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    Capacitive force sensor and method for preparing the same
    4.
    发明申请
    Capacitive force sensor and method for preparing the same 有权
    电容力传感器及其制备方法

    公开(公告)号：US20170075467A1

    公开(公告)日：2017-03-16

    申请号：US15216821

    申请日：2016-07-22

    申请人： KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY ,  KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

    发明人： Heesuk KIM ,  Jong Ho KIM ,  Sang-Soo LEE ,  Yon Kyu PARK ,  Min-Seok KIM

    IPC分类号： G06F3/041 ,  G06F3/044 ,  G01L1/14

    CPC分类号： G06F3/044 ,  G01L1/146 ,  G01L1/148 ,  G06F2203/04103

    摘要： The present disclosure relates to a force sensor including a first substrate, a first electrode installed in a pattern on an upper surface of the first substrate, a second substrate disposed above and spaced apart from the first substrate, a second electrode installed in a pattern on a lower surface of the second substrate, facing the first electrode, and a dielectric interposed between the first substrate and the second substrate, wherein the dielectric includes a first dielectric surrounding an outside of the second electrode, and a pressure rib connecting the first dielectric to the first electrode, and a method for preparing the same, and shows a remarkably superior effect to related art, in terms of capacitance, interactivity and durability.

    摘要翻译： 本公开涉及一种力传感器，其包括第一基板，以第一基板的上表面上的图案安装的第一电极，设置在第一基板上方并与第一基板间隔开的第二基板，第二电极， 所述第二基板的下表面面对所述第一电极，以及介于所述第一基板和所述第二基板之间的电介质，其中所述电介质包括围绕所述第二电极的外部的第一电介质和将所述第一电介质连接到 第一电极及其制备方法，并且在电容，相互作用和耐久性方面显示出对现有技术的显着优异的影响。

    Solid-State Shear Stress Sensors with High Selectivity
    5.
    发明申请
    Solid-State Shear Stress Sensors with High Selectivity 审中-公开
    具有高选择性的固态剪切应力传感器

    公开(公告)号：US20170016783A1

    公开(公告)日：2017-01-19

    申请号：US15211838

    申请日：2016-07-15

    申请人： SILICON AUDIO, INC. ,  BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM

    发明人： Neal A. Hall ,  Donghwan Kim ,  Randall P. Williams ,  David P. Gawalt ,  Bradley D. Avenson ,  Caesar T. Garcia ,  Kristofer L. Gleason

    IPC分类号： G01L1/00

    CPC分类号： G01L1/16 ,  G01L1/148

    摘要： Embodiments of solid-state stress sensors are presented herein. A sensor system may include a substrate, a first layer of sensing material disposed on a first surface of the substrate, and at least three electrodes forming a first and second electrode pair. The at least three electrodes may include a first electrode, a second electrode, and a third electrode. The first electrode may be disposed in a first plane and the second electrode and the third electrode may be disposed in a second plane, the first and second planes associated with a first direction parallel to the first surface. The first and second electrodes may be at least partially offset in the first direction. The first and third electrodes may be at least partially offset in the first direction. The sensor system may be configured to generate an output signal in response to a shear stress within the sensing material.

    摘要翻译： 本文介绍了固态应力传感器的实施例。 传感器系统可以包括衬底，设置在衬底的第一表面上的感测材料的第一层以及形成第一和第二电极对的至少三个电极。 至少三个电极可以包括第一电极，第二电极和第三电极。 第一电极可以设置在第一平面中，并且第二电极和第三电极可以设置在第二平面中，第一和第二平面与平行于第一表面的第一方向相关联。 第一和第二电极可以在第一方向上至少部分地偏移。 第一和第三电极可以在第一方向上至少部分地偏移。 传感器系统可以被配置为响应于感测材料内的剪切应力而产生输出信号。

    Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a mems element
    6.
    发明申请
    Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a mems element 有权
    用于制造在mems元件的层结构中的麦克风结构和压力传感器结构的方法

    公开(公告)号：US20160304336A1

    公开(公告)日：2016-10-20

    申请号：US15098462

    申请日：2016-04-14

    申请人： Robert Bosch GmbH

    发明人： Florian Schoen ,  Bernhard Gehl

    IPC分类号： B81B7/02 ,  H04R19/00 ,  G01L1/14 ,  B81C1/00

    CPC分类号： B81B7/02 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C1/00214 ,  B81C2201/0109 ,  B81C2201/013 ,  G01L1/148 ,  G01L9/12 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  H04R2201/003

    摘要： A manufacturing method for a MEMS element, by which both a microphone including a microphone capacitor and a pressure sensor including a measuring capacitor are implemented in the MEMS structure. The components of the microphone and pressure sensor are formed in parallel but independently in the layers of the MEMS structure. The pressure sensor diaphragm is structured from a first layer, which functions as a base layer for the microphone diaphragm. The fixed counter-electrode of the measuring capacitor is structured from an electrically conductive second layer which functions as a diaphragm layer of the microphone. The fixed pressure sensor counter-element is structured from third and fourth layers. The third layer functions in the area of the microphone structure as a sacrificial layer, the thickness of which in the area of the microphone structure determines the electrode distance of the microphone capacitor. The microphone counter-element is structured from the fourth layer.

