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    PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME
    2.
    发明申请
    PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME 审中-公开
    压力传感器及其制造方法

    公开(公告)号：US20150292970A1

    公开(公告)日：2015-10-15

    申请号：US14636998

    申请日：2015-03-03

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Ryunosuke GANDO ,  Daiki ONO ,  Naofumi NAKAMURA ,  Yumi HAYASHI

    IPC: G01L9/00

    CPC classification number: G01L9/0072 ,  G01L9/125

    Abstract: According to one embodiment, a pressure sensor includes a fixed electrode fixed on a substrate, a movable electrode provided above the fixed electrode, so as to be movable in vertical directions, a thin-film structure of a dome shape, forming, together with the substrate, a cavity to accommodate the fixed electrode and the movable electrode, the thin-film structure includes a communicating hole to communicate the cavity with an outside of the thin-film structure. A voltage is applied between the fixed electrode and the movable electrode to measure mechanical displacement of the movable electrode.

    Abstract translation: 根据一个实施例，压力传感器包括固定在基板上的固定电极，设置在固定电极上方的可动电极，以便能够在垂直方向上移动，形成圆顶形状的薄膜结构， 基板，用于容纳固定电极和可动电极的空腔，薄膜结构包括连通孔，用于将空腔与薄膜结构的外部连通。 在固定电极和可动电极之间施加电压以测量可动电极的机械位移。

    MEMS ELEMENT
    3.
    发明申请
    MEMS ELEMENT 有权

    公开(公告)号：US20210047171A1

    公开(公告)日：2021-02-18

    申请号：US16808499

    申请日：2020-03-04

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Fumitaka ISHIBASHI ,  Naofumi NAKAMURA ,  Hiroaki YAMAZAKI ,  Tomohiro SAITO ,  Tomohiko NAGATA ,  Kei MASUNISHI ,  Yoshihiko KURUI

    IPC: B81B3/00

    Abstract: According to one embodiment, a MEMS element includes a base body, a supporter, a film part, a first electrode, a second electrode, and an insulating member. The supporter is fixed to the base body. The film part is separated from the base body in a first direction and supported by the supporter. The first electrode is fixed to the base body and provided between the base body and the film part. The second electrode is fixed to the film part and provided between the first electrode and the film part. The insulating member includes a first insulating region and a second insulating region. The first insulating region is provided between the first electrode and the second electrode. A first gap is provided between the first insulating region and the second electrode. The second insulating region does not overlap the first electrode in the first direction.

    ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
    5.
    发明申请
    ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
    电子设备及其制造方法

    公开(公告)号：US20160293336A1

    公开(公告)日：2016-10-06

    申请号：US14848349

    申请日：2015-09-09

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Akira FUJIMOTO ,  Naofumi NAKAMURA ,  Tamio IKEHASHI

    IPC: H01G5/16 ,  H01G5/011

    CPC classification number: H01G5/16 ,  H01G5/011 ,  H01G5/014 ,  H01G5/18

    Abstract: According to one embodiment, an electronic device includes an underlying region, a variable capacitor including fixed electrodes and movable electrodes alternately arranged in a direction not perpendicular to a main surface of the underlying region, and a protective film which covers the variable capacitor and includes a conductive portion electrically connected to the fixed electrodes and having a hole.

    Abstract translation: 根据一个实施例，一种电子设备包括下面的区域，包括固定电极和可移动​​电极的可变电容器，所述固定电极和可移动​​电极在不垂直于下面区域的主表面的方向上交替布置;以及保护膜，其覆盖可变电容器并且包括 电连接到固定电极并具有孔的导电部分。

    SENSOR AND SENSOR SYSTEM
    6.
    发明申请
    SENSOR AND SENSOR SYSTEM 审中-公开
    传感器和传感器系统

    公开(公告)号：US20160265986A1

    公开(公告)日：2016-09-15

    申请号：US14841375

    申请日：2015-08-31

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Daiki ONO ,  Naofumi NAKAMURA ,  Yumi HAYASHI ,  Ryunosuke GANDO

    IPC: G01L1/14

    CPC classification number: G01L9/0073

    Abstract: According to one embodiment, a sensor includes a substrate, a first MEMO element provided on the substrate, a cap layer providing a cavity for accommodating the first MEMS element, and a second MEMS element for monitoring a pressure in the cavity, the second MEMS element being provided on the substrate in the cavity.

