is disclosed. The system may include a plasma containment vessel configured to receive laser radiation from a pump source to sustain a plasma within gas flowed through the plasma containment vessel. The plasma containment vessel may be further configured to transmit at least a portion of broadband radiation emitted by the plasma. The system may also include a recirculation gas loop fluidically coupled to the plasma containment vessel. The recirculation gas loop may be configured to transport heated gas from an outlet of the plasma containment vessel, and further configured to transport cooled gas to an inlet of the plasma containment vessel.
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公开(公告)号：US10283342B2
公开(公告)日：2019-05-07
申请号：US15360397
申请日：2016-11-23
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Kenneth P. Gross , Matthew Panzer , Anant Chimmalgi , Lauren Wilson , Joshua Wittenberg
Abstract: A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.
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Patent Agency Ranking
公开(公告)号：US09887076B2
公开(公告)日：2018-02-06
申请号：US15207136
申请日：2016-07-11
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Kenneth P. Gross , David W. Shortt , Wei Zhao , Anant Chimmalgi , Jincheng Wang
CPC classification number: H01J65/042 , H01J61/28 , H01J61/523 , H01J65/00 , H05H1/24
Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a bulb-less gas containment structure, and a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb-less gas containment structure. Further, the plasma is generated within a concave region of the collector element, where the collector element includes an opening through the collector element for propagating a portion of a plume of the plasma from a first region of the bulb-less gas containment structure to a second region of the bulb-less gas containment structure, wherein the first region of the bulb-less gas containment structure and the second region of the bulb-less gas containment structure are at least partially separated by a surface of the collector element.
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7.发明申请公开(公告)号：US20170345639A1
公开(公告)日：2017-11-30
申请号：US15223335
申请日：2016-07-29
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Kenneth P. Gross , Lauren Wilson , Rahul Yadav , Joshua Wittenberg , Aizaz Bhuiyan , Anatoly Shchemelinin , Anant Chimmalgi , Richard Solarz
Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.
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公开(公告)号：US20170153145A1
公开(公告)日：2017-06-01
申请号：US15360722
申请日：2016-11-23
Applicant: KLA-Tencor Corporation
Inventor： Anatoly Shchemelinin , Ilya Bezel , Kenneth P. Gross
CPC classification number: G01J5/10 , G01J5/0003 , G01J5/524 , G01J2005/0077 , G01J2005/103
Abstract: Methods and systems for performing non-contact temperature measurements of optical elements with long wavelength infrared light are described herein. The optical elements under measurement exhibit low emissivity to long wavelength infrared light and are often highly reflective or highly transmissive to long wavelength infrared light. In one aspect, a material coating having high emissivity, low reflectivity, and low transmission at long wavelength IR wavelengths is disposed over selected portions of one or more optical elements of a metrology or inspection system. The locations of the material coating are outside the direct optical path of the primary measurement light employed by the metrology or inspection system to perform measurements of a specimen. Temperature measurements of the front and back surfaces of an IR-transparent optical element are performed with a single IR camera. Temperature measurements are performed through multiple optical elements in an optical path of a primary measurement beam.
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9.发明申请Method and System for Controlling Convective Flow in a Light-Sustained Plasma 有权用于控制轻维持等离子体中对流的方法和系统公开(公告)号：US20160322211A1
公开(公告)日：2016-11-03
申请号：US15207136
申请日：2016-07-11
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Kenneth P. Gross , David W. Shortt , Wei Zhao , Anant Chimmalgi , Jincheng Wang
CPC classification number: H01J65/042 , H01J61/28 , H01J61/523 , H01J65/00 , H05H1/24
Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.
Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。
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公开(公告)号：US10139283B2
公开(公告)日：2018-11-27
申请号：US15360722
申请日：2016-11-23
Applicant: KLA-Tencor Corporation
Inventor： Anatoly Shchemelinin , Ilya Bezel , Kenneth P. Gross
Abstract: Methods and systems for performing non-contact temperature measurements of optical elements with long wavelength infrared light are described herein. The optical elements under measurement exhibit low emissivity to long wavelength infrared light and are often highly reflective or highly transmissive to long wavelength infrared light. In one aspect, a material coating having high emissivity, low reflectivity, and low transmission at long wavelength IR wavelengths is disposed over selected portions of one or more optical elements of a metrology or inspection system. The locations of the material coating are outside the direct optical path of the primary measurement light employed by the metrology or inspection system to perform measurements of a specimen. Temperature measurements of the front and back surfaces of an IR-transparent optical element are performed with a single IR camera. Temperature measurements are performed through multiple optical elements in an optical path of a primary measurement beam.
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