Invention Grant
US09341761B2 Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes
有权
可切换的激光和光纤灯塔,用于在不同波段和像素尺寸下实现最佳功率输出
- Patent Title: Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes
- Patent Title (中): 可切换的激光和光纤灯塔,用于在不同波段和像素尺寸下实现最佳功率输出
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Application No.: US14301781Application Date: 2014-06-11
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Publication No.: US09341761B2Publication Date: 2016-05-17
- Inventor: Anant Chimmalgi , Rahul Yadav , Joshua Wittenberg
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: F21V8/00
- IPC: F21V8/00 ; G02B6/35

Abstract:
Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to generate light for different bands and pixel sizes, switchable fiber sizes and wavelength combinations are provided for optimal power output in different wavelength bands and pixel sizes. More specifically, switchable fiber configurations are provided where larger fibers with higher pump powers are used for bigger pixel sizes and higher wavelength bands while smaller fibers are used for smaller pixel size and shorter wavelength bands. Additionally and/or alternatively, pumping schemes are provided where pump wavelengths close to the absorption peak of the gas fill are used for bigger pixel sizes while pump wavelengths away from the gas fill absorption peak are used for smaller pixel sizes.
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