    摘要翻译： 一种MEMS元件的制造方法，其中包括麦克风电容器的麦克风和包括测量电容器的压力传感器都在MEMS结构中实现。 麦克风和压力传感器的部件在MEMS结构的层中平行但独立地形成。 压力传感器隔膜由用作麦克风隔膜的基底层的第一层构成。 测量电容器的固定对电极由用作麦克风的隔膜层的导电第二层构成。 固定压力传感器对元件由第三层和第四层构成。 第三层在麦克风结构的区域中作为牺牲层起作用，其麦克风结构区域中的厚度决定了麦克风电容器的电极距离。 麦克风相对元件由第四层构成。

    Position indicator of electromagnetic induction system and electronic ink cartridge
    7.
    发明授权
    Position indicator of electromagnetic induction system and electronic ink cartridge 有权
    电磁感应系统和电子墨盒的位置指示器

    公开(公告)号：US09297633B2

    公开(公告)日：2016-03-29

    申请号：US13924381

    申请日：2013-06-21

    申请人： Wacom Co., Ltd.

    发明人： Masayuki Obata

    IPC分类号： G01B7/00 ,  G06F3/046 ,  G06F3/0354

    CPC分类号： G01L1/144 ,  B41J2/17546 ,  G01B7/003 ,  G01B7/14 ,  G01L1/148 ,  G06F3/03545 ,  G06F3/046 ,  Y10T137/8242

    摘要： An electronic ink cartridge includes, in a direction of a central axis within a cylindrical body, a core body extended out from a distal end of the cylindrical body, a coupling member disposed on a side of a proximal end of the cylindrical body, a coil housed between the core body and the coupling member and having a predetermined inductance, and a pressure sensitive element whose capacitance changes according to pressure applied to the core body. Two terminals of the coil are electrically connected respectively to two terminals of the pressure sensitive element to thereby form two terminals of a resonance circuit formed by the coil and the pressure sensitive element. A connecting terminal electrically connected to at least one of the two terminals of the resonance circuit is disposed on a proximal end surface side of the coupling member to be accessible thereon from outside.

    摘要翻译： 一种电子墨盒，在圆柱体内的中心轴方向上包括从圆柱体的远端延伸的芯体，设置在圆柱体的近端一侧的耦合构件，线圈 容纳在芯体和耦合构件之间并且具有预定的电感，以及其电容根据施加到芯体的压力而变化的压敏元件。 线圈的两个端子分别电连接到压敏元件的两个端子，从而形成由线圈和压敏元件形成的谐振电路的两个端子。 电连接到谐振电路的两个端子中的至少一个端子的连接端子设置在耦合构件的近端表面侧上，以便从外部接近。

    INTERFACE APPARATUS AND METHODS
    8.
    发明申请
    INTERFACE APPARATUS AND METHODS 有权
    界面装置和方法

    公开(公告)号：US20160041652A1

    公开(公告)日：2016-02-11

    申请号：US14828049

    申请日：2015-08-17

    申请人： The Board of Trustees of the Leland Stanford Junior University

    发明人： Zhenan Bao ,  Chee-Keong Tee ,  Stefan Christian Bernhardt Mannsfeld ,  Justin P. Opatkiewicz

    IPC分类号： G06F3/044 ,  G06F3/041

    CPC分类号： G01L1/146 ,  G01L1/148 ,  G06F3/0412 ,  G06F3/0414 ,  G06F3/044 ,  G06F2203/04102 ,  G06F2203/04103 ,  G06F2203/04107 ,  H01L29/84 ,  H01L51/0055 ,  H01L51/0541 ,  Y10T29/49002 ,  Y10T156/10

    摘要： Input devices are provided. In accordance with an example embodiment, an input device includes an interface layer that flexes in response to pressure, a plurality of sense electrodes, a dielectric between the sense electrodes and the interface layer, and interconnecting circuitry. The dielectric compresses or expands in response to movement of the interface layer, and exhibits dielectric characteristics that vary based upon a state of compression of the dielectric. The interconnecting circuitry is to the sense electrodes and provides an output indicative of both the position of each sense electrode and an electric characteristic at each sense electrode that provides an indication of pressure applied to the dielectric adjacent the respective sense electrodes.