    Abstract translation: 根据一个实施例，传感器包括基板，设置在基板上的第一MEMO元件，提供用于容纳第一MEMS元件的空腔的盖层和用于监测空腔中的压力的​​第二MEMS元件，第二MEMS元件 设置在空腔中的基板上。

    PARTICLE INSPECTION UNIT AND PARTICLE INSPECTION SYSTEM
    8.
    发明申请
    PARTICLE INSPECTION UNIT AND PARTICLE INSPECTION SYSTEM 审中-公开
    颗粒检查单元和颗粒检查系统

    公开(公告)号：US20160320286A1

    公开(公告)日：2016-11-03

    申请号：US15205691

    申请日：2016-07-08

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Hiroko MIKI ,  Michihiko NISHIGAKI ,  Kentaro KOBAYASHI ,  Naofumi NAKAMURA

    IPC: G01N15/12 ,  G01N27/447 ,  G01N21/78

    CPC classification number: G01N15/12 ,  B01L3/502761 ,  G01N15/1031 ,  G01N21/78 ,  G01N27/44791 ,  G01N2015/1006 ,  G01N2015/1263

    Abstract: According to one embodiment, a particle inspection system includes an inspection module and a determination module. The inspection module includes a particle inspection chip includes electrodes for detecting existence of particles in a sample liquid by a change in an electrical signal, and a memory element which is provided separately from the electrodes and configured to store whether the inspection chip is a used chip or not. The determination module includes a determination circuit configured to determine the existence of the particles based on a detection signal of the inspection chip, and a control circuit configured to control an operation of the determination circuit from information in the memory element.

    Abstract translation: 根据一个实施例，颗粒检查系统包括检查模块和确定模块。 检查模块包括：粒子检查芯片，包括用于通过电信号的变化来检测样品液体中的颗粒的存在的电极;以及与电极分开设置的存储元件，其被配置为存储检查芯片是否是使用的芯片 或不。 确定模块包括确定电路，其被配置为基于检查芯片的检测信号确定颗粒的存在;以及控制电路，被配置为根据存储元件中的信息控制确定电路的操作。

    ANALYSIS PACKAGE
    9.
    发明申请
    ANALYSIS PACKAGE 有权
    分析包

    公开(公告)号：US20160231262A1

    公开(公告)日：2016-08-11

    申请号：US14848307

    申请日：2015-09-08

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Hiroshi HAMASAKI ,  Michihiko NISHIGAKI ,  Yutaka ONOZUKA ,  Kentaro KOBAYASHI ,  Hiroko MIKI ,  Naofumi NAKAMURA

    IPC: G01N27/00 ,  B01L3/00

    CPC classification number: B01L3/502715 ,  B01L3/5027 ,  B01L2200/0647 ,  B01L2300/0645 ,  B01L2300/0681 ,  B01L2300/0816 ,  B01L2300/0887 ,  B01L2400/0421 ,  B01L2400/086 ,  G01N15/12 ,  G01N27/3273 ,  G01N33/48721

    Abstract: According to one embodiment, an analysis package, including a board, an analysis chip provided on the board, the chip including a detector for detecting a particle, a flow channel of a sample liquid, and a liquid receiver of the sample liquid, a first mold layer provided on the analysis chip, the first mold layer including an opening above the liquid receiver, and a second mold layer provided on the board and the first mold layer, the second mold layer including an opening above the opening of the first mold layer, wherein the respective openings of the first and second mold layers are connected above the liquid receiver to allow the sample liquid to be introduced into the liquid receiver from outside.

    Abstract translation: 根据一个实施例，包括板的分析包，设置在板上的分析芯片，包括用于检测颗粒的检测器，样品液体的流动通道和样品液体的液体接收器的芯片，第一 设置在分析芯片上的模具层，第一模具层包括在液体接收器上方的开口，以及设置在板和第一模具层上的第二模具层，第二模具层包括在第一模具层的开口上方的开口 其中第一和第二模具层的相应开口连接在液体接收器上方，以允许样品液体从外部引入到液体接收器中。

    MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME
    10.
    发明申请
    MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME 审中-公开
    MEMS器件及其制造方法

    公开(公告)号：US20150259196A1

    公开(公告)日：2015-09-17

    申请号：US14476409

    申请日：2014-09-03

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Naofumi NAKAMURA

    IPC: B81B7/00 ,  B81C1/00

    CPC classification number: B81B7/0038 ,  B81B7/0058 ,  B81B2201/0264 ,  B81C1/00285 ,  B81C1/00476 ,  G01L1/148 ,  G01L9/0073

    Abstract: According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a MEMS element provided on the substrate, a first film having a plurality of through holes. The first film and the substrate form a cavity containing the MEMS element. The device further includes a second film provided on the first film, a third film provided on the substrate, and including a first region and a second region outside the first region, the first region and the second region being different from each other in height from the substrate. The height from the substrate of the first region of the third film is lower than the height from the substrate of the second region of the third film.

    Abstract translation: 根据一个实施例，公开了一种MEMS器件。 该器件包括衬底，设置在衬底上的MEMS元件，具有多个通孔的第一膜。 第一膜和衬底形成包含MEMS元件的空腔。 所述装置还包括设置在所述第一膜上的第二膜，设置在所述基板上的第三膜，并且在所述第一区域的外侧包括第一区域和第二区域，所述第一区域和所述第二区域的高度彼此不同 底物。 从第三膜的第一区域的基板的高度低于从第三膜的第二区域的基板的高度。

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