    摘要翻译： 提供输入设备。 根据示例实施例，输入装置包括响应于压力而弯曲的界面层，多个感测电极，感测电极和界面层之间的电介质以及互连电路。 电介质根据界面层的移动而压缩或膨胀，并且表现出基于电介质的压缩状态而变化的介电特性。 互连电路是针对感测电极并提供指示每个感测电极的位置和每个感测电极处的电特性两者的输出，该电特性提供施加到邻近各个感测电极的电介质的压力的指示。

    INTEGRATED ELECTRONIC DEVICE FOR MONITORING PRESSURE WITHIN A SOLID STRUCTURE
    9.
    发明申请
    INTEGRATED ELECTRONIC DEVICE FOR MONITORING PRESSURE WITHIN A SOLID STRUCTURE 有权
    用于在固体结构中监测压力的集成电子设备

    公开(公告)号：US20160041046A1

    公开(公告)日：2016-02-11

    申请号：US14780819

    申请日：2014-03-27

    申请人： STMICROELECTRONICS S.R.L.

    发明人： Alberto PAGANI

    IPC分类号： G01L1/14 ,  G01L1/26

    CPC分类号： G01L1/142 ,  G01L1/144 ,  G01L1/148 ,  G01L1/26 ,  G01L25/00

    摘要： The integrated electronic device detects the pressure related to a force applied in a predetermined direction within a solid structure. The device includes an integrated element that is substantially orthogonal to the direction of application of the force. First and second conductive elements are configured to face an operating surface. A measure module includes first and second measurement terminals which are electrically connected to the first and second conductive elements, respectively. A detecting element is arranged in the predetermined direction such that the operating surface is sandwiched between the first and second conductive elements and this detecting element. An insulating layer galvanically insulates the first and second conductive elements. A layer of dielectric material is sandwiched between the detecting element and the insulating layer, and is elastically deformable following the application of the force to change an electromagnetic coupling between the detecting element and the first and second conductive elements.

    摘要翻译： 集成电子设备检测与固体结构内的预定方向上施加的力相关的压力。 该装置包括基本上与力的施加方向正交的集成元件。 第一和第二导电元件构造成面对操作表面。 测量模块包括分别电连接到第一和第二导电元件的第一和第二测量端子。 检测元件沿预定方向布置，使得操作表面被夹在第一和第二导电元件和该检测元件之间。 绝缘层使第一和第二导电元件电绝缘。 介电材料层被夹在检测元件和绝缘层之间，并且随着施加力而弹性变形，以改变检测元件与第一和第二导电元件之间的电磁耦合。

    Pressure sensor having multiple pressure cells and sensitivity estimation methodology
    10.
    发明授权
    Pressure sensor having multiple pressure cells and sensitivity estimation methodology 有权
    压力传感器具有多个压力传感器和灵敏度估算方法

    公开(公告)号：US09176020B2

    公开(公告)日：2015-11-03

    申请号：US14043556

    申请日：2013-10-01

    申请人： FREESCALE SEMICONDUCTOR, INC.

    发明人： Chad S. Dawson ,  Peter T. Jones

    IPC分类号： G01L1/12 ,  G01L25/00 ,  G01L1/04 ,  G01L1/14

    CPC分类号： G01L25/00 ,  G01L1/04 ,  G01L1/142 ,  G01L1/148 ,  G01L9/0073 ,  G01L27/002

    摘要： A pressure sensor (20) includes a test cell (32) and sense cell (34). The sense cell (34) includes an electrode (42) formed on a substrate (30) and a sense diaphragm (68) spaced apart from the electrode (42) to produce a sense cavity (64). The test cell (32) includes an electrode (40) formed on the substrate (30) and a test diaphragm (70) spaced apart from the electrode (40) to produce a test cavity (66). Both of the cells (32, 34) are sensitive to pressure (36). However, a critical dimension (76) of the sense diaphragm (68) is less than a critical dimension (80) of the test diaphragm (70) so that the test cell (32) has greater sensitivity (142) to pressure (36) than the sense cell (34). Parameters (100) measured at the test cell (32) are utilized to estimate a sensitivity (138) of the sense cell (34).

    摘要翻译： 压力传感器（20）包括测试单元（32）和感测单元（34）。 感测单元（34）包括形成在基板（30）上的电极（42）和与电极（42）间隔开的感测隔膜（68）以产生感测腔（64）。 测试电池（32）包括形成在基板（30）上的电极（40）和与电极（40）间隔开的测试膜（70），以产生测试腔（66）。 两个电池（32,34）对压力敏感（36）。 然而，感测隔膜（68）的临界尺寸（76）小于测试隔膜（70）的临界尺寸（80），使得测试电池（32）具有较高的灵敏度（142）至压力（36） 比感测单元（34）。 在测试单元（32）处测量的参数（100）用于估计感测单元（34）的灵敏度（138）。